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# 1 "scmos.tech.out"
# 1 "<built-in>"
# 1 "<command-line>"
# 1 "/usr/include/stdc-predef.h" 1 3 4
# 1 "<command-line>" 2
# 1 "scmos.tech.out"
# 352 "scmos.tech.out"
tech
format 28
scmos
end
version
version 8.2.8
# 372 "scmos.tech.out"
description "MOSIS Scalable CMOS Technology for Standard Rules (No routing through wells)"
end
planes
well,w
implant,i
active,a
metal1,m1
metal2,m2
metal3,m3
oxide,ox
end
types
well pwell,pw
well nwell,nw
well capwell,cwell,cw
well highvoltnwell,hvnwell,hnwell,hnw
well highvoltpwell,hvpwell,hpwell,hpw
active polysilicon,red,poly,p
active electrode,poly2,el,p2
active capacitor,polycap,pcap,cap
active wellcapacitor,wellcap,wcap
active ndiffusion,ndiff,green
active pdiffusion,pdiff,brown
active highvoltndiffusion,hvndiff,hndiff
active highvoltpdiffusion,hvpdiff,hpdiff
metal1 metal1,m1,blue
metal2 metal2,m2,purple
metal3 metal3,m3,cyan
active ntransistor,nfet
active ptransistor,pfet
active entransistor,enfet
active eptransistor,epfet
active doublentransistor,nfloating-gate,nfloatg,nfg,nffet
active doubleptransistor,pfloating-gate,pfloatg,pfg,pffet
active highvoltntransistor,hvnfet,hnfet
active highvoltptransistor,hvpfet,hpfet
active collector,coll,col,co,cl
active emitter,emit,em
active pbase,pb
implant bccdiffusion,bd
active nbccdiffusion,nbd
active polycontact,pcontact,polycut,pc
active ndcontact,ndiffcut,ndc
active pdcontact,pdiffcut,pdc
active highvoltndcontact,hndiffcut,hndc
active highvoltpdcontact,hpdiffcut,hpdc
active capcontact,ccontact,capc,cc
active electrodecontact,econtact,ec,poly2contact,p2c
active collectorcontact,colcontact,colc,coc,clc
active emittercontact,emitcontact,emc
active pbasecontact,pbcontact,pbc
active nbccdiffcontact,nbdc
metal1 m2contact,m2cut,m2c,via,v
metal2 m3contact,m3cut,m3c,via2,v2
active psubstratepcontact,ppcontact,ppc,pwcontact,pwc,psc
active nsubstratencontact,nncontact,nnc,nwcontact,nwc,nsc
active psubstratepdiff,ppdiff,pohmic,ppd,psd
active nsubstratendiff,nndiff,nohmic,nnd,nsd
active highvoltpsubcontact,hpwcontact,hpsc
active highvoltnsubcontact,hnwcontact,hnsc
active highvoltpsubdiff,hpohmic,hpsd
active highvoltnsubdiff,hnohmic,hnsd
active nplusdoping,ndoping,ndop
active pplusdoping,pdoping,pdop
metal1 genericcontact,gcontact,gc
oxide substrateopen,subopen,open
oxide pdiffusionstop,pdiffstop,pstop
metal2 pad
oxide glass
end
contact
ec poly2 metal1
cc cap metal1
pc poly metal1
ndc ndiff metal1
pdc pdiff metal1
nsc nsd metal1
psc psd metal1
hndc hndiff metal1
hpdc hpdiff metal1
hnsc hnsd metal1
hpsc hpsd metal1
clc col metal1
emc emit metal1
pbc pbase metal1
nbdc nbd metal1
m2c metal1 metal2
m3c metal2 metal3
end
styles
styletype mos
cwell 10
nwell 12
pwell 13
hnwell 18
hpwell 11
poly 1
poly2 14
ndiff 2
pdiff 4
psd 5
nsd 3
hndiff 2
hndiff 11
hpdiff 4
hpdiff 18
hpsd 5
hpsd 11
hnsd 3
hnsd 18
ndop 2
ndop 38
pdop 4
pdop 38
nfet 6
nfet 7
pfet 8
pfet 9
enfet 6
enfet 30
epfet 8
epfet 31
nffet 6
nffet 7
nffet 30
pffet 8
pffet 9
pffet 31
hnfet 6
hnfet 7
hnfet 30
hpfet 8
hpfet 9
hpfet 31
pbase 15
pbc 15
pbc 20
pbc 32
emit 16
emc 16
emc 20
emc 32
col 3
clc 3
clc 20
clc 32
cap 1
cap 14
wcap 6
wcap 10
cc 1
cc 14
cc 20
cc 32
metal1 20
metal2 21
metal3 22
gc 19
pcontact 26
pcontact 32
ec 14
ec 20
ec 32
ndc 2
ndc 20
ndc 32
pdc 4
pdc 20
pdc 32
psc 5
psc 20
psc 32
nsc 3
nsc 20
nsc 32
hndc 2
hndc 20
hndc 32
hndc 11
hpdc 4
hpdc 20
hpdc 32
hpdc 18
hpsc 5
hpsc 20
hpsc 32
hpsc 11
hnsc 3
hnsc 20
hnsc 32
hnsc 18
m2contact 20
m2contact 21
m2contact 33
m3contact 21
m3contact 22
m3contact 37
pad 20
pad 21
pad 33
pad 34
glass 34
bd 17
nbd 17
nbd 3
nbdc 3
nbdc 17
nbdc 20
nbdc 32
open 2
open 20
pstop 8
error_p 42
error_s 42
error_ps 42
end
compose
compose nfet poly hndiff
compose pfet poly hpdiff
compose nfet poly ndiff
compose pfet poly pdiff
compose hnfet poly2 hndiff
compose hpfet poly2 hpdiff
compose enfet poly2 ndiff
compose epfet poly2 pdiff
compose nffet nfet poly2
compose pffet pfet poly2
compose nffet enfet poly
compose pffet epfet poly
compose cap poly poly2
paint clc col clc
paint emc emit emc
paint emc pbase emc
paint poly2 poly cap
paint poly poly2 cap
paint poly cap cap
paint poly2 cap cap
paint cap poly cap
paint cap poly2 cap
paint ec poly cc
paint pdc pwell ndc
paint pfet pwell nfet
paint epfet pwell enfet
paint pffet pwell nffet
paint pdiff pwell ndiff
paint nsd pwell psd
paint nsc pwell psc
paint ndc nwell pdc
paint nfet nwell pfet
paint enfet nwell epfet
paint nffet nwell pffet
paint ndiff nwell pdiff
paint psd nwell nsd
paint psc nwell nsc
paint pdc hpwell hndc
paint epfet hpwell hnfet
paint pffet hpwell hnfet
paint pdiff hpwell hndiff
paint nsd hpwell hpsd
paint nsc hpwell hpsc
paint ndc hnwell hpdc
paint enfet hnwell hpfet
paint nffet hnwell hpfet
paint ndiff hnwell hpdiff
paint psd hnwell hnsd
paint psc hnwell hnsc
# 740 "scmos.tech.out"
paint nfet cwell wcap
paint poly wcap wcap
paint ndiff wcap wcap
paint wcap poly wcap
paint wcap ndiff wcap
erase wcap poly ndiff
erase wcap ndiff poly
erase wcap cwell nfet
paint cwell nfet wcap active
erase wcap nfet cwell well
paint gc m1 gc
paint pad m1 pad
paint pad m2 pad
paint pad m3 pad
paint pad m2c pad
paint hpdc hpwell hndc
paint hpfet hpwell hnfet
paint hpdiff hpwell hndiff
paint hnsd hpwell hpsd
paint hnsc hpwell hpsc
paint hndc hnwell hpdc
paint hnfet hnwell hpfet
paint hndiff hnwell hpdiff
paint hpsd hnwell hnsd
paint hpsc hnwell hnsc
paint hpdc pwell ndc
paint hpfet pwell enfet
paint hpdiff pwell ndiff
paint hnsd pwell psd
paint hnsc pwell psc
paint hndc nwell pdc
paint hnfet nwell epfet
paint hndiff nwell pdiff
paint hpsd nwell nsd
paint hpsc nwell nsc
end
connect
# 798 "scmos.tech.out"
hnwell,hnsc,hnsd hnwell,hnsc,hnsd
hpwell,hpsc,hpsd hpwell,hpsc,hpsd
ndiff,ndc/a cwell
pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc
m2,m2c/m2,m3c/m2,pad m2,m2c/m2,m3c/m2,pad
m3,m3c/m3 m3,m3c/m3
poly,pc/a,nfet,pfet,wcap poly,pc/a,nfet,pfet,wcap
poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
ndiff,ndc/a,ndop psd,psc/a,pdop,pstop
pdiff,pdc/a,pdop,pstop nsd,nsc/a,ndop
hndiff,hndc/a,ndop hpsd,hpsc/a,pdop,pstop
hpdiff,hpdc/a,pdop,pstop hnsd,hnsc/a,ndop
ndiff ndc
pdiff pdc
hndiff hndc
hpdiff hpdc
nbd nbdc
pbase pbc
collector clc,nwell
emitter emc
gc ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a,nsd,nsc/a,psd,psc/a,hndiff,hndc/a,hpdiff,hpdc/a,metal1
gc poly,pc/a,nfet,pfet,wcap
gc poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
pad pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc
pad m2,m2c/m2,m3c/m2,pad
pad m3,m3c/m3
end
# 845 "scmos.tech.out"
cifoutput
# 1 "cif_template/objs/CIFout" 1
style lambda=1.0(gen)
scalefactor 100 50
layer CWC cwell
calma 59 1
layer CWN nwell
bloat-or pbase,pbc/act * 600
bloat-or pdiff,pdc/a,pfet,epfet,pffet * 500
bloat-or nsd,nsc/a * 300
bloat-or clc/a * 100
or col
grow 300
shrink 300
calma 42 1
layer CWP pwell
bloat-or ndiff,ndc/a,nfet,enfet,nffet * 500
bloat-or psd,psc/a * 300
and-not CWC
shrink 300
grow 300
grow 300
shrink 300
calma 41 1
layer CMS m2,m2c/m2,m3c/m2,pad
labels m2
calma 51 1
layer CMF pad
grow 100
or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc
labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
calma 49 1
layer CPG cap,cc
or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet
labels poly,nfet,pfet
calma 46 1
layer CAA clc
grow 100
or em,emc,col,pbase,pbc
or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
or hndiff,hndc/a,hpdiff,hpdc/a
or bd,nbd,nbdc/a
or open,pstop
labels ndiff,pdiff
calma 43 1
layer CX col,clc
grow 100
calma 60 1
layer CVA pad
shrink 500
or open
calma 50 1
layer CVA m2c
squares 100 200 300
calma 50 1
layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
calma 56 1
layer CCE capc,ec
squares 200
calma 55 1
layer CCC gc
calma 48 1
layer CCA ndc,pdc,clc,emc,pbc,nbdc
squares 200
or open
calma 48 1
layer CCA nsc,psc
squares 200
calma 48 1
layer CCP pc
squares 200
calma 47 1
layer CBA emc,emit
grow 400
bloat-or pbc * 100
or pbase
calma 58 1
templayer XTN clc
grow 100
or em,emc,col
grow 200
bloat-or ndiff,ndc/a,ndop * 200 psd,psc/a,pdiff,pdc/a,pdop 0
bloat-or nbd,nbdc,wcap * 200
grow 100
shrink 100
shrink 50
grow 50
templayer XTP pbc
grow 100
bloat-or pdiff,pdc/a,pdop * 200 nsd,nsc/a,ndiff,ndc/a,ndop 0
grow 100
shrink 100
shrink 50
grow 50
layer CSN clc
grow 100
or em,emc,col
grow 200
bloat-or ndiff,ndc/a * 200 psd,psc/a 0
bloat-or nfet,enfet,nffet * 200 ndiff 300 psd,psc/a 0
bloat-or nsd,nsc/a * 200 pdiff,pdc/a 0
bloat-or nbd,nbdc,wcap * 200
bloat-or ndop * 200 psd,psc/a,pdiff,pdc/a,pdop 0
grow 100
shrink 100
shrink 50
grow 50
and-not XTP
calma 45 1
layer CSP pbc
grow 100
bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0
bloat-or pfet,epfet,pffet * 200 pdiff 300 nsd,nsc/a 0
bloat-or psd,psc/a * 200 ndiff,ndc/a 0
bloat-or pdop * 200 nsd,nsc/a,ndiff,ndc/a,ndop 0
grow 100
shrink 100
shrink 50
grow 50
bloat-min pstop * 200 open 0
and-not XTN
and-not CSN
calma 44 1
layer CCD bd,nbd,nbdc/a
grow 200
calma 57 1
layer COP open
calma 23 1
layer CPS pstop
calma 24 1
layer COG pad
shrink 600
or glass
or open
labels pad
calma 52 1
layer XP pad
shrink 600
calma 26 1
render CWN 12 -0.2 0.2
render CAA 2 -0.15 0.15
render CPG 1 0.025 0.05
render CEL 14 0.1 0.05
render CCC 19 0.0 0.2
render CCA 19 0.0 0.2
render CCP 19 0.075 0.125
render CMF 20 0.2 0.05
render CVA 19 0.25 0.05
render CMS 21 0.3 0.05
style lambda=1.0(nwell)
scalefactor 100 50
layer CWC cwell
calma 59 1
layer CWN nwell
bloat-or pbase,pbc/a * 600
bloat-or pdiff,pdc/a,pfet,epfet,pffet * 500
bloat-or nsd,nsc/a * 300
bloat-or clc/a * 100
or col
grow 300
shrink 300
calma 42 1
layer CMS m2,m2c/m2,m3c/m2,pad
labels m2
calma 51 1
layer CMF pad
grow 100
or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc
labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
calma 49 1
layer CPG cap,cc
or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet
labels poly,nfet,pfet
calma 46 1
layer CAA clc
grow 100
or em,emc,col,pbase,pbc
or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
or hndiff,hndc/a,hpdiff,hpdc/a
or bd,nbd,nbdc/a
or open,pstop
labels ndiff,pdiff
calma 43 1
layer CX col,clc
grow 100
calma 60 1
layer CVA pad
shrink 500
or open
calma 50 1
layer CVA m2c
squares 100 200 300
calma 50 1
layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
calma 56 1
layer CCE capc,ec
squares 200
calma 55 1
layer CCC gc
calma 63 1
layer CCA ndc,pdc,clc,emc,pbc,nbdc
squares 200
or open
calma 48 1
layer CCA nsc,psc
squares 200
calma 48 1
layer CCP pc
squares 200
calma 47 1
layer CBA emc,emit
grow 400
bloat-or pbc * 100
or pbase
calma 58 1
templayer XTN clc
grow 100
or em,emc,col
grow 200
bloat-or ndiff,ndc/a * 200 psd,psc/a 0
bloat-or nbd,nbdc,ndop,wcap * 200
templayer XTP pbc
grow 100
bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0
layer CSN clc
grow 100
or emc,emit,col
grow 200
bloat-or ndiff,ndc/a * 200 psd,psc/a 0
bloat-or nfet,enfet,nffet * 200 ndiff 300 psd,psc/a 0
bloat-or nsd,nsc/a * 200 pdiff,pdc/a 0
bloat-or nbd,nbdc,ndop,wcap * 200
grow 100
shrink 100
shrink 50
grow 50
and-not XTP
calma 45 1
layer CSP pbc
grow 100
bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0
bloat-or pfet,epfet,pffet * 200 pdiff 300 nsd,nsc/a 0
bloat-or psd,psc/a * 200 ndiff,ndc/a 0
bloat-or pdop * 200
grow 100
shrink 100
shrink 50
grow 50
bloat-min pstop * 200 open 0
and-not XTN
and-not CSN
calma 44 1
layer CCD bd,nbd,nbdc/a
grow 200
calma 57 1
layer COP open
calma 23 1
layer CPS pstop
calma 24 1
layer COG pad
shrink 600
or glass
or open
labels pad
calma 52 1
layer XP pad
shrink 600
calma 26 1
style lambda=1.0(pwell)
scalefactor 100 50
layer CWP pwell
bloat-or ndiff,ndc/a,nfet,enfet,nffet * 500
bloat-or psd,psc/a * 300
grow 300
shrink 300
calma 41 1
layer CMS m2,m2c/m2,m3c/m2,pad
labels m2
calma 51 1
layer CMF pad
grow 100
or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc
labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
calma 49 1
layer CPG cap,cc
or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet
labels poly,nfet,pfet
calma 46 1
layer CAA clc
grow 100
or em,emc,col
or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
or hndiff,hndc/a,hpdiff,hpdc/a
or open,pstop
labels ndiff,pdiff
calma 43 1
layer CX col,clc
grow 100
calma 60 1
layer CVA pad
shrink 500
or open
calma 50 1
layer CVA m2c
squares 100 200 300
calma 50 1
layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
calma 56 1
layer CCE capc,ec
squares 200
calma 55 1
layer CCC gc
calma 63 1
layer CCA ndc,pdc,clc,emc,pbc
squares 200
or open
calma 48 1
layer CCA nsc,psc
squares 200
calma 48 1
layer CCP pc
squares 200
calma 47 1
layer CBA emc,emit
grow 400
bloat-or pbc * 100
or pbase
calma 58 1
templayer XTN
bloat-or ndiff,ndc/a * 200 psd,psc/a 0
templayer XTP
bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0
layer CSP
bloat-or pdiff,pdc/a * 200 nsd,nsc/a 0
bloat-or pfet,epfet,pffet * 200 pdiff 300 nsd,nsc/a 0
bloat-or psd,psc/a * 200 ndiff,ndc/a 0
bloat-or pdop * 200
grow 100
shrink 100
shrink 50
grow 50
bloat-min pstop * 200 open 0
and-not XTN
calma 44 1
layer CSN
bloat-or ndiff,ndc/a * 200 psd,psc/a 0
bloat-or nfet,enfet,nffet * 200 ndiff 300 psd,psc/a 0
bloat-or nsd,nsc/a * 200 pdiff,pdc/a 0
bloat-or ndop * 200
grow 100
shrink 100
shrink 50
grow 50
and-not XTP
and-not CSP
calma 45 1
layer COP open
calma 23 1
layer CPS pstop
calma 24 1
layer COG pad
shrink 600
or glass
or open
labels pad
calma 52 1
layer XP pad
shrink 600
calma 26 1
style lambda=0.8(gen)
scalefactor 80 40
layer CVN hnwell
bloat-or hpdiff,hpdc/a,hpfet * 560
bloat-or hnsd,hnsc/a * 240
calma 40 1
layer CVP hpwell
bloat-or hndiff,hndc/a,hnfet * 560
bloat-or hpsd,hpsc/a * 240
calma 39 1
layer CWN nwell
bloat-or pbase,pbc/act * 480
bloat-or pdiff,pdc/a,pfet,epfet,pffet * 400
bloat-or nsd,nsc/a * 240
bloat-or clc/a * 80
or col
grow 240
shrink 240
calma 42 1
layer CWP pwell
bloat-or ndiff,ndc/a,nfet,enfet,nffet * 400
bloat-or psd,psc/a * 240
grow 240
shrink 240
calma 41 1
layer CMS m2,m2c/m2,m3c/m2,pad
labels m2
calma 51 1
layer CMF pad
grow 80
or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc
labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
calma 49 1
layer CPG cap,cc
or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet
labels poly,nfet,pfet
calma 46 1
layer CAA clc
grow 80
or em,emc,col
or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
or hndiff,hndc/a,hpdiff,hpdc/a,hnsd,hnsc/a,hpsd,hpsc/a,hnfet,hpfet
or open,pstop
labels ndiff,pdiff
calma 43 1
layer CX col,clc
grow 80
calma 60 1
layer CVA pad
shrink 560
or open
calma 50 1
layer CVA m2c
squares 80 160 240
calma 50 1
layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
calma 56 1
layer CCE capc,ec
squares 160
calma 55 1
layer CCC gc
calma 63 1
layer CCA ndc,pdc,clc,emc,pbc
squares 160
or open
calma 48 1
layer CCA nsc,psc
squares 160
calma 48 1
layer CCA hndc,hpdc
squares 160 160 160
calma 48 1
layer CCA hnsc,hpsc
squares 160 160 160
calma 48 1
layer CCP pc
squares 160
calma 47 1
layer CBA emc,emit
grow 320
bloat-or pbc * 80
or pbase
calma 58 1
templayer XTN clc
grow 80
or em,emc,col
grow 160
bloat-or ndiff,ndc/a * 160 psd,psc/a 0
bloat-or hndiff,hndc/a * 160 hpsd,hpsc/a 0
grow 80
shrink 80
shrink 40
grow 40
templayer XTP pbc
grow 80
bloat-or pdiff,pdc/a * 160 nsd,nsc/a 0
bloat-or hpdiff,hpdc/a * 160 hnsd,hnsc/a 0
grow 80
shrink 80
shrink 40
grow 40
layer CSN clc
grow 80
or em,emc,col
grow 160
bloat-or ndiff,ndc/a * 160 psd,psc/a 0
bloat-or hndiff,hndc/a * 160 hpsd,hpsc/a 0
bloat-or nfet,enfet,nffet * 160 ndiff 240 psd,psc/a 0
bloat-or hnfet * 160 hndiff 240 hpsd,hpsc/a 0
bloat-or nsd,nsc/a * 160 pdiff,pdc/a 0
bloat-or hnsd,hnsc/a * 160 hpdiff,hpdc/a 0
bloat-or ndop * 160 psd,psc/a,pdiff,pdc/a,pdop 0
grow 80
shrink 80
shrink 40
grow 40
and-not XTP
calma 45 1
layer CSP pbc
grow 80
bloat-or pdiff,pdc/a * 160 nsd,nsc/a 0
bloat-or hpdiff,hpdc/a * 160 hnsd,hnsc/a 0
bloat-or pfet,epfet,pffet * 160 pdiff 240 nsd,nsc/a 0
bloat-or hpfet * 160 hpdiff 240 hnsd,hnsc/a 0
bloat-or psd,psc/a * 160 ndiff,ndc/a 0
bloat-or hpsd,hpsc/a * 160 hndiff,hndc/a 0
bloat-or pdop * 160 nsd,nsc/a,ndiff,ndc/a,ndop 0
grow 80
shrink 80
shrink 40
grow 40
bloat-min pstop * 160 open 0
and-not XTN
and-not CSN
calma 44 1
layer COP open
calma 23 1
layer CPS pstop
calma 24 1
layer COG pad
shrink 640
or glass
or open
labels pad
calma 52 1
layer XP pad
shrink 640
calma 26 1
style lambda=0.6(gen)
scalefactor 60 30
layer CWC cwell
calma 59 1
layer CWN nwell
bloat-or pbase,pbc/act * 360
bloat-or pdiff,pdc/a,pfet,epfet,pffet * 300
bloat-or nsd,nsc/a * 180
bloat-or clc/a * 60
or col
grow 180
shrink 180
calma 42 1
layer CWP pwell
bloat-or ndiff,ndc/a,nfet,enfet,nffet * 300
bloat-or psd,psc/a * 180
and-not CWC
shrink 180
grow 180
grow 180
shrink 180
calma 41 1
layer CMS m2,m2c/m2,m3c/m2,pad
labels m2
calma 51 1
layer CMF pad
grow 60
or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc
labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
calma 49 1
layer CPG cap,cc
or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet
labels poly,nfet,pfet
calma 46 1
layer CAA clc
grow 60
or em,emc,col,pbase,pbc
or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
or hndiff,hndc/a,hpdiff,hpdc/a
or bd,nbd,nbdc/a
or open,pstop
labels ndiff,pdiff
calma 43 1
layer CX col,clc
grow 60
calma 60 1
layer CVA pad
shrink 300
or open
calma 50 1
layer CVA m2c
squares 60 120 180
calma 50 1
layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
calma 56 1
layer CCE capc,ec
squares 120
calma 55 1
layer CCC gc
calma 48 1
layer CCA ndc,pdc,clc,emc,pbc,nbdc
squares 120
or open
calma 48 1
layer CCA nsc,psc
squares 120
calma 48 1
layer CCP pc
squares 120
calma 47 1
layer CBA emc,emit
grow 240
bloat-or pbc * 60
or pbase
calma 58 1
templayer XTN clc
grow 60
or em,emc,col
grow 120
bloat-or ndiff,ndc/a,ndop * 120 psd,psc/a,pdiff,pdc/a,pdop 0
bloat-or nbd,nbdc,wcap * 120
grow 60
shrink 60
shrink 30
grow 30
templayer XTP pbc
grow 60
bloat-or pdiff,pdc/a,pdop * 120 nsd,nsc/a,ndiff,ndc/a,ndop 0
grow 60
shrink 60
shrink 30
grow 30
layer CSN clc
grow 60
or em,emc,col
grow 120
bloat-or ndiff,ndc/a * 120 psd,psc/a 0
bloat-or nfet,enfet,nffet * 120 ndiff 180 psd,psc/a 0
bloat-or nsd,nsc/a * 120 pdiff,pdc/a 0
bloat-or nbd,nbdc,wcap * 120
bloat-or ndop * 120 psd,psc/a,pdiff,pdc/a,pdop 0
grow 60
shrink 60
shrink 30
grow 30
and-not XTP
calma 45 1
layer CSP pbc
grow 60
bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0
bloat-or pfet,epfet,pffet * 120 pdiff 180 nsd,nsc/a 0
bloat-or psd,psc/a * 120 ndiff,ndc/a 0
bloat-or pdop * 120 nsd,nsc/a,ndiff,ndc/a,ndop 0
grow 60
shrink 60
shrink 30
grow 30
bloat-min pstop * 120 open 0
and-not XTN
and-not CSN
calma 44 1
layer CCD bd,nbd,nbdc/a
grow 120
calma 57 1
layer COP open
calma 23 1
layer CPS pstop
calma 24 1
layer COG pad
shrink 600
or glass
or open
labels pad
calma 52 1
layer XP pad
shrink 600
calma 26 1
render CWN 12 -0.2 0.2
render CAA 2 -0.15 0.15
render CPG 1 0.025 0.05
render CEL 14 0.1 0.05
render CCC 19 0.0 0.2
render CCA 19 0.0 0.2
render CCP 19 0.075 0.125
render CMF 20 0.2 0.05
render CVA 19 0.25 0.05
render CMS 21 0.3 0.05
style lambda=0.6(nwell)
scalefactor 60 30
layer CWC cwell
calma 59 1
layer CWN nwell
bloat-or pbase,pbc/a * 360
bloat-or pdiff,pdc/a,pfet,epfet,pffet * 300
bloat-or nsd,nsc/a * 180
bloat-or clc/a * 60
or col
grow 180
shrink 180
calma 42 1
layer CMS m2,m2c/m2,m3c/m2,pad
labels m2
calma 51 1
layer CMF pad
grow 60
or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc
labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
calma 49 1
layer CPG cap,cc
or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet
labels poly,nfet,pfet
calma 46 1
layer CAA clc
grow 60
or em,emc,col,pbase,pbc
or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
or hndiff,hndc/a,hpdiff,hpdc/a
or bd,nbd,nbdc/a
or open,pstop
labels ndiff,pdiff
calma 43 1
layer CX col,clc
grow 60
calma 60 1
layer CVA pad
shrink 300
or open
calma 50 1
layer CVA m2c
squares 60 120 180
calma 50 1
layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
calma 56 1
layer CCE capc,ec
squares 120
calma 55 1
layer CCC gc
calma 63 1
layer CCA ndc,pdc,clc,emc,pbc,nbdc
squares 120
or open
calma 48 1
layer CCA nsc,psc
squares 120
calma 48 1
layer CCP pc
squares 120
calma 47 1
layer CBA emc,emit
grow 240
bloat-or pbc * 60
or pbase
calma 58 1
templayer XTN clc
grow 60
or em,emc,col
grow 120
bloat-or ndiff,ndc/a * 120 psd,psc/a 0
bloat-or nbd,nbdc,ndop,wcap * 120
templayer XTP pbc
grow 60
bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0
layer CSN clc
grow 60
or emc,emit,col
grow 120
bloat-or ndiff,ndc/a * 120 psd,psc/a 0
bloat-or nfet,enfet,nffet * 120 ndiff 180 psd,psc/a 0
bloat-or nsd,nsc/a * 120 pdiff,pdc/a 0
bloat-or nbd,nbdc,ndop,wcap * 120
grow 60
shrink 60
shrink 30
grow 30
and-not XTP
calma 45 1
layer CSP pbc
grow 60
bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0
bloat-or pfet,epfet,pffet * 120 pdiff 180 nsd,nsc/a 0
bloat-or psd,psc/a * 120 ndiff,ndc/a 0
bloat-or pdop * 120
grow 60
shrink 60
shrink 30
grow 30
bloat-min pstop * 120 open 0
and-not XTN
and-not CSN
calma 44 1
layer CCD bd,nbd,nbdc/a
grow 120
calma 57 1
layer COP open
calma 23 1
layer CPS pstop
calma 24 1
layer COG pad
shrink 600
or glass
or open
labels pad
calma 52 1
layer XP pad
shrink 600
calma 26 1
style lambda=0.6(pwell)
scalefactor 60 30
layer CWP pwell
bloat-or ndiff,ndc/a,nfet,enfet,nffet * 300
bloat-or psd,psc/a * 180
grow 180
shrink 180
calma 41 1
layer CMS m2,m2c/m2,m3c/m2,pad
labels m2
calma 51 1
layer CMF pad
grow 60
or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc
labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc
calma 49 1
layer CPG cap,cc
or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet
labels poly,nfet,pfet
calma 46 1
layer CAA clc
grow 60
or em,emc,col
or ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a
or hndiff,hndc/a,hpdiff,hpdc/a
or open,pstop
labels ndiff,pdiff
calma 43 1
layer CX col,clc
grow 60
calma 60 1
layer CVA pad
shrink 300
or open
calma 50 1
layer CVA m2c
squares 60 120 180
calma 50 1
layer CEL poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet
calma 56 1
layer CCE capc,ec
squares 120
calma 55 1
layer CCC gc
calma 63 1
layer CCA ndc,pdc,clc,emc,pbc
squares 120
or open
calma 48 1
layer CCA nsc,psc
squares 120
calma 48 1
layer CCP pc
squares 120
calma 47 1
layer CBA emc,emit
grow 240
bloat-or pbc * 60
or pbase
calma 58 1
templayer XTN
bloat-or ndiff,ndc/a * 120 psd,psc/a 0
templayer XTP
bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0
layer CSP
bloat-or pdiff,pdc/a * 120 nsd,nsc/a 0
bloat-or pfet,epfet,pffet * 120 pdiff 180 nsd,nsc/a 0
bloat-or psd,psc/a * 120 ndiff,ndc/a 0
bloat-or pdop * 120
grow 60
shrink 60
shrink 30
grow 30
bloat-min pstop * 120 open 0
and-not XTN
calma 44 1
layer CSN
bloat-or ndiff,ndc/a * 120 psd,psc/a 0
bloat-or nfet,enfet,nffet * 120 ndiff 180 psd,psc/a 0
bloat-or nsd,nsc/a * 120 pdiff,pdc/a 0
bloat-or ndop * 120
grow 60
shrink 60
shrink 30
grow 30
and-not XTP
and-not CSP
calma 45 1
layer COP open
calma 23 1
layer CPS pstop
calma 24 1
layer COG pad
shrink 600
or glass
or open
labels pad
calma 52 1
layer XP pad
shrink 600
calma 26 1
# 853 "scmos.tech.out" 2
# 867 "scmos.tech.out"
style plot
scalefactor 100 50
layer CM2 m2,m2c/m2,pad/m2
labels m2
layer CM1 pad
grow 100
or m1,m2c/m1,pc/m1,ndc/m1,pdc/m1,ppcont/m1,nncont/m1
labels m1,m2c/m1,pc/m1,ndc/m1,pdc/m1,ppcont/m1,nncont/m1,pad/m1
layer CP poly,pc/active,nfet,pfet
labels poly,nfet,pfet
layer CND ndiff,ndc,nfet,pwc,psd
labels ndiff
layer CPD pdiff,pdc,pfet,nwc,nsd
labels pdiff
layer CNP
bloat-or nsd,nwc * 150 ndiff,pdiff,ndc/active,pdc/active,ppcont/active,nncont/active,pfet,nfet,psd,nsd 0
layer CPP
bloat-or psd,pwc * 150 ndiff,pdiff,ndc/active,pdc/active,ppcont/active,nncont/active,pfet,nfet,psd,nsd 0
layer CV m2c
squares 100 200 300
layer CC ndc,pdc,pc,pwc,nwc
squares 200
layer CNW nwell
grow 400
shrink 400
layer CG pad
shrink 600
or glass
labels glass
end
# 910 "scmos.tech.out"
cifinput
# 1 "cif_template/objs/CIFin" 1
style lambda=1.0(gen)
scalefactor 100
layer nwell CWN
labels CWN
layer pwell CWP
labels CWP
layer poly CPG
labels CPG
layer pdiff CSP
and CAA
and CWN
layer ndiff CWP
or CWC
and CAA
and CSN
and-not CCD
layer nsd CWN
and CSN
and CAA
layer psd CWP
and CSP
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and-not CCD
layer pfet CAA
and CPG
and CSP
layer enfet CEL
and CAA
and CSN
and-not CCD
layer epfet CAA
and CEL
and CSP
layer nffet CAA
and CEL
and CPG
and CSN
and CWP
layer pffet CAA
and CEL
and CPG
and CSP
and CWN
layer ndc CWP
or CWC
and CCA
grow 100
and CAA
and CSN
and CMF
layer pdc CCA
grow 100
and CAA
and CWN
and CSP
and CMF
layer nsc CCA
grow 100
and CAA
and CSN
and CWN
and CMF
layer psc CCA
grow 100
and CAA
and CSP
and CWP
and CMF
layer gc CCC
layer m2c CVA
grow 100
and CMS
and CMF
labels CMS
layer m3c CVS
grow 100
and CMT
and CMS
and-not XP
layer electrode CEL
labels CEL
layer ec CCE
grow 100
and CMF
and CEL
labels CMF
layer cc CCE
grow 100
and CMF
and CEL
and CPG
labels CMF
layer cap CPG
and CEL
and-not CAA
labels CEL
layer pbc CCA
grow 100
and CBA
and CMF
labels CBA
layer col CX
and CAA
and CSN
and CWN
labels CAA
layer clc CCA
grow 100
and CX
and CAA
and CSN
and CWN
and CMF
labels CCA
layer emit CBA
and CSN
shrink 200
labels CBA
layer emc CCA
grow 100
and CBA
and CSN
and CMF
labels CBA
layer pc CCP
grow 100
and CPG
and CMF
layer nbd CSN
shrink 200
and CCD
and CAA
and-not CPG
layer nbdc CCA
grow 100
and CCD
and CSN
and CAA
layer bd CPG
or CEL
and CCD
and CAA
labels CCD
layer cwell CWC
labels CWC
layer glass COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWP
and-not CWN
layer pad CMF
shrink 100
and CMS
shrink 500
and CVA
shrink 100
and XP
and COG
grow 600
layer m1 CMF
labels CMF
layer m2 CMS
labels CMS
layer m3 CMT
and-not XP
labels CMT
calma COP 23 *
calma CPS 24 *
calma CCC 25 *
calma XP 26 *
calma CWP 41 *
calma CWN 42 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CWC 59 *
calma CVS 61 *
calma CMT 62 *
calma CX 63 *
style lambda=1.0(nwell)
scalefactor 100
layer nwell CWN
labels CWN
layer m3 CMT
and-not XP
labels CMT
layer m2 CMS
labels CMS
layer m1 CMF
labels CMF
layer poly CPG
labels CPG
layer psd CAA
and CSP
and-not CPS
layer pdiff CWN
and CAA
and CSP
labels CSP
layer ndiff CAA
and CSN
and-not CCD
labels CSN
layer nsd CWN
and CSN
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and-not CCD
layer pfet CAA
and CPG
and CSP
and CWN
layer enfet CEL
and CAA
and CSN
and-not CCD
layer epfet CAA
and CEL
and CSP
and CWN
layer nffet CAA
and CEL
and CPG
and CSN
layer pffet CAA
and CEL
and CPG
and CSP
and CWN
layer m3c CVS
grow 100
and CMT
and CMS
and-not XP
layer m2c CVA
grow 100
and CMS
and CMF
layer electrode CEL
labels CEL
layer ec CCE
or CCC
grow 100
and CMF
and CEL
layer cc CCE
grow 100
and CMF
and CEL
and CPG
labels CCE
layer cap CPG
and CEL
and-not CAA
layer psc CCA
grow 100
and CAA
and CSP
and CMF
layer ndc CCA
or CCC
grow 100
and CAA
and CSN
and CMF
layer pdc CCA
or CCC
grow 100
and CAA
and CWN
and CSP
and CMF
layer nsc CCA
or CCC
grow 100
and CAA
and CSN
and CWN
and CMF
layer pbc CCA
or CCC
grow 100
and CBA
and CMF
layer emit CBA
and CSN
shrink 200
layer emc CCA
grow 100
and CBA
and CSN
and CMF
layer col CX
and CAA
and CSN
and CWN
layer clc CCA
grow 100
and CX
and CAA
and CSN
and CWN
and CMF
layer pc CCP
or CCC
grow 100
and CPG
and CMF
labels CCP
layer nbd CSN
shrink 200
and CCD
and CAA
and-not CPG
layer nbdc CCA
grow 100
and CCD
and CSN
and CAA
layer bd CPG
or CEL
and CCD
and CAA
labels CCD
layer cwell CWC
labels CWC
layer glass COG
labels COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWN
layer pad CMF
shrink 100
and CMS
shrink 500
and CVA
shrink 100
and XP
and COG
grow 600
calma COP 23 *
calma CPS 24 *
calma XP 26 *
calma CWN 42 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CWC 59 *
calma CVS 61 *
calma CMT 62 *
calma CX 63 *
style lambda=1.0(oldnwell)
scalefactor 100
layer cwell CWC
layer nwell CWN
labels CWN
layer m3 CMT
and-not XP
labels CMT
layer m2 CMS
labels CMS
layer m1 CMF
labels CMF
layer poly CPG
labels CPG
layer psd CAA
layer pdiff CWN
and CAA
layer ndiff CAA
and CSN
and-not CCD
layer nsd CWN
and CSN
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and-not CCD
layer pfet CAA
and CPG
and CWN
layer enfet CEL
and CAA
and CSN
and-not CCD
layer epfet CAA
and CEL
and CWN
layer nffet CAA
and CEL
and CPG
and CSN
labels CEL
layer pffet CAA
and CEL
and CPG
and CWN
labels CEL
layer m2c CVA
grow 150
shrink 50
and CMS
and CMF
layer electrode CEL
labels CEL
layer ec CCE
grow 100
and CMF
and CEL
layer cc CCE
grow 100
and CMF
and CEL
and CPG
layer cap CPG
and CEL
and-not CAA
labels CEL
layer psc CCA
grow 100
and CAA
and CMF
layer ndc CCA
grow 100
and CAA
and CSN
and CMF
layer pdc CCA
grow 100
and CAA
and CWN
and CMF
layer nsc CCA
grow 100
and CAA
and CSN
and CWN
and CMF
layer m3c CVS
grow 100
and CMT
and CMS
and-not XP
layer gc CCC
layer pbc CCA
grow 100
and CBA
and CMF
layer col CX
and CAA
and CSN
and CWN
labels CAA
layer clc CCA
grow 100
and CX
and CAA
and CSN
and CWN
and CMF
labels CCA
layer emit CBA
and CSN
shrink 200
layer emc CCA
grow 100
and CBA
and CSN
and CMF
layer pc CCP
grow 100
and CPG
and CMF
layer nbd CSN
shrink 200
and CCD
and CAA
and-not CPG
layer nbdc CCA
grow 100
and CCD
and CSN
and CAA
layer bd CPG
or CEL
and CCD
and CAA
labels CCD
layer glass COG
layer pad CMF
shrink 100
and CMS
shrink 500
and CVA
shrink 100
and COG
grow 600
and XP
calma CWN 42 *
calma CAA 43 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CWC 59 *
calma CX 60 *
style lambda=1.0(pwell)
scalefactor 100
layer pwell CWP
labels CWP
layer m3 CMT
and-not XP
labels CMT
layer m2 CMS
labels CMS
layer m1 CMF
labels CMF
layer poly CPG
labels CPG
layer nsd CAA
and CSN
layer ndiff CWP
and CSN
and CAA
layer pdiff CAA
and CSP
and-not CPS
layer psd CWP
and CSP
and CAA
layer pfet CPG
and CAA
and CSP
layer nfet CAA
and CPG
and CSN
and CWP
layer epfet CEL
and CAA
and CSP
layer enfet CAA
and CEL
and CSN
and CWP
layer m2c CVA
grow 100
and CMS
and CMF
labels CMS
layer electrode CEL
labels CEL
layer ec CCE
grow 100
and CMF
and CEL
labels CMF
layer cc CCE
grow 100
and CMF
and CEL
and CPG
labels CMF
layer cap CPG
and CEL
and-not CAA
labels CEL
layer nsc CCA
grow 100
and CAA
and CSN
and CMF
layer pdc CCA
grow 100
and CAA
and CSP
and CMF
layer ndc CCA
grow 100
and CSN
and CAA
and CWP
and CMF
layer psc CCA
grow 100
and CAA
and CSP
and CWP
and CMF
layer pc CCP
grow 100
and CPG
and CMF
layer m3c CVS
grow 100
and CMT
and CMS
and-not XP
layer glass COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWP
layer pad CMF
shrink 100
and CMS
shrink 500
and CVA
shrink 100
and XP
and COG
grow 600
calma COP 23 *
calma CPS 24 *
calma XP 26 *
calma CWP 41 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CVS 61 *
calma CMT 62 *
style lambda=1.0(nowell)
scalefactor 100
layer poly CPG
labels CPG
layer pdiff CSP
and CAA
and CWN
layer ndiff CWP
or CWC
and CAA
and CSN
and-not CCD
layer nsd CWN
and CSN
and CAA
layer psd CWP
and CSP
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and-not CCD
layer pfet CAA
and CPG
and CSP
layer enfet CEL
and CAA
and CSN
and-not CCD
layer epfet CAA
and CEL
and CSP
layer nffet CAA
and CEL
and CPG
and CSN
and CWP
layer pffet CAA
and CEL
and CPG
and CSP
and CWN
layer ndc CWP
or CWC
and CCA
grow 100
and CAA
and CSN
and CMF
layer pdc CCA
grow 100
and CAA
and CWN
and CSP
and CMF
layer nsc CCA
grow 100
and CAA
and CSN
and CWN
and CMF
layer psc CCA
grow 100
and CAA
and CSP
and CWP
and CMF
layer gc CCC
layer m2c CVA
grow 100
and CMS
and CMF
labels CMS
layer m3c CVS
grow 100
and CMT
and CMS
and-not XP
layer electrode CEL
labels CEL
layer ec CCE
grow 100
and CMF
and CEL
labels CMF
layer cc CCE
grow 100
and CMF
and CEL
and CPG
labels CMF
layer cap CPG
and CEL
and-not CAA
labels CEL
layer pbc CCA
grow 100
and CBA
and CMF
labels CBA
layer col CX
and CAA
and CSN
and CWN
labels CAA
layer clc CCA
grow 100
and CX
and CAA
and CSN
and CWN
and CMF
labels CCA
layer emit CBA
and CSN
shrink 200
labels CBA
layer emc CCA
grow 100
and CBA
and CSN
and CMF
labels CBA
layer pc CCP
grow 100
and CPG
and CMF
layer nbd CSN
shrink 200
and CCD
and CAA
and-not CPG
layer nbdc CCA
grow 100
and CCD
and CSN
and CAA
layer bd CPG
or CEL
and CCD
and CAA
labels CCD
layer cwell CWC
labels CWC
layer glass COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWP
and-not CWN
layer pad CMF
shrink 100
and CMS
shrink 500
and CVA
shrink 100
and XP
and COG
grow 600
layer m1 CMF
labels CMF
layer m2 CMS
labels CMS
layer m3 CMT
and-not XP
labels CMT
calma COP 23 *
calma CPS 24 *
calma CCC 25 *
calma XP 26 *
calma CWP 41 *
calma CWN 42 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CWC 59 *
calma CVS 61 *
calma CMT 62 *
calma CX 63 *
# 944 "cif_template/objs/CIFin"
style lambda=0.8(gen)
scalefactor 80
layer nwell CWN
labels CWN
layer pwell CWP
labels CWP
layer hnwell CVN
labels CWN
layer hpwell CVP
labels CWP
layer poly CPG
labels CPG
layer pdiff CSP
and CAA
and CWN
layer ndiff CSN
and CAA
and CWP
and-not CCD
layer nsd CWN
and CSN
and CAA
layer psd CWP
and CSP
and CAA
layer hpdiff CSP
and CAA
and CVN
layer hndiff CSN
and CAA
and CVP
layer hnsd CVN
and CSN
and CAA
layer hpsd CVP
and CSP
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and CWP
and-not CCD
layer pfet CAA
and CPG
and CSP
and CWN
layer hnfet CPG
and CAA
and CSN
and CVP
and-not CCD
layer hpfet CAA
and CPG
and CSP
and CVN
layer enfet CEL
and CAA
and CSN
and CWP
and-not CCD
layer epfet CAA
and CEL
and CSP
and CWN
layer nffet CEL
and CAA
and CSN
and CPG
and CWP
and-not CCD
layer pffet CAA
and CPG
and CEL
and CSP
and CWN
layer ndc CCA
grow 80
and CAA
and CWP
and CSN
and CMF
layer pdc CCA
grow 80
and CAA
and CWN
and CSP
and CMF
layer nsc CCA
grow 80
and CAA
and CSN
and CWN
and CMF
layer psc CCA
grow 80
and CAA
and CSP
and CWP
and CMF
layer hndc CCA
grow 160
and CAA
and CVP
and CSN
and CMF
layer hpdc CCA
grow 160
and CAA
and CVN
and CSP
and CMF
layer hnsc CCA
grow 160
and CAA
and CSN
and CVN
and CMF
layer hpsc CCA
grow 160
and CAA
and CSP
and CVP
and CMF
layer gc CCC
layer m2c CVA
grow 80
and CMS
and CMF
labels CMS
layer electrode CEL
labels CEL
layer ec CCE
grow 80
and CMF
and CEL
labels CMF
layer cc CCE
grow 80
and CMF
and CEL
and CPG
labels CMF
layer cap CPG
and CEL
and-not CAA
labels CEL
layer pbc CCA
grow 80
and CBA
and CMF
labels CBA
layer col CBA
grow 1600
and-not CBA
and CX
and CAA
and CSN
and CWN
labels CAA
layer clc CBA
grow 1600
and-not CBA
and CCA
grow 80
and CX
and CAA
and CSN
and CWN
and CMF
labels CCA
layer emit CBA
and CSN
shrink 160
labels CBA
layer emc CCA
grow 80
and CBA
and CSN
and CMF
labels CBA
layer pc CCP
grow 80
and CPG
and CMF
layer bd CAA
and CCD
and-not CSN
grow 160
and CAA
labels CCD
layer nbd CSN
shrink 160
and CCD
and CAA
labels CCD
layer nbdc CCA
grow 80
and CCD
and CSN
and CAA
labels CCD
layer glass COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWP
and-not CWN
layer pad CMF
shrink 80
and CMS
shrink 400
and CVA
shrink 80
and COG
grow 480
and XP
layer m2 CMS
labels CMS
layer m1 CMF
labels CMF
calma CVP 21 *
calma CVN 22 *
calma COP 23 *
calma CPS 24 *
calma CCC 25 *
calma XP 26 *
calma CWP 41 *
calma CWN 42 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CX 63 *
style lambda=0.8(nwell)
scalefactor 80
layer nwell CWN
labels CWN
layer m3 CMT
and-not XP
labels CMT
layer m2 CMS
labels CMS
layer m1 CMF
labels CMF
layer poly CPG
labels CPG
layer psd CAA
and CSP
and-not CPS
layer pdiff CWN
and CAA
and CSP
labels CSP
layer ndiff CAA
and CSN
and-not CCD
labels CSN
layer nsd CWN
and CSN
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and-not CCD
layer pfet CAA
and CPG
and CSP
and CWN
layer enfet CEL
and CAA
and CSN
and-not CCD
layer epfet CAA
and CEL
and CSP
and CWN
layer nffet CAA
and CEL
and CPG
and CSN
layer pffet CAA
and CEL
and CPG
and CSP
and CWN
layer m3c CVS
grow 80
and CMT
and CMS
and-not XP
layer m2c CVA
grow 80
and CMS
and CMF
layer electrode CEL
labels CEL
layer ec CCE
or CCC
grow 80
and CMF
and CEL
layer cc CCE
grow 80
and CMF
and CEL
and CPG
labels CCE
layer cap CPG
and CEL
and-not CAA
layer psc CCA
grow 80
and CAA
and CSP
and CMF
layer ndc CCA
or CCC
grow 80
and CAA
and CSN
and CMF
layer pdc CCA
or CCC
grow 80
and CAA
and CWN
and CSP
and CMF
layer nsc CCA
or CCC
grow 80
and CAA
and CSN
and CWN
and CMF
layer pbc CCA
or CCC
grow 80
and CBA
and CMF
layer emit CBA
and CSN
shrink 160
layer emc CCA
grow 80
and CBA
and CSN
and CMF
layer col CX
and CAA
and CSN
and CWN
layer clc CCA
grow 80
and CX
and CAA
and CSN
and CWN
and CMF
layer pc CCP
or CCC
grow 80
and CPG
and CMF
labels CCP
layer nbd CSN
shrink 160
and CCD
and CAA
and-not CPG
layer nbdc CCA
grow 80
and CCD
and CSN
and CAA
layer bd CPG
or CEL
and CCD
and CAA
labels CCD
layer cwell CWC
labels CWC
layer glass COG
labels COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWN
layer pad CMF
shrink 80
and CMS
shrink 400
and CVA
shrink 80
and XP
and COG
grow 480
calma COP 23 *
calma CPS 24 *
calma XP 26 *
calma CWN 42 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CWC 59 *
calma CVS 61 *
calma CMT 62 *
calma CX 63 *
style lambda=0.8(oldnwell)
scalefactor 80
layer cwell CWC
layer nwell CWN
labels CWN
layer m3 CMT
and-not XP
labels CMT
layer m2 CMS
labels CMS
layer m1 CMF
labels CMF
layer poly CPG
labels CPG
layer psd CAA
layer pdiff CWN
and CAA
layer ndiff CAA
and CSN
and-not CCD
layer nsd CWN
and CSN
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and-not CCD
layer pfet CAA
and CPG
and CWN
layer enfet CEL
and CAA
and CSN
and-not CCD
layer epfet CAA
and CEL
and CWN
layer nffet CAA
and CEL
and CPG
and CSN
labels CEL
layer pffet CAA
and CEL
and CPG
and CWN
labels CEL
layer m2c CVA
grow 150
shrink 50
and CMS
and CMF
layer electrode CEL
labels CEL
layer ec CCE
grow 80
and CMF
and CEL
layer cc CCE
grow 80
and CMF
and CEL
and CPG
layer cap CPG
and CEL
and-not CAA
labels CEL
layer psc CCA
grow 80
and CAA
and CMF
layer ndc CCA
grow 80
and CAA
and CSN
and CMF
layer pdc CCA
grow 80
and CAA
and CWN
and CMF
layer nsc CCA
grow 80
and CAA
and CSN
and CWN
and CMF
layer m3c CVS
grow 80
and CMT
and CMS
and-not XP
layer gc CCC
layer pbc CCA
grow 80
and CBA
and CMF
layer col CX
and CAA
and CSN
and CWN
labels CAA
layer clc CCA
grow 80
and CX
and CAA
and CSN
and CWN
and CMF
labels CCA
layer emit CBA
and CSN
shrink 160
layer emc CCA
grow 80
and CBA
and CSN
and CMF
layer pc CCP
grow 80
and CPG
and CMF
layer nbd CSN
shrink 160
and CCD
and CAA
and-not CPG
layer nbdc CCA
grow 80
and CCD
and CSN
and CAA
layer bd CPG
or CEL
and CCD
and CAA
labels CCD
layer glass COG
layer pad CMF
shrink 80
and CMS
shrink 400
and CVA
shrink 80
and COG
grow 480
and XP
calma CWN 42 *
calma CAA 43 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CWC 59 *
calma CX 60 *
style lambda=0.8(pwell)
scalefactor 80
layer pwell CWP
labels CWP
layer m3 CMT
and-not XP
labels CMT
layer m2 CMS
labels CMS
layer m1 CMF
labels CMF
layer poly CPG
labels CPG
layer nsd CAA
and CSN
layer ndiff CWP
and CSN
and CAA
layer pdiff CAA
and CSP
and-not CPS
layer psd CWP
and CSP
and CAA
layer pfet CPG
and CAA
and CSP
layer nfet CAA
and CPG
and CSN
and CWP
layer epfet CEL
and CAA
and CSP
layer enfet CAA
and CEL
and CSN
and CWP
layer m2c CVA
grow 80
and CMS
and CMF
labels CMS
layer electrode CEL
labels CEL
layer ec CCE
grow 80
and CMF
and CEL
labels CMF
layer cc CCE
grow 80
and CMF
and CEL
and CPG
labels CMF
layer cap CPG
and CEL
and-not CAA
labels CEL
layer nsc CCA
grow 80
and CAA
and CSN
and CMF
layer pdc CCA
grow 80
and CAA
and CSP
and CMF
layer ndc CCA
grow 80
and CSN
and CAA
and CWP
and CMF
layer psc CCA
grow 80
and CAA
and CSP
and CWP
and CMF
layer pc CCP
grow 80
and CPG
and CMF
layer m3c CVS
grow 80
and CMT
and CMS
and-not XP
layer glass COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWP
layer pad CMF
shrink 80
and CMS
shrink 400
and CVA
shrink 80
and XP
and COG
grow 480
calma COP 23 *
calma CPS 24 *
calma XP 26 *
calma CWP 41 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CVS 61 *
calma CMT 62 *
style lambda=0.8(nowell)
scalefactor 80
layer poly CPG
labels CPG
layer pdiff CSP
and CAA
and CWN
layer ndiff CWP
or CWC
and CAA
and CSN
and-not CCD
layer nsd CWN
and CSN
and CAA
layer psd CWP
and CSP
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and-not CCD
layer pfet CAA
and CPG
and CSP
layer enfet CEL
and CAA
and CSN
and-not CCD
layer epfet CAA
and CEL
and CSP
layer nffet CAA
and CEL
and CPG
and CSN
and CWP
layer pffet CAA
and CEL
and CPG
and CSP
and CWN
layer ndc CWP
or CWC
and CCA
grow 80
and CAA
and CSN
and CMF
layer pdc CCA
grow 80
and CAA
and CWN
and CSP
and CMF
layer nsc CCA
grow 80
and CAA
and CSN
and CWN
and CMF
layer psc CCA
grow 80
and CAA
and CSP
and CWP
and CMF
layer gc CCC
layer m2c CVA
grow 80
and CMS
and CMF
labels CMS
layer m3c CVS
grow 80
and CMT
and CMS
and-not XP
layer electrode CEL
labels CEL
layer ec CCE
grow 80
and CMF
and CEL
labels CMF
layer cc CCE
grow 80
and CMF
and CEL
and CPG
labels CMF
layer cap CPG
and CEL
and-not CAA
labels CEL
layer pbc CCA
grow 80
and CBA
and CMF
labels CBA
layer col CX
and CAA
and CSN
and CWN
labels CAA
layer clc CCA
grow 80
and CX
and CAA
and CSN
and CWN
and CMF
labels CCA
layer emit CBA
and CSN
shrink 160
labels CBA
layer emc CCA
grow 80
and CBA
and CSN
and CMF
labels CBA
layer pc CCP
grow 80
and CPG
and CMF
layer nbd CSN
shrink 160
and CCD
and CAA
and-not CPG
layer nbdc CCA
grow 80
and CCD
and CSN
and CAA
layer bd CPG
or CEL
and CCD
and CAA
labels CCD
layer cwell CWC
labels CWC
layer glass COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWP
and-not CWN
layer pad CMF
shrink 80
and CMS
shrink 400
and CVA
shrink 80
and XP
and COG
grow 480
layer m1 CMF
labels CMF
layer m2 CMS
labels CMS
layer m3 CMT
and-not XP
labels CMT
calma COP 23 *
calma CPS 24 *
calma CCC 25 *
calma XP 26 *
calma CWP 41 *
calma CWN 42 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CWC 59 *
calma CVS 61 *
calma CMT 62 *
calma CX 63 *
style lambda=0.6(gen)
scalefactor 60
layer nwell CWN
labels CWN
layer pwell CWP
labels CWP
layer poly CPG
labels CPG
layer pdiff CSP
and CAA
and CWN
layer ndiff CWP
or CWC
and CAA
and CSN
and-not CCD
layer nsd CWN
and CSN
and CAA
layer psd CWP
and CSP
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and-not CCD
layer pfet CAA
and CPG
and CSP
layer enfet CEL
and CAA
and CSN
and-not CCD
layer epfet CAA
and CEL
and CSP
layer nffet CAA
and CEL
and CPG
and CSN
and CWP
layer pffet CAA
and CEL
and CPG
and CSP
and CWN
layer ndc CWP
or CWC
and CCA
grow 60
and CAA
and CSN
and CMF
layer pdc CCA
grow 60
and CAA
and CWN
and CSP
and CMF
layer nsc CCA
grow 60
and CAA
and CSN
and CWN
and CMF
layer psc CCA
grow 60
and CAA
and CSP
and CWP
and CMF
layer gc CCC
layer m2c CVA
grow 60
and CMS
and CMF
labels CMS
layer m3c CVS
grow 60
and CMT
and CMS
and-not XP
layer electrode CEL
labels CEL
layer ec CCE
grow 60
and CMF
and CEL
labels CMF
layer cc CCE
grow 60
and CMF
and CEL
and CPG
labels CMF
layer cap CPG
and CEL
and-not CAA
labels CEL
layer pbc CCA
grow 60
and CBA
and CMF
labels CBA
layer col CX
and CAA
and CSN
and CWN
labels CAA
layer clc CCA
grow 60
and CX
and CAA
and CSN
and CWN
and CMF
labels CCA
layer emit CBA
and CSN
shrink 120
labels CBA
layer emc CCA
grow 60
and CBA
and CSN
and CMF
labels CBA
layer pc CCP
grow 60
and CPG
and CMF
layer nbd CSN
shrink 120
and CCD
and CAA
and-not CPG
layer nbdc CCA
grow 60
and CCD
and CSN
and CAA
layer bd CPG
or CEL
and CCD
and CAA
labels CCD
layer cwell CWC
labels CWC
layer glass COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWP
and-not CWN
layer pad CMF
shrink 60
and CMS
shrink 300
and CVA
shrink 60
and XP
and COG
grow 360
layer m1 CMF
labels CMF
layer m2 CMS
labels CMS
layer m3 CMT
and-not XP
labels CMT
calma COP 23 *
calma CPS 24 *
calma CCC 25 *
calma XP 26 *
calma CWP 41 *
calma CWN 42 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CWC 59 *
calma CVS 61 *
calma CMT 62 *
calma CX 63 *
style lambda=0.6(nwell)
scalefactor 60
layer nwell CWN
labels CWN
layer m3 CMT
and-not XP
labels CMT
layer m2 CMS
labels CMS
layer m1 CMF
labels CMF
layer poly CPG
labels CPG
layer psd CAA
and CSP
and-not CPS
layer pdiff CWN
and CAA
and CSP
labels CSP
layer ndiff CAA
and CSN
and-not CCD
labels CSN
layer nsd CWN
and CSN
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and-not CCD
layer pfet CAA
and CPG
and CSP
and CWN
layer enfet CEL
and CAA
and CSN
and-not CCD
layer epfet CAA
and CEL
and CSP
and CWN
layer nffet CAA
and CEL
and CPG
and CSN
layer pffet CAA
and CEL
and CPG
and CSP
and CWN
layer m3c CVS
grow 60
and CMT
and CMS
and-not XP
layer m2c CVA
grow 60
and CMS
and CMF
layer electrode CEL
labels CEL
layer ec CCE
or CCC
grow 60
and CMF
and CEL
layer cc CCE
grow 60
and CMF
and CEL
and CPG
labels CCE
layer cap CPG
and CEL
and-not CAA
layer psc CCA
grow 60
and CAA
and CSP
and CMF
layer ndc CCA
or CCC
grow 60
and CAA
and CSN
and CMF
layer pdc CCA
or CCC
grow 60
and CAA
and CWN
and CSP
and CMF
layer nsc CCA
or CCC
grow 60
and CAA
and CSN
and CWN
and CMF
layer pbc CCA
or CCC
grow 60
and CBA
and CMF
layer emit CBA
and CSN
shrink 120
layer emc CCA
grow 60
and CBA
and CSN
and CMF
layer col CX
and CAA
and CSN
and CWN
layer clc CCA
grow 60
and CX
and CAA
and CSN
and CWN
and CMF
layer pc CCP
or CCC
grow 60
and CPG
and CMF
labels CCP
layer nbd CSN
shrink 120
and CCD
and CAA
and-not CPG
layer nbdc CCA
grow 60
and CCD
and CSN
and CAA
layer bd CPG
or CEL
and CCD
and CAA
labels CCD
layer cwell CWC
labels CWC
layer glass COG
labels COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWN
layer pad CMF
shrink 60
and CMS
shrink 300
and CVA
shrink 60
and XP
and COG
grow 360
calma COP 23 *
calma CPS 24 *
calma XP 26 *
calma CWN 42 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CWC 59 *
calma CVS 61 *
calma CMT 62 *
calma CX 63 *
style lambda=0.6(oldnwell)
scalefactor 60
layer cwell CWC
layer nwell CWN
labels CWN
layer m3 CMT
and-not XP
labels CMT
layer m2 CMS
labels CMS
layer m1 CMF
labels CMF
layer poly CPG
labels CPG
layer psd CAA
layer pdiff CWN
and CAA
layer ndiff CAA
and CSN
and-not CCD
layer nsd CWN
and CSN
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and-not CCD
layer pfet CAA
and CPG
and CWN
layer enfet CEL
and CAA
and CSN
and-not CCD
layer epfet CAA
and CEL
and CWN
layer nffet CAA
and CEL
and CPG
and CSN
labels CEL
layer pffet CAA
and CEL
and CPG
and CWN
labels CEL
layer m2c CVA
grow 150
shrink 50
and CMS
and CMF
layer electrode CEL
labels CEL
layer ec CCE
grow 60
and CMF
and CEL
layer cc CCE
grow 60
and CMF
and CEL
and CPG
layer cap CPG
and CEL
and-not CAA
labels CEL
layer psc CCA
grow 60
and CAA
and CMF
layer ndc CCA
grow 60
and CAA
and CSN
and CMF
layer pdc CCA
grow 60
and CAA
and CWN
and CMF
layer nsc CCA
grow 60
and CAA
and CSN
and CWN
and CMF
layer m3c CVS
grow 60
and CMT
and CMS
and-not XP
layer gc CCC
layer pbc CCA
grow 60
and CBA
and CMF
layer col CX
and CAA
and CSN
and CWN
labels CAA
layer clc CCA
grow 60
and CX
and CAA
and CSN
and CWN
and CMF
labels CCA
layer emit CBA
and CSN
shrink 120
layer emc CCA
grow 60
and CBA
and CSN
and CMF
layer pc CCP
grow 60
and CPG
and CMF
layer nbd CSN
shrink 120
and CCD
and CAA
and-not CPG
layer nbdc CCA
grow 60
and CCD
and CSN
and CAA
layer bd CPG
or CEL
and CCD
and CAA
labels CCD
layer glass COG
layer pad CMF
shrink 60
and CMS
shrink 300
and CVA
shrink 60
and COG
grow 360
and XP
calma CWN 42 *
calma CAA 43 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CWC 59 *
calma CX 60 *
style lambda=0.6(pwell)
scalefactor 60
layer pwell CWP
labels CWP
layer m3 CMT
and-not XP
labels CMT
layer m2 CMS
labels CMS
layer m1 CMF
labels CMF
layer poly CPG
labels CPG
layer nsd CAA
and CSN
layer ndiff CWP
and CSN
and CAA
layer pdiff CAA
and CSP
and-not CPS
layer psd CWP
and CSP
and CAA
layer pfet CPG
and CAA
and CSP
layer nfet CAA
and CPG
and CSN
and CWP
layer epfet CEL
and CAA
and CSP
layer enfet CAA
and CEL
and CSN
and CWP
layer m2c CVA
grow 60
and CMS
and CMF
labels CMS
layer electrode CEL
labels CEL
layer ec CCE
grow 60
and CMF
and CEL
labels CMF
layer cc CCE
grow 60
and CMF
and CEL
and CPG
labels CMF
layer cap CPG
and CEL
and-not CAA
labels CEL
layer nsc CCA
grow 60
and CAA
and CSN
and CMF
layer pdc CCA
grow 60
and CAA
and CSP
and CMF
layer ndc CCA
grow 60
and CSN
and CAA
and CWP
and CMF
layer psc CCA
grow 60
and CAA
and CSP
and CWP
and CMF
layer pc CCP
grow 60
and CPG
and CMF
layer m3c CVS
grow 60
and CMT
and CMS
and-not XP
layer glass COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWP
layer pad CMF
shrink 60
and CMS
shrink 300
and CVA
shrink 60
and XP
and COG
grow 360
calma COP 23 *
calma CPS 24 *
calma XP 26 *
calma CWP 41 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CVS 61 *
calma CMT 62 *
style lambda=0.6(nowell)
scalefactor 60
layer poly CPG
labels CPG
layer pdiff CSP
and CAA
and CWN
layer ndiff CWP
or CWC
and CAA
and CSN
and-not CCD
layer nsd CWN
and CSN
and CAA
layer psd CWP
and CSP
and CAA
layer pbase CBA
labels CBA
layer nfet CPG
and CAA
and CSN
and-not CCD
layer pfet CAA
and CPG
and CSP
layer enfet CEL
and CAA
and CSN
and-not CCD
layer epfet CAA
and CEL
and CSP
layer nffet CAA
and CEL
and CPG
and CSN
and CWP
layer pffet CAA
and CEL
and CPG
and CSP
and CWN
layer ndc CWP
or CWC
and CCA
grow 60
and CAA
and CSN
and CMF
layer pdc CCA
grow 60
and CAA
and CWN
and CSP
and CMF
layer nsc CCA
grow 60
and CAA
and CSN
and CWN
and CMF
layer psc CCA
grow 60
and CAA
and CSP
and CWP
and CMF
layer gc CCC
layer m2c CVA
grow 60
and CMS
and CMF
labels CMS
layer m3c CVS
grow 60
and CMT
and CMS
and-not XP
layer electrode CEL
labels CEL
layer ec CCE
grow 60
and CMF
and CEL
labels CMF
layer cc CCE
grow 60
and CMF
and CEL
and CPG
labels CMF
layer cap CPG
and CEL
and-not CAA
labels CEL
layer pbc CCA
grow 60
and CBA
and CMF
labels CBA
layer col CX
and CAA
and CSN
and CWN
labels CAA
layer clc CCA
grow 60
and CX
and CAA
and CSN
and CWN
and CMF
labels CCA
layer emit CBA
and CSN
shrink 120
labels CBA
layer emc CCA
grow 60
and CBA
and CSN
and CMF
labels CBA
layer pc CCP
grow 60
and CPG
and CMF
layer nbd CSN
shrink 120
and CCD
and CAA
and-not CPG
layer nbdc CCA
grow 60
and CCD
and CSN
and CAA
layer bd CPG
or CEL
and CCD
and CAA
labels CCD
layer cwell CWC
labels CWC
layer glass COG
layer open CAA
and CCA
and CVA
and COG
and COP
layer pstop CAA
and CPS
and CSP
and-not CWP
and-not CWN
layer pad CMF
shrink 60
and CMS
shrink 300
and CVA
shrink 60
and XP
and COG
grow 360
layer m1 CMF
labels CMF
layer m2 CMS
labels CMS
layer m3 CMT
and-not XP
labels CMT
calma COP 23 *
calma CPS 24 *
calma CCC 25 *
calma XP 26 *
calma CWP 41 *
calma CWN 42 *
calma CAA 43 *
calma CSP 44 *
calma CSN 45 *
calma CPG 46 *
calma CCP 47 *
calma CCA 48 *
calma CMF 49 *
calma CVA 50 *
calma CMS 51 *
calma COG 52 *
calma CCE 55 *
calma CEL 56 *
calma CCD 57 *
calma CBA 58 *
calma CWC 59 *
calma CVS 61 *
calma CMT 62 *
calma CX 63 *
style lambda=1.0(cmosn)
scalefactor 100
layer nwell NWN
labels NWN
layer pwell NWP
labels NWP
layer m2 NMS
labels NMS
layer m1 NMF
labels NMF
layer poly NPG
labels NPG
layer pdiff NSP
and NAA
and NWN
layer ndiff NSN
and NAA
layer nsd NWN
and NSN
and NAA
layer psd NSP
and NAA
and-not NWN
layer nfet NPG
and NAA
and NSN
layer pfet NAA
and NPG
and NSP
layer enfet NEL
and NAA
and NSN
layer epfet NAA
and NEL
and NSP
layer electrode NEL
labels NEL
layer cap NPG
and NEL
and-not NAA
labels NEL
layer gc NCT
layer m2c NVA
and NMS
and NMF
labels NMS
layer open NAA
and NCT
and NVA
and NOG
and NOP
layer pstop NAA
and NPS
and NSP
and-not NWP
and-not NWN
layer pad NMF
shrink 100
and NMS
shrink 500
and NVA
shrink 100
and NOG
grow 600
and XP
calma NWN 1 *
calma NWP 2 *
calma NAA 3 *
calma NPG 4 *
calma NEL 5 *
calma NSN 7 *
calma NSP 8 *
calma NCT 9 *
calma NMF 10 *
calma NVA 11 *
calma NMS 12 *
calma NOG 13 *
# 914 "scmos.tech.out" 2
# 928 "scmos.tech.out"
end
mzrouter
style irouter
layer m2 32 64 256 1
layer m1 64 32 256 1
layer poly 128 128 512 1
contact m2contact metal1 metal2 1024
contact pcontact metal1 poly 2056
notactive poly pcontact
style garouter
layer m2 32 64 256 1
layer m1 64 32 256 1
contact m2contact metal1 metal2 1024
end
drc
# 960 "scmos.tech.out"
edge4way (~nwell)/w nwell 10 nwell nwell 10\
"N-Well width must be at least 10 (MOSIS rule #1.1)"
edge4way (~pwell)/w pwell 10 pwell pwell 10\
"P-Well width must be at least 10 (MOSIS rule #1.1)"
# 980 "scmos.tech.out"
edge4way nwell (~nwell)/w 9 (~nwell)/w (~nwell)/w 9\
"N-Well spacing must be at least 9 (MOSIS rule #1.2)"
edge4way pwell (~pwell)/w 9 (~pwell)/w (~pwell)/w 9\
"P-Well spacing must be at least 9 (MOSIS rule #1.2)"
# 1018 "scmos.tech.out"
width ndiff,ndc/a,nfet,enfet,nffet,wcap 3 \
"N-type Diffusion width must be at least 3 (MOSIS rule #2.1a)"
width pdiff,pdc/a,pfet,epfet,pffet 3 \
"P-type Diffusion width must be at least 3 (MOSIS rule #2.1b)"
width nsd,nsc/a,psd,psc/a 3 \
"Ohmic diffusion width must be at least 3 (MOSIS rule #2.1c)"
spacing ndiff,ndc/a,nfet,enfet,nffet,wcap ndiff,ndc/a,nfet,enfet,nffet,wcap 3 touching_ok \
"Diffusion spacing must be at least 3 (MOSIS rule #2.2)"
spacing pdiff,pdc/a,pfet,epfet,pffet pdiff,pdc/a,pfet,epfet,pffet 3 touching_ok \
"Diffusion spacing must be at least 3 (MOSIS rule #2.2)"
spacing nsd,nsc/a nsd,nsc/a 3 touching_ok \
"Diffusion spacing must be at least 3 (MOSIS rule #2.2)"
spacing psd,psc/a psd,psc/a 3 touching_ok \
"Diffusion spacing must be at least 3 (MOSIS rule #2.2)"
spacing ndiff,ndc/a pdiff,pdc/a 10 touching_illegal \
"P-type diffusion must be 10 away from N-type diffusion (MOSIS rule #2.3a)"
# 1051 "scmos.tech.out"
spacing ndiff,ndc/a nsd,nsc/a 8 touching_illegal \
"N-type diffusion must be 8 away from N-substrate contact (MOSIS rule #2.3a,4a)"
spacing pdiff,pdc/a psd,psc/a 8 touching_illegal \
"P-type diffusion must be 8 away from P-substrate contact (MOSIS rule #2.3a,4a)"
spacing nsd,nsc/a psd,psc/a 6 touching_illegal \
"Opposite well contacts must be separated by 6 (MOSIS rule #2.4)"
# 1068 "scmos.tech.out"
spacing ndiff,ndc/a,nfet,enfet,nffet,wcap nwell 5 touching_illegal \
"N-diffusion and N-well must be separated by 5 (MOSIS rule #2.3a)"
spacing pdiff,pdc/a,pfet,epfet,pffet pwell 5 touching_illegal \
"P-diffusion and P-well must be separated by 5 (MOSIS rule #2.3a)"
spacing nsd,nsc/a pwell 3 touching_illegal \
"N-substrate diffusion and P-well must be separated by 3 (MOSIS rule #2.4)"
spacing psd,psc/a nwell 3 touching_illegal \
"P-substrate diffusion and N-well must be separated by 3 (MOSIS rule #2.4)"
spacing ndiff,ndc/a,nfet,enfet,nffet,wcap psd,psc/a 4 touching_ok \
"Opposite diffusion spacing must be at least 4 (MOSIS extension rule)"
spacing pdiff,pdc/a,pfet,epfet,pffet nsd,nsc/a 4 touching_ok \
"Opposite diffusion spacing must be at least 4 (MOSIS extension rule)"
width poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 2 \
"Polysilicon width must be at least 2 (MOSIS rule #3.1)"
spacing poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 2 touching_ok \
"Polysilicon spacing must be at least 2 (MOSIS rule #3.2a)"
edge4way nfet,pfet poly,pc/act 2 poly,pc/act 0 0 \
"Poly must overhang transistor by at least 2 (MOSIS rule #3.3)"
edge4way nfet,enfet ndiff,ndc/a 3 ndiff,ndc/a,nfet,enfet,nffet,wcap ndiff,ndc/a 3 \
"Diffusion must overhang transistor by at least 3 (MOSIS rule #3.4)"
edge4way pfet,epfet pdiff,pdc/a 3 pdiff,pdc/a,pfet,epfet,pffet ndiff,ndc/a 3 \
"Diffusion must overhang transistor by at least 3 (MOSIS rule #3.4)"
edge4way nfet,pfet space 1 poly 0 0 \
"Transistor overhang is missing (MOSIS rule #3.3,4)"
edge4way enfet,epfet space 1 poly2 0 0 \
"Transistor overhang is missing (MOSIS rule #3.3,4)"
edge4way nffet,pffet space 1 poly 0 0 \
"Transistor overhang is missing (MOSIS rule #3.3,4)"
edge4way nffet,pffet space 1 poly2 0 0 \
"Transistor overhang is missing (MOSIS rule #3.3,4)"
edge4way ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a poly,pc 1 space/a 0 1 \
"Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)"
edge4way poly,pc ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a 1 space/a 0 1 \
"Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)"
edge poly,pc space/a 1 space/a space/a 1 \
"Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)"
edge nsd,nsc/a,psd,psc/a,ndiff,ndc/a,pdiff,pdc/a space/a 1 space/a space/a 1 \
"Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)"
# 1157 "scmos.tech.out"
spacing pfet,epfet,pffet nsd,nsc/a 3 touching_illegal \
"Transistors must be separated from substrate contacts by 3 (MOSIS rule #4.1.a)"
spacing nfet,enfet,nffet psd,psc/a 3 touching_illegal \
"Transistors must be separated from substrate contacts by 3 (MOSIS rule #4.1.b)"
edge4way psd,psc/a space/act 3 ~(nfet,enfet,nffet)/act psd,psc/a,ndiff,ndc/a 3 \
"Transistors must be separated from selects(generated by well cont) by 3 (MOSIS rule #4.1.c)"
edge4way nsd,nsc/a space/act 3 ~(pfet,epfet,pffet)/act nsd,nsc/a,pdiff,pdc/a 3 \
"Transistors must be separated from selects(generated by well cont) by 3 (MOSIS rule #4.1.d)"
edge4way psd,psc/a ~(ndiff,ndc,psc,psd)/act 4 ~(nfet,enfet)/act ~(ndiff,ndc,psc,psd)/act 4 \
"Transistors must be separated from selects(generated by well cont) by 4 (MOSIS rule #4.1.e)"
edge4way nsd,nsc/a ~(pdiff,pdc,nsc,nsd)/act 4 ~(pfet,epfet)/act ~(pdiff,pdc,nsc,nsd)/act 4 \
"Transistors must be separated from selects(generated by well cont) by 4 (MOSIS rule #4.1.f)"
edge4way ~(pdiff,pdc/a,pfet,epfet,pffet)/act pdiff,pdc,pfet 4 ~(nsd,nsc/a)/act pdiff,pdc/a,pfet,epfet,pffet 2 \
"Backedge of diffusion must be 4 from substrate diff (MOSIS rule #4.2.a)"
edge4way ~(ndiff,ndc/a,nfet,enfet,nffet,wcap)/act ndiff,ndc,nfet 4 ~(psd,psc/a)/act ndiff,ndc/a,nfet,enfet,nffet,wcap 2 \
"Backedge of diffusion must be 4 from substrate diff (MOSIS rule #4.2.b)"
# 1191 "scmos.tech.out"
width pc 4 \
"Poly contact width must be at least 4 (MOSIS rule #5B.1,2,3)"
edge4way poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/act 3 ~pc/act ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/act 3 \
"Poly contact must be at least 3 from other poly (MOSIS rule #5B.4,5)"
spacing pc ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a 1 touching_illegal \
"Poly contact must be 1 unit from diffusion (MOSIS rule #5B.6)"
# 1217 "scmos.tech.out"
width ndc,pdc 4 \
"Diffusion contact width must be at least 4 (MOSIS rule #6B.1,2,3)"
width nsc,psc 4 \
"Substrate contact width must be at least 4 (MOSIS rule #6B.1,2,3)"
# 1241 "scmos.tech.out"
edge4way ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/act 4 ~(ndc,pdc,nsc,psc)/act \
~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/act 4 \
"Diffusion contacts must be 4 from other diffusions (MOSIS rule #6B.4,5)"
spacing pdc,ndc,psc,nsc nfet,enfet,nffet,pfet,epfet,pffet 1 touching_illegal \
"Diffusion contacts cannot touch transistors (MOSIS rule #6B.6)"
spacing pdc,ndc,psc,nsc poly 1 touching_illegal \
"Diffusion contact to field poly must be at least 1 (MOSIS rule #6B.7)"
spacing pdc,ndc,psc,nsc pc/act 2 touching_illegal \
"Poly contacts must be 2 away from diffusion contacts (MOSIS rule #6B.9)"
# 1266 "scmos.tech.out"
edge4way m3c/m3 ~m3c/m3 1 ~m3c/m3 (~m3c,m3c)/m3 1 \
"Metal3 contacts must be rectangular (Magic rules)"
edge4way m2c/m2 ~m2c/m2 1 ~m2c/m2 (~m2c,m2c)/m2 1 \
"Metal2 contacts must be rectangular (Magic rules)"
edge4way ndc/m1 ~ndc/m1 1 ~ndc/m1 (~ndc,ndc)/m1 1 \
"N-diffusion contacts must be rectangular (Magic rules)"
edge4way pdc/m1 ~pdc/m1 1 ~pdc/m1 (~pdc,pdc)/m1 1 \
"P-diffusion contacts must be rectangular (Magic rules)"
edge4way psc/m1 ~psc/m1 1 ~psc/m1 (~psc,psc)/m1 1 \
"P-substrate contacts must be rectangular (Magic rules)"
edge4way nsc/m1 ~nsc/m1 1 ~nsc/m1 (~nsc,nsc)/m1 1 \
"N-substrate contacts must be rectangular (Magic rules)"
edge4way pc/m1 ~pc/m1 1 ~pc/m1 (~pc,pc)/m1 1 \
"Polysilicon contacts must be rectangular (Magic rules)"
edge4way ec/m1 ~ec/m1 1 ~ec/m1 (~ec,ec)/m1 1 \
"Electrode contacts must be rectangular (Magic rules)"
edge4way cc/m1 ~cc/m1 1 ~cc/m1 (~cc,cc)/m1 1 \
"Capacitor contacts must be rectangular (Magic rules)"
edge4way emc/m1 ~emc/m1 1 ~emc/m1 (~emc,emc)/m1 1 \
"Emitter contacts must be rectangular (Magic rules)"
edge4way clc/m1 ~clc/m1 1 ~clc/m1 (~clc,clc)/m1 1 \
"Collector contacts must be rectangular (Magic rules)"
edge4way pbc/m1 ~pbc/m1 1 ~pbc/m1 (~pbc,pbc)/m1 1 \
"P-base Contacts must be rectangular (Magic rules)"
edge4way nbdc/m1 ~nbdc/m1 1 ~nbdc/m1 (~nbdc,nbdc)/m1 1 \
"CCD-diffusion Contacts must be rectangular (Magic rules)"
width pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc,pad/m1 3 \
"First-level metal width must be at least 3 (MOSIS rule #7.1)"
spacing pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc,pad/m1 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc,pad/m1 3 touching_ok \
"First-level metal spacing must be at least 3 (MOSIS rule #7.2)"
# 1319 "scmos.tech.out"
width m2c 4 \
"Contact width must be at least 4 (MOSIS rule #8.1,2,3)"
edge4way poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/a 1 ~m2c/m2 ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/a 1 \
"Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
edge4way poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet ~(poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet)/a 1 ~m2c/m2 ~(poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet)/a 1 \
"Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
edge4way ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/a 1 ~m2c/m2 ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/a 1 \
"Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
edge4way ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/a poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 1 ~m2c/m2 poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 1 \
"Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
edge4way ~(poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet)/a poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 1 ~m2c/m2 poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 1 \
"Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
edge4way ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/a ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a 1 ~m2c/m2 ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a 1 \
"Via must be on a flat surface (MOSIS rule #8.4,5)" metal2
width m2,m2c/m2,m3c/m2,pad 3 \
"Second-level metal width must be at least 3 (MOSIS rule #9.1)"
# 1360 "scmos.tech.out"
spacing m2,m2c/m2,m3c/m2,pad m2,m2c/m2,m3c/m2,pad 4 touching_ok \
"Second-level metal spacing must be at least 4 (MOSIS rule #9.2a)"
# 1418 "scmos.tech.out"
width cap,capc/a 2 \
"Electrode capacitor width must be at least 3 (MOSIS rule #11.1)"
spacing poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 3 touching_ok \
"Second-level poly spacing must be at least 3 (MOSIS rule #11.2,12.2)"
edge4way cap,cc space 1 0 0 0 \
"Cap must be overlapped by poly or poly2 (MOSIS rule #11.3)"
edge4way cap,cc poly 2 poly poly 2 \
"Cap must be overlapped by poly or poly2 (MOSIS rule #11.3)"
edge4way cap,cc poly2 2 poly2 poly2 2 \
"Cap must be overlapped by poly or poly2 (MOSIS rule #11.3)"
edge4way nw,pw,cw ~(nw,pw,cw)/w 2 ~(cap,cc)/a ~(nw,pw,cw)/w 2 \
"Cap must be on a flat surface (MOSIS rule #11.4)" active
edge4way ~(nw,pw,cw)/w nw,pw,cw 2 ~(cap,cc)/a nw,pw,cw 2 \
"Cap must be on a flat surface (MOSIS rule #11.4)" active
edge4way cap ~(cap)/a 2 nfet,enfet,nffet,pfet,epfet,pffet,poly,poly2,space/a,cc/a \
ndiff,ndc/a,pdiff,pdc/a,poly 2 "Cap must be on a flat surface (MOSIS rule #11.4)" active
# 1449 "scmos.tech.out"
width poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 2 \
"Electrode width must be at least 2 (MOSIS rule #12.1)"
edge4way enfet,epfet poly2,ec/a 2 poly2,ec/a 0 0 \
"Poly2 must overhang transistor by at least 2 (MOSIS rule #12.3)"
edge4way nffet,pffet cap 2 cap 0 0 \
"Cap must overhang transistor by at least 2 (MOSIS rule #12.3)"
edge4way nffet ~(cap,nffet,enfet,nfet)/a 2 cap 0 0 \
"Cap must overhang doubletransistor by at least 2 (MOSIS rule #12.3)"
edge4way pffet ~(cap,pffet,epfet,pfet)/a 2 cap 0 0 \
"Cap must overhang doubletransistor by at least 2 (MOSIS rule #12.3)"
edge4way ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a el 1 space/a 0 1 \
"Poly2 and diffusion must be separated by at least 1 (MOSIS rule #12.4)"
spacing poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet pc,ndc,pdc 2 touching_illegal \
"Poly2 spacing to poly or diffusion contact must be at least 3 (MOSIS rule #12.6)"
# 1490 "scmos.tech.out"
width ec,capc 4 \
"Electrode contact width must be at least 4 (MOSIS rule #13.1)"
edge4way ec/a space 1 poly2 poly2 1 \
"Electrode contact must be overlaped by poly2 (MOSIS rule #13.4)"
edge4way ec/a poly2 1 poly2 poly2 1 \
"Electrode contact must be overlaped by poly2 by 1 (MOSIS rule #13.4)"
edge4way ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a ec 2 space/a 0 2 \
"Poly2 and diffusion contact must be separated by at least 2 (MOSIS rule #13.5)"
width m3c 4 \
"Third-level metal contact width must be at least 4 (MOSIS rule #14.1,2,3)"
# 1528 "scmos.tech.out"
width m3,m3c/m3 6 \
"Third-level metal width must be at least 6 (MOSIS rule #15.1a)"
spacing m3,m3c/m3 m3,m3c/m3 4 touching_ok \
"Third-level metal spacing must be at least 4 from other third-level metal (MOSIS rule #15.2a)"
edge4way m3c/m3 ~m3c/m3 1 m3 m3 1 \
"Mimimum metal3 overlap of via must be at least 1 (MOSIS rule #15.3)"
# 1552 "scmos.tech.out"
width clc,pbc,emc 4 \
"Transistor contact width must be at least 4 (MOSIS rule #16.1)"
# 1562 "scmos.tech.out"
edge4way emc/a,emit pbase 4 pbase pbase 4 \
"Pbase overlap of emitter must be at least 4 (MOSIS rule #16.3)"
spacing pbc emc/a,emit 7 touching_illegal \
"Base must be 7 (4+2+1) away from emitter (MOSIS rule #16.3,4,11)"
edge4way pbc (~pbc)/a 3 pb,pbc/a pb,pbc/a 3 \
"Pbase overlap of base contact must be at least 3 (MOSIS rule #16.5)"
# 1584 "scmos.tech.out"
width col,clc/a 6 \
"Collector width must be at least 6 (MOSIS rule #16.6)"
edge4way pbase space/a 6 nwell space/a 6 \
"Nwell overlap of Pbase must be at least 6 (MOSIS rule #16.7)" well
edge4way pbase (~pbase)/a 4 ~(col,clc)/a ~(col,clc)/a 4 \
"Pbase must be at least 4 away from collector (MOSIS rule #16.8)"
edge4way clc (~clc)/a 1 col col 1 \
"Collector overlap of contact must be at least 1 (MOSIS rule #16.9)"
edge4way nw ~(nw)/w 3 ~(col,clc)/a ~(nw)/w 3 \
"N-well overlap of collector must be at least 3 (MOSIS rule #16.11)" active
edge4way ~(nw)/w nw 3 ~(col,clc)/a nw 3 \
"N-well overlap of collector must be at least 3 (MOSIS rule #16.11)" active
width em,emc/a 4 \
"Emitter width must be at least 4 (Magic Bipolar Transistor rule)"
spacing em,emc/a em,emc/a 7 touching_ok \
"Unrelated emitter must be at least 7 apart (Magic Bipolar transistor rule)"
width pbase,pbc/a 4 \
"Pbase width must be at least 4 (MOSIS extension rule)"
spacing pbase,pbc/a pbase,pbc/a 4 touching_ok \
"Pbase spacing must be at least 4 (MOSIS extension rule)"
# 1637 "scmos.tech.out"
width cwell 10 \
"Cap-well width must be at least 10 (MOSIS rule #17.1)"
spacing cwell cwell 9 touching_ok \
"Cap-well spacing must be at least 9 (MOSIS rule #17.2)"
spacing cwell nwell 9 touching_illegal \
"Cap-well spacing must be at least 9 (MOSIS rule #17.2)"
edge4way cwell space 5 ~(ndiff,ndc/a,nfet,enfet,nffet,wcap)/a ~(ndiff,ndc/a,nfet,enfet,nffet,wcap)/w 5 \
"Cap-well spacing to external active must be at least 5 (MOSIS rule #17.3)" active
edge4way cwell space 3 ~(psd,psc/a)/a ~(psd,psc/a)/w 3 \
"P-substrate diffusion and Cap-well must be separated by 3 (MOSIS rule #17.3)" active
edge4way space cwell 3 (space,poly,pc)/a 0 0 \
"Cap-well overlap of diffusion must be at least 3 (MOSIS rule #17.4)" active
# 1667 "scmos.tech.out"
width wcap 3 \
"Well-capacitor must be at least 3 (MOSIS rule #18.1)"
edge4way wcap space 1 poly poly 1 \
"Well-capacitor overhang is missing (MOSIS rule #18.3)"
edge4way wcap ndiff 3 ndiff ndiff 3 \
"N-diffusion overlap of well-capacitor must be at least 3 (MOSIS rule #18.4)"
spacing wcap pc 2 touching_illegal \
"Well-capacitor spacing to poly contact must be at least 2 (MOSIS rule #18.5)"
spacing wcap ndc 4 touching_illegal \
"Well-capacitor spacing to diffusion contact must be at least 4 (MOSIS rule #18.6)"
width nbd,nbdc,bd/a 4 \
"CCD channel width must be at least 4 (MOSIS rule #19.1)"
width nbdc 4 \
"CCD contact width must be at least 4 (MOSIS rule #19.1)"
# 1712 "scmos.tech.out"
edge4way nbd,nbdc ~(bd,nbd,nbdc)/a 4 (bd,space)/i 0 0 \
"CCD channel spacing must be at least 4 (MOSIS rule #19.2)" implant
edge4way nbd,nbdc ~(poly,nbd,nbdc)/a 4 ~(poly,nbd,nbdc)/a ~(poly,nbd,nbdc)/a 4 \
"CCD channel spacing must be at least 4 (MOSIS rule #19.2)" active
edge4way bd space 2 nbd,poly,cap,el 0 0 \
"CCD channel overhang is missing (MOSIS rule #19.6)" active
spacing nbdc poly,el 1 touching_illegal \
"CCD-diffusion contact spacing to poly must be at least 1 (MOSIS CCD rule)"
edge4way nbd poly,el 1 bd 0 0 \
"Missing Buried CCD Difussion layer (MOSIS CCD rule)" implant
# 1744 "scmos.tech.out"
edge (~hnwell)/w hnwell 10 hnwell hnwell 10\
"High-Voltage N-Well width must be at least 10 (MOSIS rule #1.1)"
edge (~hpwell)/w hpwell 10 hpwell hpwell 10\
"High-Voltage P-Well width must be at least 10 (MOSIS rule #1.1)"
edge hnwell space,pw,hpw 9 space,pw,hpw space,pw,hpw 9\
"High-Voltage N-Well spacing to N-Well must be at least 9 (MOSIS rule #1.2)"
edge hpwell space,nw,hnw 9 space,nw,hnw space,nw,hnw 9\
"High-Voltage P-Well spacing to P-Well must be at least 9 (MOSIS rule #1.2)"
edge hnwell space,pw,hpw,nw 12 space,pw,hpw,nw space,pw,hpw,nw 12\
"High-Voltage N-Well spacing must be at least 12 (MOSIS rule #20.1)"
edge hpwell space,nw,hnw,pw 12 space,nw,hnw,pw space,nw,hnw,pw 12\
"High-Voltage P-Well spacing must be at least 12 (MOSIS rule #20.1)"
edge4way ~(hndiff,hndc/a,hpdiff,hpdc/a)/a hndiff,hndc/a,hpdiff,hpdc/a 3 hndiff,hndc/a,hpdiff,hpdc/a hndiff,hndc/a,hpdiff,hpdc/a 3\
"High-Voltage Diffusion width must be at least 3 (MOSIS rule #2.1)"
spacing hndiff,hndc/a,hnfet hndiff,hndc/a,hnfet 5 touching_ok \
"High-Voltage Diffusion spacing must be at least 5 (MOSIS rule #20.2)"
spacing hpdiff,hpdc/a,hpfet hpdiff,hpdc/a,hpfet 5 touching_ok \
"High-Voltage Diffusion spacing must be at least 5 (MOSIS rule #20.2)"
spacing hndiff,hndc/a hpdiff,hpdc/a 14 touching_illegal \
"P-type diffusion must be 14 away from N-type diffusion (MOSIS rule #20.3)"
spacing hndiff,hndc/a pdiff,pdc/a 12 touching_illegal \
"P-type diffusion must be 12 away from N-type diffusion (MOSIS rule #20.3+2.3)"
spacing hpdiff,hpdc/a ndiff,ndc/a 12 touching_illegal \
"P-type diffusion must be 12 away from N-type diffusion (MOSIS rule #20.3+2.3)"
spacing hndiff,hnfet,hndc/a hnwell 7 touching_illegal \
"HVN-diffusion and HVN-well must be separated by 7 (MOSIS rule #20.3)"
spacing hpdiff,hpfet,hpdc/a hpwell 7 touching_illegal \
"HVP-diffusion and HVP-well must be separated by 7 (MOSIS rule #20.3)"
spacing nsd,nsc/a hpwell 3 touching_illegal \
"N-substrate diffusion and HVP-well must be separated by 3 (MOSIS rule #2.4+20.3)"
spacing psd,psc/a hnwell 3 touching_illegal \
"P-substrate diffusion and HVN-well must be separated by 3 (MOSIS rule #2.4+20.3)"
# 1798 "scmos.tech.out"
edge (~hndc)/a hndc/a 6 hndc/a hndc/a 6\
"High-Voltage Diffusion contact width must be at least 6 (MOSIS rule #20.5)"
edge (~hpdc)/a hpdc/a 6 hpdc/a hpdc/a 6\
"High-Voltage Diffusion contact width must be at least 6 (MOSIS rule #20.5)"
edge hpdiff,hpdc/a hpfet 4 hpfet 0 0 \
"High-Voltage transistor must be at least 4 units long (MOSIS rule #20.6)"
edge hndiff,hndc/a hnfet 4 hnfet 0 0 \
"High-Voltage transistor must be at least 4 units long (MOSIS rule #20.6)"
exact_overlap m3c,m2c,ndc,pdc,pc,psc,nsc,ec,capc,clc,emc,pbc,hndc,hpdc,hnsc,hpsc
no_overlap pfet,nfet pfet,nfet
no_overlap epfet,enfet epfet,enfet
no_overlap pffet,nffet pffet,nffet
no_overlap hpfet,hnfet hpfet,hnfet
end
extract
# 1 "./extract_template/scmosExt.tech.in" 1
# 79 "./extract_template/scmosExt.tech.in"
# 1 "./extract_template/scmosExt100.tech.in" 1
# 9 "./extract_template/scmosExt100.tech.in"
style lambda=1.0(scna20_orb)
cscale 1
lambda 100
step 100
sidehalo 0
areacap (ndiff,nsd,ndc,nsc)/a 0
perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
areacap (pdiff,psd,pdc,psc)/a 0
perimc (pdiff,psd,pdc,psc)/a space,nwell 0
# 40 "./extract_template/scmosExt100.tech.in"
areacap (poly,pc)/a 39
areacap cc/a,cap 39
overlap (poly,pc)/a nwell,pwell 39
areacap poly2,ec/a 50
perimc (poly,pc)/a ~(poly,pc)/a 80
sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 80
areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 47
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 47 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 47
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 30
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 poly2,cap 40
areacap (m2,m2c,m3c,pad)/m2 19
overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 19 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 22 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 19 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 poly2 40 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 45
device mosfet pfet pfet pdiff,pdc nwell Vdd! 204 450
device mosfet nfet nfet ndiff,ndc pwell Gnd! 150 450
device mosfet epfet epfet pdiff,pdc nwell Vdd! 204 450
device mosfet enfet enfet ndiff,ndc pwell Gnd! 150 450
device capacitor None cap,capc/a poly,pc 120 745
device bjt npn pbase,pbc/a emit,emc/a nwell
fetresis nfet linear 14100
fetresis pfet linear 48100
fetresis nfet saturation 14100
fetresis pfet saturation 48100
fetresis enfet linear 14100
fetresis epfet linear 48100
fetresis enfet saturation 14100
fetresis epfet saturation 48100
resist (ndiff,nsd,ndc/act,nsc/act) 26670
resist (pdiff,psd,pdc/act,psc/act) 59550
resist (poly,pc/act,pfet,nfet) 23860
resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 19690
resist em,emc/a 27260
resist pbase,pbc/a 2000000
resist (metal1,m2c/metal1) 49
resist (metal2,via/m2,pad) 26
resist nwell 2505830
contact pc 4 11000
contact ec/a,capc/a 4 9000
contact ndc,pdc,nsc,psc 4 18710
contact pdc/a,psc/a 4 100560
contact m2c 4 30
planeorder implant 0
planeorder well 1
planeorder active 2
planeorder metal1 3
planeorder metal2 4
planeorder metal3 5
planeorder oxide 6
height nwell -0.1 0.1
height ndiff,pdiff,nndiff,ppdiff -0.075 0.075
height poly,pfet,nfet 0.1 0.05
height ndc,pdc,nsc,psc 0.001 0.25
height pc 0.1 0.15
height m1 0.2 0.05
height m2c 0.2 0.15
height m2 0.3 0.05
style lambdaSp=1.0(scpe20_orb)
lambda 100
step 100
sidehalo 0
areacap (ndiff,nsd,ndc,nsc)/a 0
perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
areacap (pdiff,psd,pdc,psc)/a 0
perimc (pdiff,psd,pdc,psc)/a space,nwell 0
# 171 "./extract_template/scmosExt100.tech.in"
areacap (poly,pc)/a 57
overlap (poly,pc)/a nwell,pwell 57
perimc (poly,pc)/a ~(poly,pc)/a 168
sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 168
areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 41
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 41 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 41
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 33
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 poly2,cap 45
areacap (m2,m2c,m3c,pad)/m2 21
overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 21 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 21 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 25 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 33
fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450
fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450
fetresis nfet linear 14100
fetresis pfet linear 48100
fetresis nfet saturation 14100
fetresis pfet saturation 48100
resist (ndiff,nsd,ndc/act,nsc/act) 26670
resist (pdiff,psd,pdc/act,psc/act) 72860
resist (poly,pc/act,pfet,nfet) 23860
resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 18540
resist (metal1,m2c/metal1) 49
resist (metal2,via/m2,pad) 26
resist pwell 2128280
contact pc 4 12800
contact ec/a,capc/a 4 8420
contact (ndc,nsc)/a 4 36660
contact (psc,pdc)/a 4 56300
contact m2c 4 30
planeorder implant 0
planeorder well 1
planeorder active 2
planeorder metal1 3
planeorder metal2 4
planeorder metal3 5
planeorder oxide 6
# 80 "./extract_template/scmosExt.tech.in" 2
# 1 "./extract_template/scmosExt080.tech.in" 1
# 9 "./extract_template/scmosExt080.tech.in"
style lambda=0.8(scna16_ami)
cscale 1
lambda 80
step 100
sidehalo 0
areacap (ndiff,nsd,ndc,nsc)/a 0
perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
areacap (pdiff,psd,pdc,psc)/a 0
perimc (pdiff,psd,pdc,psc)/a space,nwell 0
# 40 "./extract_template/scmosExt080.tech.in"
areacap (poly,pc)/a 22
overlap (poly,pc)/a nwell,pwell 22
areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 20
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 20 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 20
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 25
areacap (m2,m2c,m3c,pad)/m2 10
overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 12 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 12 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 11 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 23
fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450
fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450
fet epfet pdiff,pdc 2 epfet Vdd! nwell 204 450
fet enfet ndiff,ndc 2 enfet Gnd! pwell 150 450
fetresis nfet linear 14100
fetresis pfet linear 48100
fetresis nfet saturation 14100
fetresis pfet saturation 48100
resist (ndiff,nsd,ndc/act,nsc/act) 51680
resist (pdiff,psd,pdc/act,psc/act) 74800
resist (poly,pc/act,pfet,nfet) 34780
resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 22400
resist (metal1,m2c/metal1) 48
resist (metal2,via/m2,pad) 28
resist nwell 1446400
contact pc 4 61560
contact ec/a,capc/a 4 12010
contact ndc,pdc,nsc,psc 4 45780
contact pdc/a,psc/a 4 32310
contact m2c 4 37570
planeorder implant 0
planeorder well 1
planeorder active 2
planeorder metal1 3
planeorder metal2 4
planeorder metal3 5
planeorder oxide 6
# 81 "./extract_template/scmosExt.tech.in" 2
# 1 "./extract_template/scmosExt060_orb.tech.in" 1
style lambda=0.6(orb_scne12)
lambda 60
step 100
sidehalo 0
areacap nwell 35
perimc nwell ~(nwell) 47
areacap ndiff,nsd,ndc/a,nsc/a 0
areacap pdiff,psd,pdc/a,psc/a 0
perimc ndiff,nsd,ndc/a,nsc/a space,pwell 0
perimc pdiff,psd,pdc/a,psc/a space,nwell 0
# 42 "./extract_template/scmosExt060_orb.tech.in"
areacap (poly,pc)/a 29
overlap (poly,pc)/a nwell,pwell 29
perimc (poly,pc)/a ~(poly,pc)/a 37
areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 16
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 16 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 16
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 19
perimc (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 41
sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 41 ((poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 41
areacap (m2,m2c,m3c,pad)/m2 10
overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 10 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 10 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 12 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 14
perimc (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 42
sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 nwell,pwell 42 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 42 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
device mosfet pfet pfet pdiff,pdc nwell Vdd! 270 623
device mosfet nfet nfet ndiff,ndc pwell Gnd! 90 623
device capacitor None cap,capc/a poly,pc 90 730
device bjt npn pbase,pbc/a emit,emc/a nwell
fetresis nfet linear 9700
fetresis pfet linear 35700
contact pc 4 16210
contact ec 4 13510
contact ndc,nsc, 4 56490
contact pdc,psc, 4 181400
contact m2c 4 43330
resist ndiff,nsd,ndc/a,nsc/a 43180
resist pdiff,psd,pdc/a,psc/a 79770
resist (poly,pc/act,pfet,nfet) 22160
resist poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 21140
resist (metal1,m2c/metal1) 51
resist (metal2,via/m2,pad) 26
resist nwell 1195000
planeorder implant 0
planeorder well 1
planeorder active 2
planeorder metal1 3
planeorder metal2 4
planeorder metal3 5
planeorder oxide 6
# 82 "./extract_template/scmosExt.tech.in" 2
# 1 "./extract_template/scmosExt34.tech.in" 1
style lambda=0.6(hp)
lambda 60
step 100
sidehalo 6
areacap nwell 35
perimc nwell ~(nwell) 47
areacap ndiff,nsd,ndc/a,nsc/a 0
areacap pdiff,psd,pdc/a,psc/a 0
perimc ndiff,nsd,ndc/a,nsc/a space,pwell 0
perimc pdiff,psd,pdc/a,psc/a space,nwell 0
# 42 "./extract_template/scmosExt34.tech.in"
areacap (poly,pc)/a 28
overlap (poly,pc)/a nwell,pwell 28
perimc (poly,pc)/a ~(poly,pc)/a 38
sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 38
sideoverlap (poly,pc)/a ~(poly,pc)/a (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 34
sideoverlap (poly,pc)/a ~(poly,pc)/a (m2,m2c,m3c,pad)/m2 27 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
sidewall (poly,pc)/a ~(poly,pc)/a ~(poly,pc)/a (poly,pc)/a 15
areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 18
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 18 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 46
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 46
perimc (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 33
sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 33 ((poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 33
sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 33
sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m2,m2c,m3c,pad)/m2 28
sidewall (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 27
areacap (m2,m2c,m3c,pad)/m2 9
overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 9 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 12 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 14 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 30
perimc (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 22
sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 nwell,pwell 22 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 20 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (poly,pc)/a 22 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 28
sidewall (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m2,m2c,m3c,pad)/m2 33
fet pfet pdiff,pdc 2 pfet Vdd! nwell 270 623
fet nfet ndiff,ndc 2 nfet Gnd! pwell 90 623
fet wcap ndiff,ndc 1 wcap Gnd! pwell 300 0
fetresis nfet linear 9700
fetresis pfet linear 35700
contact pc 4 16210
contact ndc,nsc, 4 77000
contact pdc,psc, 4 44260
contact m2c 4 150
resist ndiff,nsd,ndc/a,nsc/a 99630
resist pdiff,psd,pdc/a,psc/a 120000
resist (poly,pc/act,pfet,nfet) 25000
resist (metal1,m2c/metal1) 60
resist (metal2,via/m2,pad) 40
resist nwell 1500000
planeorder implant 0
planeorder well 1
planeorder active 2
planeorder metal1 3
planeorder metal2 4
planeorder metal3 5
planeorder oxide 6
# 83 "./extract_template/scmosExt.tech.in" 2
# 1 "./extract_template/scmosExt26b.tech.in" 1
# 13 "./extract_template/scmosExt26b.tech.in"
style lambda=0.5
lambda 50
step 100
sidehalo 8
areacap nwell 40
perimc nwell ~(nwell) 100
areacap (ndiff,nsd,ndc,nsc)/a 0
perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
areacap (pdiff,psd,pdc,psc)/a 0
perimc (pdiff,psd,pdc,psc)/a space,nwell 0
# 51 "./extract_template/scmosExt26b.tech.in"
areacap (poly,pc)/a 15
overlap (poly,pc)/a nwell,pwell 15
perimc (poly,pc)/a ~(poly,pc)/a 22
sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 22
sideoverlap (poly,pc)/a ~(poly,pc)/a (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 10
sideoverlap (poly,pc)/a ~(poly,pc)/a (m2,m2c,m3c,pad)/m2 6 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
sideoverlap (poly,pc)/a ~(poly,pc)/a (m3,m3c,pad)/m3 4 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2)
sidewall (poly,pc)/a ~(poly,pc)/a ~(poly,pc)/a (poly,pc)/a 11
areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 8
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 8 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 14
overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 14
perimc (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 22
sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 22 ((poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 25
sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 25
sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m2,m2c,m3c,pad)/m2 12
sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m3,m3c,pad)/m3 7 (m2,m2c,m3c,pad)/m2
sidewall (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 27
areacap (m2,m2c,m3c,pad)/m2 4
overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 4 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 5 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 6 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 9
perimc (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 18
sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 nwell,pwell 18 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a)
sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 19 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (poly,pc)/a 20 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1
sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 23
sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m3,m3c,pad)/m3 10
sidewall (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m2,m2c,m3c,pad)/m2 33
areacap (m3,m3c,pad)/m3 3
overlap (m3,m3c,pad)/m3 nwell,pwell 3 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a
overlap (m3,m3c,pad)/m3 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2
overlap (m3,m3c,pad)/m3 (poly,pc)/a 3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2
overlap (m3,m3c,pad)/m3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 4 (m2,m2c,m3c,pad)/m2
overlap (m3,m3c,pad)/m3 (m2,m2c,m3c,pad)/m2 9
perimc (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 17
sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 nwell,pwell 17 ((ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a,(poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2)
sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 17 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2)
sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (poly,pc)/a 17 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2)
sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 20 ((m2,m2c,m3c,pad)/m2)
sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m2,m2c,m3c,pad)/m2 25
sidewall (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m3,m3c,pad)/m3 50
fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450
fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450
fetresis nfet linear 14100
fetresis pfet linear 48100
fetresis nfet saturation 14100
fetresis pfet saturation 48100
resist (ndiff,nsd,ndc/act,nsc/act) 3800
resist (pdiff,psd,pdc/act,psc/act) 3800
resist (poly,pc/act,pfet,nfet) 5000
resist (metal1,m2c/metal1) 81
resist (metal2,via/m2,pad) 81
resist (metal3,pad/m3,via2/m3) 34
resist nwell 1980000
contact pc 4 15000
contact ndc,pdc,nsc,psc 4 1500
contact m2c 4 500
contact m3c 4 500
planeorder implant 0
planeorder well 1
planeorder active 2
planeorder metal1 3
planeorder metal2 4
planeorder metal3 5
planeorder oxide 6
# 84 "./extract_template/scmosExt.tech.in" 2
# 97 "./extract_template/scmosExt.tech.in"
# 1 "./extract_template/scmosExtDiag.tech.in" 1
style check_nwell
lambda 100
step 100
resist nwell 2000000
areacap nw,nwc,nsd 100
noplaneordering
style check_pwell
lambda 100
step 100
resist pwell 2000000
areacap pw,pwc,psd 100
noplaneordering
style check_psubstr
lambda 50
step 200
areacap psd,psc 1000
noplaneordering
style check_nsubstr
lambda 50
step 200
areacap nsd,nsc 1000
noplaneordering
# 97 "./extract_template/scmosExt.tech.in" 2
# 1830 "scmos.tech.out" 2
# 2635 "scmos.tech.out"
end
wiring
contact pdcontact 4 pdiff 0 metal1 0
contact ndcontact 4 ndiff 0 metal1 0
contact pcontact 4 poly 0 metal1 0
contact ec 6 poly2 0 metal1 0
contact m2contact 4 metal1 0 metal2 0
contact m3contact 5 metal2 0 metal3 0
end
router
layer1 metal1 3 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc 3
layer2 metal2 3 m2,m2c/m2,m3c/m2,pad 4 poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet,ndiff,ndc/a,pdiff,pdc/a 1
contacts m2contact 4
gridspacing 8
end
plowing
fixed nfet,enfet,nffet,pfet,epfet,pffet,glass,pad
covered nfet,enfet,nffet,pfet,epfet,pffet
drag nfet,enfet,nffet,pfet,epfet,pffet
end
plot
style colorversatec
ndiff,ndc yellow \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA
ndiff,ndc cyan \
0000 5555 0000 5555 \
0000 5555 0000 5555 \
0000 5555 0000 5555 \
0000 5555 0000 5555
nsd,nsc,col,clc yellow \
1515 2A2A 5151 A2A2 \
1515 2A2A 5151 A2A2 \
1515 2A2A 5151 A2A2 \
1515 2A2A 5151 A2A2
nsd,nsc,col,clc cyan \
0000 1515 0000 5151 \
0000 1515 0000 5151 \
0000 1515 0000 5151 \
0000 1515 0000 5151
pdiff,pdc yellow \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA
pdiff,pdc cyan \
0000 5555 0000 5555 \
0000 5555 0000 5555 \
0000 5555 0000 5555 \
0000 5555 0000 5555
pdiff,pdc magenta \
AAAA 0000 AAAA 0000 \
AAAA 0000 AAAA 0000 \
AAAA 0000 AAAA 0000 \
AAAA 0000 AAAA 0000
psd,psc yellow \
1515 2A2A 5151 A2A2 \
1515 2A2A 5151 A2A2 \
1515 2A2A 5151 A2A2 \
1515 2A2A 5151 A2A2
psd,psc cyan \
0000 1515 0000 5151 \
0000 1515 0000 5151 \
0000 1515 0000 5151 \
0000 1515 0000 5151
psd,psc magenta \
2A2A 0000 A2A2 0000 \
2A2A 0000 A2A2 0000 \
2A2A 0000 A2A2 0000 \
2A2A 0000 A2A2 0000
poly,pc/a magenta \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA
poly2,ec/a yellow \
FFFF FFFF FFFF FFFF \
FFFF FFFF FFFF FFFF \
FFFF FFFF FFFF FFFF \
FFFF FFFF FFFF FFFF
nfet yellow \
0505 8282 1414 0A0A \
5050 2828 4141 A0A0 \
0505 8282 1414 0A0A \
5050 2828 4141 A0A0
nfet cyan \
0000 0505 0000 1414 \
0000 5050 0000 4141 \
0000 0505 0000 1414 \
0000 5050 0000 4141
nfet magenta \
5050 2828 4141 A0A0 \
0505 8282 1414 0A0A \
5050 2828 4141 A0A0 \
0505 8282 1414 0A0A
enfet yellow \
BABA 7575 EAEA D5D5 \
ABAB 5757 AEAE 5D5D \
BABA 7575 EAEA D5D5 \
ABAB 5757 AEAE 5D5D
enfet cyan \
4141 0A0A 0505 2828 \
1414 A0A0 5050 8282 \
4141 0A0A 0505 2828 \
1414 A0A0 5050 8282
nffet yellow \
8E8E 0707 8B8B D5D5 \
E8E8 7070 B8B8 5D5D \
8E8E 0707 8B8B D5D5 \
E8E8 7070 B8B8 5D5D
nffet cyan \
0101 0808 1414 2828 \
1010 8080 4141 8282 \
0101 0808 1414 2828 \
1010 8080 4141 8282
nffet magenta \
5050 A0A0 4040 0202 \
0505 0A0A 0404 2020 \
5050 A0A0 4040 0202 \
0505 0A0A 0404 2020
pfet yellow \
6363 A0A0 5050 2828 \
3636 0A0A 0505 8282 \
6363 A0A0 5050 2828 \
3636 0A0A 0505 8282
pfet cyan \
0000 5151 0000 5454 \
0000 1515 0000 1515 \
0000 5151 0000 5454 \
0000 1515 0000 1515
pfet magenta \
9494 0A0A 2525 8282 \
4949 A0A0 5252 2828 \
9494 0A0A 2525 8282 \
4949 A0A0 5252 2828
epfet yellow \
BCBC 4F4F 2F2F D3D3 \
CBCB F4F4 F2F2 3D3D \
BCBC 4F4F 2F2F D3D3 \
CBCB F4F4 F2F2 3D3D
epfet cyan \
0000 A0A0 0000 2828 \
0000 0A0A 0000 8282 \
0000 A0A0 0000 2828 \
0000 0A0A 0000 8282
epfet magenta \
4141 0000 5050 0000 \
1414 0000 0505 0000 \
4141 0000 5050 0000 \
1414 0000 0505 0000
pffet yellow \
7B7B F0F0 F0F0 E9E9 \
B7B7 0F0F 0F0F 9E9E \
7B7B F0F0 F0F0 E9E9 \
B7B7 0F0F 0F0F 9E9E
pffet cyan \
0000 0101 0000 1414 \
0000 1010 0000 4141 \
0000 0101 0000 1414 \
0000 1010 0000 4141
pffet magenta \
8484 0A0A 2525 8282 \
4848 A0A0 5252 2828 \
8484 0A0A 2525 8282 \
4848 A0A0 5252 2828
cap,cc/a yellow \
3E3E 7777 E3E3 C1C1 \
E3E3 7777 3E3E 1C1C \
3E3E 7777 E3E3 C1C1 \
E3E3 7777 3E3E 1C1C
cap,cc/a magenta \
4141 8888 1414 2A2A \
1414 8888 4141 A2A2 \
4141 8888 1414 2A2A \
1414 8888 4141 A2A2
pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc cyan \
AAAA 0000 AAAA 0000 \
AAAA 0000 AAAA 0000 \
AAAA 0000 AAAA 0000 \
AAAA 0000 AAAA 0000
m2,m2c/m2,m3c/m2,pad cyan \
0000 1111 0000 4444 \
0000 1111 0000 4444 \
0000 1111 0000 4444 \
0000 1111 0000 4444
m2,m2c/m2,m3c/m2,pad magenta \
0000 4444 0000 1111 \
0000 4444 0000 1111 \
0000 4444 0000 1111 \
0000 4444 0000 1111
m2c/m1 black \
0000 6666 6666 0000 \
0000 9999 9999 0000 \
0000 6666 6666 0000 \
0000 9999 9999 0000
pad,glass black \
0300 0700 0E00 1C00 \
3800 7000 E000 C000 \
00C0 00E0 0070 0038 \
001C 000E 0007 0003
nwell yellow \
0800 1000 2000 4000 \
8000 0001 0002 0004 \
0008 0010 0020 0040 \
0080 0010 0200 0400
nwell cyan \
1000 2000 4000 8000 \
0001 0002 0004 0008 \
0010 0020 0040 0080 \
0100 0200 0400 0800
pwell yellow \
1000 0400 0400 0100 \
0100 0040 0040 0010 \
0010 0004 0004 0001 \
0001 4000 4000 1000
pwell cyan \
0000 0800 0000 0200 \
0000 0080 0000 0020 \
0000 0008 0000 0002 \
0000 8000 0000 2000
pwell magenta \
0800 0000 0200 0000 \
0080 0000 0020 0000 \
0008 0000 0002 0000 \
8000 0000 2000 0000
bd yellow \
4444 8888 4444 8888 \
4444 8888 4444 8888 \
4444 8888 4444 8888 \
4444 8888 4444 8888
bd cyan \
0000 4444 0000 4444 \
0000 4444 0000 4444 \
0000 4444 0000 4444 \
0000 4444 0000 4444
bd magenta \
8888 0000 8888 0000 \
8888 0000 8888 0000 \
8888 0000 8888 0000 \
8888 0000 8888 0000
nbd,nbdc yellow \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA \
5555 AAAA 5555 AAAA
nbd,nbdc cyan \
0000 5555 0000 5555 \
0000 5555 0000 5555 \
0000 5555 0000 5555 \
0000 5555 0000 5555
nbd,nbdc magenta \
8888 0000 8888 0000 \
8888 0000 8888 0000 \
8888 0000 8888 0000 \
8888 0000 8888 0000
em,emc yellow \
4444 8888 4444 8888 \
4444 8888 4444 8888 \
4444 8888 4444 8888 \
4444 8888 4444 8888
em,emc cyan \
0000 4444 0000 4444 \
0000 4444 0000 4444 \
0000 4444 0000 4444 \
0000 4444 0000 4444
pbase,pbc yellow \
5555 AAAA 0000 0000 \
5555 AAAA 0000 0000 \
5555 AAAA 0000 0000 \
5555 AAAA 0000 0000
pbase,pbc cyan \
0000 5555 0000 0000 \
0000 5555 0000 0000 \
0000 5555 0000 0000 \
0000 5555 0000 0000
pbase,pbc magenta \
AAAA 0000 0000 0000 \
AAAA 0000 0000 0000 \
AAAA 0000 0000 0000 \
AAAA 0000 0000 0000
m3,m3c/m3 black \
0100 0000 0000 0000 \
1010 0000 0000 0000 \
0001 0000 0000 0000 \
1010 0000 0000 0000
m3,m3c/m3 cyan \
0280 0000 0820 0000 \
2008 0000 8002 0000 \
8002 0000 2008 0000 \
0820 0000 0280 0000
m3,m3c/m3 magenta \
0100 06C0 0440 1830 \
1010 600C 4004 8003 \
0001 C006 4004 3018 \
1010 0C60 0440 0380
m3c/m2 black \
0820 0820 0820 0FE0 \
E00F 2008 2008 2008 \
2008 2008 2008 E00F \
0000 0FE0 0820 0820
error_p,error_s,error_ps black \
0000 3C3C 4646 4A4A \
5252 6262 3C3C 0000 \
0000 3C3C 4646 4A4A \
5252 6262 3C3C 0000
magnet yellow \
AAAA 0000 5555 0000 \
AAAA 0000 5555 0000 \
AAAA 0000 5555 0000 \
AAAA 0000 5555 0000
fence magenta \
FFFF 0000 0000 0000 \
0000 0000 0000 0000 \
FFFF 0000 0000 0000 \
0000 0000 0000 0000
rotate cyan \
0000 E0E0 E0E0 E0E0 \
0000 0000 0000 0000 \
0000 E0E0 E0E0 E0E0 \
0000 0000 0000 0000
pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,clc,emc,pbc X
style versatec
pfet \
07c0 0f80 1f00 3e00 \
7c00 f800 f001 e003 \
c007 800f 001f 003e \
00c7 00f8 01f0 03e0
nfet \
1f00 0f80 07c0 03e0 \
01f0 00f8 007c 003e \
001f 800f c007 e003 \
f001 f800 7c00 3e00
m2c \
c3c3 c3c3 0000 0000 \
0000 0000 c3c3 c3c3 \
c3c3 c3c3 0000 0000 \
0000 0000 c3c3 c3c3
pwell \
2020 2020 2020 2020 \
2020 2020 2020 2020 \
0000 0000 0000 0000 \
0000 0000 0000 0000
nwell \
0808 0404 0202 0101 \
0000 0000 0000 0000 \
0808 0404 0202 0101 \
0000 0000 0000 0000
poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet \
0808 0400 0202 0101 \
8080 4000 2020 1010 \
0808 0004 0202 0101 \
8080 0040 2020 1010
pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc \
8080 0000 0000 0000 \
0808 0000 0000 0000 \
8080 0000 0000 0000 \
0808 0000 0000 0000
pad,glass \
0000 0000 1c1c 3e3e \
3636 3e3e 1c1c 0000 \
0000 0000 1c1c 3e3e \
3636 3e3e 1c1c 0000
nsd,nsc,col,clc \
0808 1414 2222 4141 \
8080 4040 2020 1010 \
0808 1414 2222 4141 \
8080 4040 2020 1010
m2,m2c/m2,m3c/m2,pad \
0000 1111 0000 0000 \
0000 1111 0000 0000 \
0000 1111 0000 0000 \
0000 1111 0000 0000
pdiff,pdc,pfet \
0000 0808 5555 8080 \
0000 8080 5555 0808 \
0000 0808 5555 8080 \
0000 8080 5555 0808
psd,psc \
1414 2222 0000 2222 \
4141 2222 0000 2222 \
1414 2222 0000 2222 \
4141 2222 0000 2222
ndiff,nfet,ndc \
0808 1010 2020 4040 \
8080 4141 2222 1414 \
0808 1010 2020 4040 \
8080 4141 2222 1414
poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet \
0000 2020 5050 2020 \
0000 0202 0505 0202 \
0000 2020 5050 2020 \
0000 0202 0505 0202
pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,clc,emc,pbc X
style gremlin
pfet 9
nfet 10
m2c 11
pwell 15
nwell 16
poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 19
pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc 22
pad,glass 23
nsd,nsc 24
m2,m2c/m2,m3c/m2,pad 28
pdiff,pdc,pfet 29
psd,psc 30
ndiff,nfet,ndc 31
m2c/m1,pc/m1,ndc/m1,pdc/m1,psc/m1,nsc/m1,pad/m1 X
style postscript
1 C0C0C0C0 C0C0C0C0 00000000 00000000 0C0C0C0C 0C0C0C0C 00000000 00000000
2 A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A
3 00030003 000C000C 00300030 00C000C0 03000300 0C000C00 30003000 C000C000
4 00000000 00000000 C0C0C0C0 00000000 00000000 00000000 0C0C0C0C 00000000
5 FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF
6 07070707 0E0E0E0E 1C1C1C1C 38383838 70707070 E0E0E0E0 C1C1C1C1 83838383
7 18181818 30303030 60606060 C0C0C0C0 81818181 03030303 06060606 0C0C0C0C
8 18181818 0C0C0C0C 06060606 03030303 81818181 C0C0C0C0 60606060 30303030
9 18181818 3C3C3C3C 3C3C3C3C 18181818 81818181 C3C3C3C3 C3C3C3C3 81818181
10 F0F0F0F0 60606060 06060606 0F0F0F0F 0F0F0F0F 06060606 60606060 F0F0F0F0
11 01000080 02000040 0C000030 F000000F 000FF000 00300C00 00400200 00800100
12 00000000 00000000 00000000 00000000 00000000 00000000 00000000 00000000
13 00000000 00000000 33333333 33333333 00000000 00000000 CCCCCCCC CCCCCCCC
1 47 95 111 0
2 223 31 223 0
3 0 0 0 192
4 31 111 31 0
5 31 111 255 0
6 63 95 191 0
7 255 63 255 0
8 0 0 0 127
9 223 47 223 0
10 0 255 255 0
11 0 0 255 0
12 191 127 0 0
13 95 223 63 0
14 0 0 0 255
15 191 127 63 0
16 111 151 244 0
17 23 175 183 0
cc,pc,ndc,pdc,psc,nsc 14 X
m2c,pad,glass 14 B
pad,glass 14 11
m2c 14 13
m2,m2c,pad 13 10
pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,clc,emc,pbc,nbdc,m1,m2c,gc 12 9
cap,cc,poly2 11 7
nsd,nsc 7 1
psd,psc 6 1
nfet,nffet 9 8
pfet,wcap,pffet 1 7
poly,pc,cap,cc 10 5
nfet 16 5
pfet,wcap 17 5
pdiff,pdc,pffet 1 5
ndiff,ndc,nffet 9 5
pwell 1 4
nwell 2 4
style pnm
draw metal1
draw metal2
draw polysilicon
draw ndiffusion
draw pdiffusion
draw ntransistor
draw ptransistor
map psubstratepdiff pdiffusion
map nsubstratendiff ndiffusion
map polycontact polysilicon metal1
map m2contact metal1 metal2
map m3contact metal2 metal3
map ndcontact ndiffusion metal1
map pdcontact pdiffusion metal1
map nsubstratencontact ndiffusion metal1
map psubstratepcontact pdiffusion metal1
end
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