165 lines
5.1 KiB
Plaintext
165 lines
5.1 KiB
Plaintext
/*
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This is for HP's CMOS26B 1.0 micron CMOS Bulk Process.
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All parameters are defined based on HP's general process
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specifications (GPP). Sidewall fringing was taken from
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Ersatco fictitious process (johnson,jouppi).
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Upwards fringe caps (eg poly-->m1, poly-->m2) are computed
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by the program scaleCap by using the Sakurai/Tamaru formula
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based on the known capacitances.
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*/
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#ifdef extForSpice
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style lambda=0.30
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#else
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style lambda_irsim=0.30
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#endif
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lambda 30
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step 100
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sidehalo 10 /* 4 more than min m3 spacing */
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#ifdef INCLUDE_FET_CAP /* Normally off since neither spice or irsim need it */
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areacap allFet 692 /* af/lambda^2 */
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#endif
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/* ------------ diff capacitances ---------------- */
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areacap nwell 19 /* 208aF/um2*/
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perimc nwell ~(nwell) 60 /* scale the 26b value */
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#ifdef extForSpice
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areacap (ndiff,nsd,ndc,nsc)/a 0
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perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0
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areacap (pdiff,psd,pdc,psc)/a 0
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perimc (pdiff,psd,pdc,psc)/a space,nwell 0
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#else
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/* Real perim values increased a little to
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compensate for not counting CJGATE */
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areacap (ndiff,nsd,ndc,nsc)/a 23
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perimc (ndiff,nsd,ndc,nsc)/a space,pwell 160
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/* field - 320aF/um */
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/* gate - 614aF/um */
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areacap (pdiff,psd,pdc,psc)/a 52
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perimc (pdiff,psd,pdc,psc)/a space,nwell 90
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/* field - 213aF/um */
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/* gate - 332aF/um */
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#endif
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/* ------------------------------------------------------ */
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/* ------------ poly capacitances ---------------- */
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areacap PolyCap 8.2
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overlap PolyCap allWell 8.2
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perimc PolyCap ~PolyCap 12.6
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sideOverlap(PolyCap, ~PolyCap, allWell, 12.6, )
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sideOverlap(PolyCap, ~PolyCap, M1Cap, 5.7, )
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sideOverlap(PolyCap, ~PolyCap, M2Cap, 2.7, M1Cap)
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sideOverlap(PolyCap, ~PolyCap, M3Cap, 1.8, M1CapCommaM2Cap)
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sidewall PolyCap ~PolyCap ~PolyCap PolyCap 7.2
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/* ------------------------------------------------- */
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/* ------------ metal1 capacitances ---------------- */
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areacap M1Cap 3.5
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overlap M1Cap allWell 3.5 PolyCap,PNplusCap
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overlap M1Cap PNplusCap 5.7
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overlap M1Cap PolyCap 5.7
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perimc M1Cap ~M1Cap 15
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sideOverlap(M1Cap, ~M1Cap, allWell, 15, PolyCapCommaPNplusCap)
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sideOverlap(M1Cap, ~M1Cap, PNplusCap, 17.4, )
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sideOverlap(M1Cap, ~M1Cap, PolyCap, 17.4, )
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sideOverlap(M1Cap, ~M1Cap, M2Cap, 8.7, )
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sideOverlap(M1Cap, ~M1Cap, M3Cap, 4.8, M2Cap)
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sidewall M1Cap ~M1Cap ~M1Cap M1Cap 19.2
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/* ------------------------------------------------- */
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/* ------------ metal2 capacitances ---------------- */
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areacap M2Cap 1.3
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overlap M2Cap allWell 1.3 PolyCap,M1Cap,PNplusCap
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overlap M2Cap PNplusCap 1.5 M1Cap
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overlap M2Cap PolyCap 1.5 M1Cap
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overlap M2Cap M1Cap 3.5
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perimc M2Cap ~M2Cap 12.3
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sideOverlap(M2Cap, ~M2Cap, allWell, 12.3, M1CapCommaPolyCapCommaPNplusCap )
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sideOverlap(M2Cap, ~M2Cap, PNplusCap, 12.9, M1Cap)
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sideOverlap(M2Cap, ~M2Cap, PolyCap, 12.9, M1Cap)
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sideOverlap(M2Cap, ~M2Cap, M1Cap, 15, )
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sideOverlap(M2Cap, ~M2Cap, M3Cap, 10.8, )
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sidewall M2Cap ~M2Cap ~M2Cap M2Cap 21.6
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/* ------------------------------------------------- */
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/* ------------ metal3 capacitances ---------------- */
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areacap M3Cap .81
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overlap M3Cap allWell .81 PolyCap,M1Cap,M2Cap,PNplusCap
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overlap M3Cap PNplusCap .88 M1Cap,M2Cap
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overlap M3Cap PolyCap .88 M1Cap,M2Cap
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overlap M3Cap M1Cap 1.3 M2Cap
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overlap M3Cap M2Cap 3.3
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perimc M3Cap ~M3Cap 12.3
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sideOverlap(M3Cap, ~M3Cap, allWell, 12.3, PNplusCapCommaPolyCapCommaM1CapCommaM2Cap)
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sideOverlap(M3Cap, ~M3Cap, PNplusCap, 12.9, M1CapCommaM2Cap)
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sideOverlap(M3Cap, ~M3Cap, PolyCap, 12.9, M1CapCommaM2Cap)
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sideOverlap(M3Cap, ~M3Cap, M1Cap, 15.3, M2Cap)
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sideOverlap(M3Cap, ~M3Cap, M2Cap, 19.2, )
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sidewall M3Cap ~M3Cap ~M3Cap M3Cap 34.3
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/* ------------------------------------------------- */
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/* Unchanged yet for .35um*/
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/* -------------- Fets -----------------------------*/
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/* cscab, cscap defined since extresis needs them */
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/* gate cap is actually 982aF/um^2 or .344fF/um*/
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fet pfet pdiff,pdc 2 pfet Vdd! nwell 218 88
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fet nfet ndiff,ndc 2 nfet Gnd! pwell 267 88
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/* These values are the equivalent resistance that irsim params for
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3.3 V 85C */
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fetresis nfet linear 8500 /* resistance dyn L */
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fetresis pfet linear 24500 /* resistance dyn H */
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fetresis nfet saturation 8500 /* resistance dyn L */
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fetresis pfet saturation 24500 /* resistance dyn H */
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/* ------------------------------------------------- */
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/* -------------- Resistivity (in milliohms per sq) -------*/
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/* ---- assumed temp 85 C ----- */
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resist NDRes 3100
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resist PDRes 2500
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resist PolyRes 7500 /*4400 for W>1.0um*/
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resist M1Res 83
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resist M2Res 84
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resist M3Res 41
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resist nwell 1980000 /*unchanged from 26b*/
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/* Values are for per contact */
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contact pc 4 10000 /*8k-nom 15k-max*/
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contact ndc,pdc,nsc,psc 4 4500
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contact m2c 4 1000
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contact m3c 4 1000
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/* ------------------------------------------------- */
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/* Order the planes for correct shielding */
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planeOrder(implant,0)
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planeOrder(well,1)
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planeOrder(active,2)
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planeOrder(metal1,3)
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planeOrder(metal2,4)
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planeOrder(metal3,5)
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planeOrder(oxide,6)
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