magic/scmos/extract_template/scmosExt100.tech.in

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/*
This is for lambda=1.0um - ie orbit's 2 um technologies.
Needs some more work for parallel coupling capacitances and upwards
fringe.
*/
#ifdef extForSpice
style lambda=1.0(scna20_orb)
#else
style lambda_irsim=1.0(scna20_orb)
#endif
cscale 1
lambda 100
step 100
sidehalo 0 /* no parallel coupling cap */
#ifdef INCLUDE_FET_CAP /* Normally off since neither spice or irsim need it */
areacap allFet 750 /* af/lambda^2 */
#endif
#ifdef extForSpice
areacap (ndiff,nsd,ndc,nsc)/a 0
perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
areacap (pdiff,psd,pdc,psc)/a 0
perimc (pdiff,psd,pdc,psc)/a space,nwell 0
#else
areacap (ndiff,nsd,ndc,nsc)/a 398
perimc (ndiff,nsd,ndc,nsc)/a space,pwell 423
areacap (pdiff,psd,pdc,psc)/a 230
perimc (pdiff,psd,pdc,psc)/a space,nwell 85
#endif
/* ------------------------------------------------------ */
/* ------------ poly capacitances ---------------- */
areacap PolyCap 39
areacap cc/a,cap 39
overlap PolyCap allWell 39
areacap poly2,ec/a 50
perimc PolyCap ~PolyCap 80
sideOverlap(PolyCap, ~PolyCap, allWell, 80, )
/* ------------------------------------------------- */
/* NO fringe data avaliable */
/* ------------ metal1 capacitances ---------------- */
areacap M1Cap 47
overlap M1Cap allWell 47 PolyCap,PNplusCap
overlap M1Cap PNplusCap 47
overlap M1Cap PolyCap 30
overlap M1Cap poly2,cap 40
/* ------------------------------------------------- */
/* ------------ metal2 capacitances ---------------- */
areacap M2Cap 19
overlap M2Cap allWell 19 PolyCap,M1Cap,PNplusCap
overlap M2Cap PNplusCap 22 M1Cap
overlap M2Cap PolyCap 19 M1Cap
overlap M2Cap poly2 40 M1Cap
overlap M2Cap M1Cap 45
/* ------------------------------------------------- */
/* -------------- MOSFet Devices -------------------------------*/
/* syntax: device mosfet <name> <gate_types> <s/d_types> */
/* <sub_types> <sub_name> <gscap> <gccap> */
/* gscap, gccap defined since extresis needs them */
device mosfet pfet pfet pdiff,pdc nwell Vdd! 204 450
device mosfet nfet nfet ndiff,ndc pwell Gnd! 150 450
device mosfet epfet epfet pdiff,pdc nwell Vdd! 204 450
device mosfet enfet enfet ndiff,ndc pwell Gnd! 150 450
/* -------------------- Poly-Poly2 Caps ------------------------*/
/* syntax: device capacitor <name> <top_types> <bottom_types> */
/* <perim_cap> <area_cap> */
device capacitor None cap,capc/a poly,pc 120 745
/* ---------- NPN Vertical Bipolar Devices -------------*/
/* syntax: device bjt <name> <base_types> <emit_types> <coll_types> */
device bjt npn pbase,pbc/a emit,emc/a nwell
fetresis nfet linear 14100 /* resistance dyn L */
fetresis pfet linear 48100 /* resistance dyn H */
fetresis nfet saturation 14100 /* resistance dyn L */
fetresis pfet saturation 48100 /* resistance dyn H */
fetresis enfet linear 14100 /* resistance dyn L */
fetresis epfet linear 48100 /* resistance dyn H */
fetresis enfet saturation 14100 /* resistance dyn L */
fetresis epfet saturation 48100 /* resistance dyn H */
/* ------------------------------------------------- */
/* -------------- Resistivity (in milliohms per sq) -------*/
/* ---- assumed temp 85 C ----- */
resist NDRes 26670
resist PDRes 59550
resist PolyRes 23860
resist allPoly2 19690
resist em,emc/a 27260
resist pbase,pbc/a 2000000
resist M1Res 49
resist M2Res 26
resist nwell 2505830
contact pc 4 11000
contact ec/a,capc/a 4 9000
contact ndc,pdc,nsc,psc 4 18710
contact pdc/a,psc/a 4 100560
contact m2c 4 30
/* ------------------------------------------------- */
/* Order the planes for correct shielding */
planeOrder(implant,0)
planeOrder(well,1)
planeOrder(active,2)
planeOrder(metal1,3)
planeOrder(metal2,4)
planeOrder(metal3,5)
planeOrder(oxide,6)
/* Layer widths and thicknesses for inductance extraction */
/* and 3D rendering */
height nwell -0.1 0.1
height ndiff,pdiff,nndiff,ppdiff -0.075 0.075
height poly,pfet,nfet 0.1 0.05
height ndc,pdc,nsc,psc 0.001 0.25
height pc 0.1 0.15
height m1 0.2 0.05
height m2c 0.2 0.15
height m2 0.3 0.05
#ifdef extForSpice
style lambdaSp=1.0(scpe20_orb)
#else
style lambda=1.0(scpe20_orb)
#endif
lambda 100
step 100
sidehalo 0 /* no parallel coupling cap */
#ifdef INCLUDE_FET_CAP /* Normally off since neither spice or irsim need it */
areacap allFet 750 /* af/lambda^2 */
#endif
#ifdef extForSpice
areacap (ndiff,nsd,ndc,nsc)/a 0
perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
areacap (pdiff,psd,pdc,psc)/a 0
perimc (pdiff,psd,pdc,psc)/a space,nwell 0
#else
areacap (ndiff,nsd,ndc,nsc)/a 398
perimc (ndiff,nsd,ndc,nsc)/a space,pwell 423
areacap (pdiff,psd,pdc,psc)/a 230
perimc (pdiff,psd,pdc,psc)/a space,nwell 85
#endif
/* ------------------------------------------------------ */
/* ------------ poly capacitances ---------------- */
areacap PolyCap 57
overlap PolyCap allWell 57
perimc PolyCap ~PolyCap 168
sideOverlap(PolyCap, ~PolyCap, allWell, 168, )
/* ------------------------------------------------- */
/* NO fringe data avaliable */
/* ------------ metal1 capacitances ---------------- */
areacap M1Cap 41
overlap M1Cap allWell 41 PolyCap,PNplusCap
overlap M1Cap PNplusCap 41
overlap M1Cap PolyCap 33
overlap M1Cap poly2,cap 45
/* ------------------------------------------------- */
/* ------------ metal2 capacitances ---------------- */
areacap M2Cap 21
overlap M2Cap allWell 21 PolyCap,M1Cap,PNplusCap
overlap M2Cap PNplusCap 21 M1Cap
overlap M2Cap PolyCap 25 M1Cap
overlap M2Cap M1Cap 33
/* ------------------------------------------------- */
/* -------------- Fets -----------------------------*/
/* gscap, gccap defined since extresis needs them */
fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450
fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450
fetresis nfet linear 14100 /* resistance dyn L */
fetresis pfet linear 48100 /* resistance dyn H */
fetresis nfet saturation 14100 /* resistance dyn L */
fetresis pfet saturation 48100 /* resistance dyn H */
/* ------------------------------------------------- */
/* -------------- Resistivity (in milliohms per sq) -------*/
/* ---- assumed temp 85 C ----- */
resist NDRes 26670
resist PDRes 72860
resist PolyRes 23860
resist allPoly2 18540
resist M1Res 49
resist M2Res 26
resist pwell 2128280
contact pc 4 12800
contact ec/a,capc/a 4 8420
contact (ndc,nsc)/a 4 36660
contact (psc,pdc)/a 4 56300
contact m2c 4 30
/* ------------------------------------------------- */
/* Order the planes for correct shielding */
planeOrder(implant,0)
planeOrder(well,1)
planeOrder(active,2)
planeOrder(metal1,3)
planeOrder(metal2,4)
planeOrder(metal3,5)
planeOrder(oxide,6)