magic/scmos/extract_template/scmosExt26b.tech.in

157 lines
4.7 KiB
Plaintext

/*
This is for HP's CMOS26B 1.0 micron CMOS Bulk Process.
All parameters are defined based on HP's general process
specifications (GPP). Sidewall fringing was taken from
Ersatco fictitious process (johnson,jouppi).
Upwards fringe caps (eg poly-->m1, poly-->m2) are computed
by the program scaleCap by using the Skurai/Tamaru formula
based on the known capacitances.
*/
#ifdef extForSpice
style lambda=0.5
#else
style lambda_irsim=0.5
#endif
lambda 50
step 100
sidehalo 8 /* 2 more than min m3 spacing */
#ifdef INCLUDE_FET_CAP /* Normally off since neither spice or irsim need it */
areacap allFet 692 /* af/lambda^2 */
#endif
/* ------------ diff capacitances ---------------- */
areacap nwell 40
perimc nwell ~(nwell) 100
#ifdef extForSpice
areacap (ndiff,nsd,ndc,nsc)/a 0
perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
areacap (pdiff,psd,pdc,psc)/a 0
perimc (pdiff,psd,pdc,psc)/a space,nwell 0
#else
/* Real perim values increased a little to
compensate for not counting CJGATE */
areacap (ndiff,nsd,ndc,nsc)/a 40
perimc (ndiff,nsd,ndc,nsc)/a space,pwell 300 /* 250 */
areacap (pdiff,psd,pdc,psc)/a 170
perimc (pdiff,psd,pdc,psc)/a space,nwell 200 /* 160 */
#endif
/* ------------------------------------------------------ */
/* ------------ poly capacitances ---------------- */
areacap PolyCap 15
overlap PolyCap allWell 15
perimc PolyCap ~PolyCap 22
sideOverlap(PolyCap, ~PolyCap, allWell, 22, )
sideOverlap(PolyCap, ~PolyCap, M1Cap, 10, )
sideOverlap(PolyCap, ~PolyCap, M2Cap, 6, M1Cap)
sideOverlap(PolyCap, ~PolyCap, M3Cap, 4, M1CapCommaM2Cap)
sidewall PolyCap ~PolyCap ~PolyCap PolyCap 11
/* ------------------------------------------------- */
/* ------------ metal1 capacitances ---------------- */
areacap M1Cap 8
overlap M1Cap allWell 8 PolyCap,PNplusCap
overlap M1Cap PNplusCap 14
overlap M1Cap PolyCap 14
perimc M1Cap ~M1Cap 22
sideOverlap(M1Cap, ~M1Cap, allWell, 22, PolyCapCommaPNplusCap)
sideOverlap(M1Cap, ~M1Cap, PNplusCap, 25, )
sideOverlap(M1Cap, ~M1Cap, PolyCap, 25, )
sideOverlap(M1Cap, ~M1Cap, M2Cap, 12, )
sideOverlap(M1Cap, ~M1Cap, M3Cap, 7, M2Cap)
sidewall M1Cap ~M1Cap ~M1Cap M1Cap 27
/* ------------------------------------------------- */
/* ------------ metal2 capacitances ---------------- */
areacap M2Cap 4
overlap M2Cap allWell 4 PolyCap,M1Cap,PNplusCap
overlap M2Cap PNplusCap 5 M1Cap
overlap M2Cap PolyCap 6 M1Cap
overlap M2Cap M1Cap 9
perimc M2Cap ~M2Cap 18
sideOverlap(M2Cap, ~M2Cap, allWell, 18, M1CapCommaPolyCapCommaPNplusCap )
sideOverlap(M2Cap, ~M2Cap, PNplusCap, 19, M1Cap)
sideOverlap(M2Cap, ~M2Cap, PolyCap, 20, M1Cap)
sideOverlap(M2Cap, ~M2Cap, M1Cap, 23, )
sideOverlap(M2Cap, ~M2Cap, M3Cap, 10, )
sidewall M2Cap ~M2Cap ~M2Cap M2Cap 33
/* ------------------------------------------------- */
/* ------------ metal3 capacitances ---------------- */
areacap M3Cap 3
overlap M3Cap allWell 3 PolyCap,M1Cap,M2Cap,PNplusCap
overlap M3Cap PNplusCap 3 M1Cap,M2Cap
overlap M3Cap PolyCap 3 M1Cap,M2Cap
overlap M3Cap M1Cap 4 M2Cap
overlap M3Cap M2Cap 9
perimc M3Cap ~M3Cap 17
sideOverlap(M3Cap, ~M3Cap, allWell, 17, PNplusCapCommaPolyCapCommaM1CapCommaM2Cap)
sideOverlap(M3Cap, ~M3Cap, PNplusCap, 17, M1CapCommaM2Cap)
sideOverlap(M3Cap, ~M3Cap, PolyCap, 17, M1CapCommaM2Cap)
sideOverlap(M3Cap, ~M3Cap, M1Cap, 20, M2Cap)
sideOverlap(M3Cap, ~M3Cap, M2Cap, 25, )
sidewall M3Cap ~M3Cap ~M3Cap M3Cap 50
/* ------------------------------------------------- */
/* -------------- Fets -----------------------------*/
/* cscab, cscap defined since extresis needs them */
fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450
fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450
/* These values are the equivalent resistance that irsim params for
3.3 V 125C though. Probably we want to make that 5V, 27C !!!! */
fetresis nfet linear 14100 /* resistance dyn L */
fetresis pfet linear 48100 /* resistance dyn H */
fetresis nfet saturation 14100 /* resistance dyn L */
fetresis pfet saturation 48100 /* resistance dyn H */
/* ------------------------------------------------- */
/* -------------- Resistivity (in milliohms per sq) -------*/
/* ---- assumed temp 85 C ----- */
resist NDRes 3800
resist PDRes 3800
resist PolyRes 5000
resist M1Res 81
resist M2Res 81
resist M3Res 34
resist nwell 1980000
contact pc 4 15000
contact ndc,pdc,nsc,psc 4 1500
contact m2c 4 500
contact m3c 4 500
/* ------------------------------------------------- */
/* Order the planes for correct shielding */
planeOrder(implant,0)
planeOrder(well,1)
planeOrder(active,2)
planeOrder(metal1,3)
planeOrder(metal2,4)
planeOrder(metal3,5)
planeOrder(oxide,6)