magic/scmos/extract_template/scmosExt34.tech.in

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/*
This is for HP's CMOS34 1.2 micron CMOS Bulk Process.
Again some parameters are defined by GPP others by Ersatzco
and others are computed.
*/
#ifdef extForSpice
style lambda=0.6(hp)
#else
style lambda_irsim=0.6(hp)
#endif
lambda 60
step 100
sidehalo 6 /* 2 more than min m2 spacing */
#ifdef INCLUDE_FET_CAP
areacap allFet 433
#endif
/* ------------ diff capacitances ---------------- */
areacap nwell 35
perimc nwell ~(nwell) 47
#ifdef extForSpice
areacap ndiff,nsd,ndc/a,nsc/a 0
areacap pdiff,psd,pdc/a,psc/a 0
perimc ndiff,nsd,ndc/a,nsc/a space,pwell 0
perimc pdiff,psd,pdc/a,psc/a space,nwell 0
#else
areacap ndiff,nsd,ndc/a,nsc/a 116
areacap pdiff,psd,pdc/a,psc/a 187
/* Real values increased to compensate for not counting CJGATE */
perimc ndiff,nsd,ndc/a,nsc/a space,pwell 176 /* 156 */
perimc pdiff,psd,pdc/a,psc/a space,nwell 162 /* 132 */
#endif
/* ------------------------------------------------- */
/* ------------ poly capacitances ---------------- */
areacap PolyCap 28
overlap PolyCap allWell 28
perimc PolyCap ~PolyCap 38
sideOverlap(PolyCap, ~PolyCap, allWell, 38, )
sideOverlap(PolyCap, ~PolyCap, M1Cap, 34, )
sideOverlap(PolyCap, ~PolyCap, M2Cap, 27, M1Cap)
sidewall PolyCap ~PolyCap ~PolyCap PolyCap 15
/* ------------------------------------------------- */
/* ------------ metal1 capacitances ---------------- */
areacap M1Cap 18
overlap M1Cap allWell 18 PolyCap,PNplusCap
overlap M1Cap PNplusCap 46
overlap M1Cap PolyCap 46
perimc M1Cap ~M1Cap 33
sideOverlap(M1Cap, ~M1Cap, allWell, 33, PolyCapCommaPNplusCap)
sideOverlap(M1Cap, ~M1Cap, PNplusCap, 33, )
sideOverlap(M1Cap, ~M1Cap, PolyCap, 33, )
sideOverlap(M1Cap, ~M1Cap, M2Cap, 28, )
sidewall M1Cap ~M1Cap ~M1Cap M1Cap 27
/* ------------------------------------------------- */
/* ------------ metal2 capacitances ---------------- */
areacap M2Cap 9
overlap M2Cap allWell 9 PolyCap,M1Cap,PNplusCap
overlap M2Cap PNplusCap 12 M1Cap
overlap M2Cap PolyCap 14 M1Cap
overlap M2Cap M1Cap 30
perimc M2Cap ~M2Cap 22
sideOverlap(M2Cap, ~M2Cap, allWell, 22, M1CapCommaPolyCapCommaPNplusCap )
sideOverlap(M2Cap, ~M2Cap, PNplusCap, 20, M1Cap)
sideOverlap(M2Cap, ~M2Cap, PolyCap, 22, M1Cap)
sideOverlap(M2Cap, ~M2Cap, M1Cap, 28, )
sidewall M2Cap ~M2Cap ~M2Cap M2Cap 33
/* ------------------------------------------------- */
/* -------------- Fets -----------------------------*/
/* cscab, cscap defined since extresis needs them */
fet pfet pdiff,pdc 2 pfet Vdd! nwell 270 623
fet nfet ndiff,ndc 2 nfet Gnd! pwell 90 623
fet wcap ndiff,ndc 1 wcap Gnd! pwell 300 0
/* From irsim */
fetresis nfet linear 9700
fetresis pfet linear 35700
/* ------------------------------------------------- */
/* -------------- Resistivity (in milliohms per sq) -------*/
contact pc 4 16210
contact ndc,nsc, 4 77000
contact pdc,psc, 4 44260
contact m2c 4 150
resist ndiff,nsd,ndc/a,nsc/a 99630
resist pdiff,psd,pdc/a,psc/a 120000
resist PolyRes 25000
resist M1Res 60
resist M2Res 40
resist nwell 1500000
/* ------------------------------------------------- */
/* Order the planes for correct shielding */
planeOrder(implant,0)
planeOrder(well,1)
planeOrder(active,2)
planeOrder(metal1,3)
planeOrder(metal2,4)
planeOrder(metal3,5)
planeOrder(oxide,6)