# 1 "scmos.tech.out" # 1 "" # 1 "" # 1 "/usr/include/stdc-predef.h" 1 3 4 # 1 "" 2 # 1 "scmos.tech.out" # 352 "scmos.tech.out" tech format 28 scmos end version version 8.2.8 description "MOSIS Scalable CMOS Technology for HP CMOS26G and CMOS14B processes" # 377 "scmos.tech.out" end planes well,w implant,i active,a metal1,m1 metal2,m2 metal3,m3 oxide,ox end types well pwell,pw well nwell,nw well capwell,cwell,cw well highvoltnwell,hvnwell,hnwell,hnw well highvoltpwell,hvpwell,hpwell,hpw active polysilicon,red,poly,p active electrode,poly2,el,p2 active capacitor,polycap,pcap,cap active wellcapacitor,wellcap,wcap active ndiffusion,ndiff,green active pdiffusion,pdiff,brown active highvoltndiffusion,hvndiff,hndiff active highvoltpdiffusion,hvpdiff,hpdiff metal1 metal1,m1,blue metal2 metal2,m2,purple metal3 metal3,m3,cyan active ntransistor,nfet active ptransistor,pfet active entransistor,enfet active eptransistor,epfet active doublentransistor,nfloating-gate,nfloatg,nfg,nffet active doubleptransistor,pfloating-gate,pfloatg,pfg,pffet active highvoltntransistor,hvnfet,hnfet active highvoltptransistor,hvpfet,hpfet active collector,coll,col,co,cl active emitter,emit,em active pbase,pb implant bccdiffusion,bd active nbccdiffusion,nbd active polycontact,pcontact,polycut,pc active ndcontact,ndiffcut,ndc active pdcontact,pdiffcut,pdc active highvoltndcontact,hndiffcut,hndc active highvoltpdcontact,hpdiffcut,hpdc active capcontact,ccontact,capc,cc active electrodecontact,econtact,ec,poly2contact,p2c active collectorcontact,colcontact,colc,coc,clc active emittercontact,emitcontact,emc active pbasecontact,pbcontact,pbc active nbccdiffcontact,nbdc metal1 m2contact,m2cut,m2c,via,v metal2 m3contact,m3cut,m3c,via2,v2 active psubstratepcontact,ppcontact,ppc,pwcontact,pwc,psc active nsubstratencontact,nncontact,nnc,nwcontact,nwc,nsc active psubstratepdiff,ppdiff,pohmic,ppd,psd active nsubstratendiff,nndiff,nohmic,nnd,nsd active highvoltpsubcontact,hpwcontact,hpsc active highvoltnsubcontact,hnwcontact,hnsc active highvoltpsubdiff,hpohmic,hpsd active highvoltnsubdiff,hnohmic,hnsd active nplusdoping,ndoping,ndop active pplusdoping,pdoping,pdop metal1 genericcontact,gcontact,gc oxide substrateopen,subopen,open oxide pdiffusionstop,pdiffstop,pstop metal2 pad oxide glass end contact ec poly2 metal1 cc cap metal1 pc poly metal1 ndc ndiff metal1 pdc pdiff metal1 nsc nsd metal1 psc psd metal1 hndc hndiff metal1 hpdc hpdiff metal1 hnsc hnsd metal1 hpsc hpsd metal1 clc col metal1 emc emit metal1 pbc pbase metal1 nbdc nbd metal1 m2c metal1 metal2 m3c metal2 metal3 end styles styletype mos cwell 10 nwell 12 pwell 13 hnwell 18 hpwell 11 poly 1 poly2 14 ndiff 2 pdiff 4 psd 5 nsd 3 hndiff 2 hndiff 11 hpdiff 4 hpdiff 18 hpsd 5 hpsd 11 hnsd 3 hnsd 18 ndop 2 ndop 38 pdop 4 pdop 38 nfet 6 nfet 7 pfet 8 pfet 9 enfet 6 enfet 30 epfet 8 epfet 31 nffet 6 nffet 7 nffet 30 pffet 8 pffet 9 pffet 31 hnfet 6 hnfet 7 hnfet 30 hpfet 8 hpfet 9 hpfet 31 pbase 15 pbc 15 pbc 20 pbc 32 emit 16 emc 16 emc 20 emc 32 col 3 clc 3 clc 20 clc 32 cap 1 cap 14 wcap 6 wcap 10 cc 1 cc 14 cc 20 cc 32 metal1 20 metal2 21 metal3 22 gc 19 pcontact 26 pcontact 32 ec 14 ec 20 ec 32 ndc 2 ndc 20 ndc 32 pdc 4 pdc 20 pdc 32 psc 5 psc 20 psc 32 nsc 3 nsc 20 nsc 32 hndc 2 hndc 20 hndc 32 hndc 11 hpdc 4 hpdc 20 hpdc 32 hpdc 18 hpsc 5 hpsc 20 hpsc 32 hpsc 11 hnsc 3 hnsc 20 hnsc 32 hnsc 18 m2contact 20 m2contact 21 m2contact 33 m3contact 21 m3contact 22 m3contact 37 pad 20 pad 21 pad 33 pad 34 glass 34 bd 17 nbd 17 nbd 3 nbdc 3 nbdc 17 nbdc 20 nbdc 32 open 2 open 20 pstop 8 error_p 42 error_s 42 error_ps 42 end compose compose nfet poly hndiff compose pfet poly hpdiff compose nfet poly ndiff compose pfet poly pdiff compose hnfet poly2 hndiff compose hpfet poly2 hpdiff compose enfet poly2 ndiff compose epfet poly2 pdiff compose nffet nfet poly2 compose pffet pfet poly2 compose nffet enfet poly compose pffet epfet poly compose cap poly poly2 paint clc col clc paint emc emit emc paint emc pbase emc paint poly2 poly cap paint poly poly2 cap paint poly cap cap paint poly2 cap cap paint cap poly cap paint cap poly2 cap paint ec poly cc paint pdc pwell ndc paint pfet pwell nfet paint epfet pwell enfet paint pffet pwell nffet paint pdiff pwell ndiff paint nsd pwell psd paint nsc pwell psc paint ndc nwell pdc paint nfet nwell pfet paint enfet nwell epfet paint nffet nwell pffet paint ndiff nwell pdiff paint psd nwell nsd paint psc nwell nsc paint pdc hpwell hndc paint epfet hpwell hnfet paint pffet hpwell hnfet paint pdiff hpwell hndiff paint nsd hpwell hpsd paint nsc hpwell hpsc paint ndc hnwell hpdc paint enfet hnwell hpfet paint nffet hnwell hpfet paint ndiff hnwell hpdiff paint psd hnwell hnsd paint psc hnwell hnsc # 740 "scmos.tech.out" paint nfet cwell wcap paint poly wcap wcap paint ndiff wcap wcap paint wcap poly wcap paint wcap ndiff wcap erase wcap poly ndiff erase wcap ndiff poly erase wcap cwell nfet paint cwell nfet wcap active erase wcap nfet cwell well paint gc m1 gc paint pad m1 pad paint pad m2 pad paint pad m3 pad paint pad m2c pad paint hpdc hpwell hndc paint hpfet hpwell hnfet paint hpdiff hpwell hndiff paint hnsd hpwell hpsd paint hnsc hpwell hpsc paint hndc hnwell hpdc paint hnfet hnwell hpfet paint hndiff hnwell hpdiff paint hpsd hnwell hnsd paint hpsc hnwell hnsc paint hpdc pwell ndc paint hpfet pwell enfet paint hpdiff pwell ndiff paint hnsd pwell psd paint hnsc pwell psc paint hndc nwell pdc paint hnfet nwell epfet paint hndiff nwell pdiff paint hpsd nwell nsd paint hpsc nwell nsc end connect nwell,nsc,nsd nwell,nsc,nsd pwell,psc,psd pwell,psc,psd hnwell,hnsc,hnsd hnwell,hnsc,hnsd hpwell,hpsc,hpsd hpwell,hpsc,hpsd ndiff,ndc/a cwell pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc m2,m2c/m2,m3c/m2,pad m2,m2c/m2,m3c/m2,pad m3,m3c/m3 m3,m3c/m3 poly,pc/a,nfet,pfet,wcap poly,pc/a,nfet,pfet,wcap poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet ndiff,ndc/a,ndop psd,psc/a,pdop,pstop pdiff,pdc/a,pdop,pstop nsd,nsc/a,ndop hndiff,hndc/a,ndop hpsd,hpsc/a,pdop,pstop hpdiff,hpdc/a,pdop,pstop hnsd,hnsc/a,ndop ndiff ndc pdiff pdc hndiff hndc hpdiff hpdc nbd nbdc pbase pbc collector clc,nwell emitter emc gc ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a,nsd,nsc/a,psd,psc/a,hndiff,hndc/a,hpdiff,hpdc/a,metal1 gc poly,pc/a,nfet,pfet,wcap gc poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet pad pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc pad m2,m2c/m2,m3c/m2,pad pad m3,m3c/m3 end # 845 "scmos.tech.out" cifoutput # 860 "scmos.tech.out" # 1 "cif_template/objs/SUBCIFout" 1 style lambda=0.40(sub) scalefactor 40 5 layer CWN nwell bloat-or pdiff,pdc/a,pfet,epfet,pffet * 240 bloat-or nsd,nsc/a * 120 grow 120 shrink 120 calma 42 1 layer CWP pwell bloat-or ndiff,ndc/a,nfet,enfet,nffet * 240 pdop 0 bloat-or psd,psc/a * 120 ndop 0 grow 120 shrink 120 calma 41 1 layer CMT m3,m3c/m3,pad labels m3 calma 62 1 layer CMS pad grow 80 or m2,m2c/m2,m3c/m2,pad labels m2 calma 51 1 layer CMF pad grow 160 or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc calma 49 1 layer CPG cap,cc or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet labels poly,nfet,pfet calma 46 1 layer CAA ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a or ndop,pdop or open,pstop labels ndiff,pdiff calma 43 1 layer CVS pad shrink 200 or open calma 61 1 layer CVS m3c squares 40 80 120 calma 61 1 layer CVA pad shrink 300 or open calma 50 1 layer CVA m2c squares 40 80 120 calma 50 1 layer CCC gc calma 48 1 layer CCA pad shrink 400 calma 48 1 layer CCA ndc,pdc squares 40 80 120 or open calma 48 1 layer CCA nsc,psc squares 40 80 120 calma 48 1 layer CCP pc squares 40 80 120 calma 47 1 templayer XTN bloat-or ndiff,ndc/a,ndop * 80 psd,psc/a,pdiff,pdc/a,pdop 0 bloat-or nbd,nbdc * 80 grow 40 shrink 40 shrink 20 grow 20 templayer XTP bloat-or pdiff,pdc/a,pdop * 80 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 40 shrink 40 shrink 20 grow 20 layer CSN bloat-or ndiff,ndc/a * 80 psd,psc/a,pdop 0 bloat-or nfet,enfet,nffet * 80 ndiff 120 psd,psc/a 0 bloat-or nsd,nsc/a * 80 pdiff,pdc/a,pdop 0 bloat-or ndop * 80 psd,psc/a,pdiff,pdc/a,pdop 0 grow 40 shrink 40 shrink 20 grow 20 and-not XTP calma 45 1 layer CSP bloat-or pdiff,pdc/a * 80 nsd,nsc/a,ndop 0 bloat-or pfet,epfet,pffet * 80 pdiff 120 nsd,nsc/a 0 bloat-or psd,psc/a * 80 ndiff,ndc/a,ndop 0 bloat-or pdop * 80 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 40 shrink 40 shrink 20 grow 20 bloat-min pstop * 80 open 0 and-not XTN and-not CSN calma 44 1 layer COP open calma 23 1 layer CPS pstop calma 24 1 layer COG pad shrink 600 or glass or open labels pad calma 52 1 layer XP pad shrink 600 calma 26 1 style lambda=0.30(sub) scalefactor 30 15 layer CWN nwell bloat-or pdiff,pdc/a,pfet,epfet,pffet * 180 bloat-or nsd,nsc/a * 90 grow 90 shrink 90 calma 42 1 layer CWP pwell bloat-or ndiff,ndc/a,nfet,enfet,nffet * 180 pdop 0 bloat-or psd,psc/a * 90 ndop 0 grow 90 shrink 90 calma 41 1 layer CMT m3,m3c/m3,pad labels m3 calma 62 1 layer CMS pad grow 60 or m2,m2c/m2,m3c/m2,pad labels m2 calma 51 1 layer CMF pad grow 120 or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc calma 49 1 layer CPG cap,cc or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet labels poly,nfet,pfet calma 46 1 layer CAA ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a or ndop,pdop or open,pstop labels ndiff,pdiff calma 43 1 layer CVS pad shrink 210 or open calma 61 1 layer CVS m3c squares 30 60 90 calma 61 1 layer CVA pad shrink 300 or open calma 50 1 layer CVA m2c squares 30 60 90 calma 50 1 layer CCC gc calma 48 1 layer CCA ndc,pdc squares 30 60 90 or open calma 48 1 layer CCA nsc,psc squares 30 60 90 calma 48 1 layer CCP pc squares 30 60 90 calma 47 1 templayer XTN bloat-or ndiff,ndc/a,ndop * 60 psd,psc/a,pdiff,pdc/a,pdop 0 bloat-or nbd,nbdc * 60 grow 30 shrink 30 shrink 15 grow 15 templayer XTP bloat-or pdiff,pdc/a,pdop * 60 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 30 shrink 30 shrink 15 grow 15 layer CSN bloat-or ndiff,ndc/a * 60 psd,psc/a,pdop 0 bloat-or nfet,enfet,nffet * 60 ndiff 90 psd,psc/a 0 bloat-or nsd,nsc/a * 60 pdiff,pdc/a,pdop 0 bloat-or ndop * 60 psd,psc/a,pdiff,pdc/a,pdop 0 grow 30 shrink 30 shrink 15 grow 15 and-not XTP calma 45 1 layer CSP bloat-or pdiff,pdc/a * 60 nsd,nsc/a,ndop 0 bloat-or pfet,epfet,pffet * 60 pdiff 90 nsd,nsc/a 0 bloat-or psd,psc/a * 60 ndiff,ndc/a,ndop 0 bloat-or pdop * 60 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 30 shrink 30 shrink 15 grow 15 bloat-min pstop * 60 open 0 and-not XTN and-not CSN calma 44 1 layer COP open calma 23 1 layer CPS pstop calma 24 1 layer COG pad shrink 600 or glass or open labels pad calma 52 1 layer XP pad shrink 600 calma 26 1 style lambda=0.40(soi) scalefactor 40 5 layer CWN nwell bloat-or pdiff,pdc/a,pfet,epfet,pffet * 240 bloat-or nsd,nsc/a * 120 grow 120 shrink 120 calma 42 1 layer CWP pwell bloat-or ndiff,ndc/a,nfet,enfet,nffet * 240 pdop 0 bloat-or psd,psc/a * 120 ndop 0 grow 120 shrink 120 calma 41 1 layer CMT m3,m3c/m3,pad labels m3 calma 62 1 layer CMS pad grow 80 or m2,m2c/m2,m3c/m2,pad labels m2 calma 51 1 layer CMF pad grow 160 or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc calma 49 1 layer CPG cap,cc or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet labels poly,nfet,pfet calma 46 1 layer CAA ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a or ndop,pdop or open,pstop labels ndiff,pdiff calma 43 1 layer CVS pad shrink 120 squares 120 or open calma 61 1 layer CVS m3c squares 40 80 120 calma 61 1 layer CVA pad squares 120 or open calma 50 1 layer CVA m2c squares 40 80 120 calma 50 1 layer CCC gc calma 48 1 layer CCA ndc,pdc squares 40 80 120 or open calma 48 1 layer CCA nsc,psc squares 40 80 120 calma 48 1 layer CCP pc squares 40 80 120 calma 47 1 templayer XTN bloat-or ndiff,ndc/a,ndop * 80 psd,psc/a,pdiff,pdc/a,pdop 0 bloat-or nbd,nbdc * 80 grow 40 shrink 40 shrink 20 grow 20 templayer XTP bloat-or pdiff,pdc/a,pdop * 80 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 40 shrink 40 shrink 20 grow 20 layer CSN bloat-or ndiff,ndc/a * 80 psd,psc/a,pdop 0 bloat-or nfet,enfet,nffet * 80 ndiff 120 psd,psc/a 0 bloat-or nsd,nsc/a * 80 pdiff,pdc/a,pdop 0 bloat-or ndop * 80 psd,psc/a,pdiff,pdc/a,pdop 0 grow 40 shrink 40 shrink 20 grow 20 and-not XTP calma 45 1 layer CSP bloat-or pdiff,pdc/a * 80 nsd,nsc/a,ndop 0 bloat-or pfet,epfet,pffet * 80 pdiff 120 nsd,nsc/a 0 bloat-or psd,psc/a * 80 ndiff,ndc/a,ndop 0 bloat-or pdop * 80 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 40 shrink 40 shrink 20 grow 20 bloat-min pstop * 80 open 0 and-not XTN and-not CSN calma 44 1 layer COP open calma 23 1 layer CPS pstop calma 24 1 layer COG pad shrink 600 or glass or open labels pad calma 52 1 layer XP pad shrink 600 calma 26 1 style lambda=0.40(cmosx) scalefactor 40 5 layer CWN nwell bloat-or pdiff,pdc/a,pfet,epfet,pffet * 240 bloat-or nsd,nsc/a * 120 grow 120 shrink 120 calma 1 1 layer CWP pwell bloat-or ndiff,ndc/a,nfet,enfet,nffet * 240 pdop 0 bloat-or psd,psc/a * 120 ndop 0 grow 120 shrink 120 calma 2 1 layer CMT m3,m3c/m3,pad labels m3 calma 15 1 layer CMS pad grow 80 or m2,m2c/m2,m3c/m2,pad labels m2 calma 12 1 layer CMF pad grow 160 or pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc labels pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,m1,m2c,gc calma 10 1 layer CPG cap,cc or poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet labels poly,nfet,pfet calma 4 1 layer CAA ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a or ndop,pdop or open,pstop labels ndiff,pdiff calma 3 1 layer CVS pad shrink 200 or open calma 14 1 layer CVS m3c squares 40 80 120 calma 14 1 layer CVA pad shrink 300 or open calma 11 1 layer CVA m2c squares 40 80 120 calma 11 1 layer CCC gc calma 9 1 layer CCA ndc,pdc squares 40 80 120 or open calma 9 1 layer CCA nsc,psc squares 40 80 120 calma 9 1 layer CCP pc squares 40 80 120 calma 9 1 templayer XTN bloat-or ndiff,ndc/a,ndop * 80 psd,psc/a,pdiff,pdc/a,pdop 0 bloat-or nbd,nbdc * 80 grow 40 shrink 40 shrink 20 grow 20 templayer XTP bloat-or pdiff,pdc/a,pdop * 80 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 40 shrink 40 shrink 20 grow 20 layer CSN bloat-or ndiff,ndc/a * 80 psd,psc/a,pdop 0 bloat-or nfet,enfet,nffet * 80 ndiff 120 psd,psc/a 0 bloat-or nsd,nsc/a * 80 pdiff,pdc/a,pdop 0 bloat-or ndop * 80 psd,psc/a,pdiff,pdc/a,pdop 0 grow 40 shrink 40 shrink 20 grow 20 and-not XTP calma 7 1 layer CSP bloat-or pdiff,pdc/a * 80 nsd,nsc/a,ndop 0 bloat-or pfet,epfet,pffet * 80 pdiff 120 nsd,nsc/a 0 bloat-or psd,psc/a * 80 ndiff,ndc/a,ndop 0 bloat-or pdop * 80 nsd,nsc/a,ndiff,ndc/a,ndop 0 grow 40 shrink 40 shrink 20 grow 20 bloat-min pstop * 80 open 0 and-not XTN and-not CSN calma 8 1 layer COG pad shrink 600 or glass or open labels pad calma 16 1 # 861 "scmos.tech.out" 2 style plot scalefactor 100 50 layer CM2 m2,m2c/m2,pad/m2 labels m2 layer CM1 pad grow 100 or m1,m2c/m1,pc/m1,ndc/m1,pdc/m1,ppcont/m1,nncont/m1 labels m1,m2c/m1,pc/m1,ndc/m1,pdc/m1,ppcont/m1,nncont/m1,pad/m1 layer CP poly,pc/active,nfet,pfet labels poly,nfet,pfet layer CND ndiff,ndc,nfet,pwc,psd labels ndiff layer CPD pdiff,pdc,pfet,nwc,nsd labels pdiff layer CNP bloat-or nsd,nwc * 150 ndiff,pdiff,ndc/active,pdc/active,ppcont/active,nncont/active,pfet,nfet,psd,nsd 0 layer CPP bloat-or psd,pwc * 150 ndiff,pdiff,ndc/active,pdc/active,ppcont/active,nncont/active,pfet,nfet,psd,nsd 0 layer CV m2c squares 100 200 300 layer CC ndc,pdc,pc,pwc,nwc squares 200 layer CNW nwell grow 400 shrink 400 layer CG pad shrink 600 or glass labels glass end # 910 "scmos.tech.out" cifinput # 921 "scmos.tech.out" # 1 "cif_template/objs/SUBCIFin" 1 style lambda=0.40(sub) scalefactor 40 layer nwell CWN labels CWN layer pwell CWP labels CWP layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer ndop CSN and-not CWP and CAA layer pdop CSP and CAA and-not CWP and-not CPS layer pdiff CSP and CWN and CAA layer ndiff CSN and CWP and CAA layer nsd CWN and CSN and CAA layer psd CSP and CWP and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN labels CPG layer pfet CAA and CPG and CSP labels CPG layer ndc CCA grow 40 and CAA and CWP and CSN and CMF layer pdc CCA grow 40 and CAA and CWN and CSP and CMF layer nsc CCA grow 40 and CAA and CSN and CWN and CMF layer psc CCA grow 40 and CAA and CSP and CWP and CMF layer pbc CCA grow 40 and CBA and CMF labels CBA layer m3c CVS grow 40 and CMT and CMS and-not XP layer m2c CVA grow 40 and CMS and CMF layer pc CCP grow 40 and CPG and CMF layer gc CCC layer glass COG labels COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP and-not CWN layer pad COG grow 600 and XP calma COP 23 * calma CPS 24 * calma CWP 41 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CVS 61 * calma CMT 62 * calma CCC 63 * style lambda=0.40(nowell) scalefactor 40 layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer ndop CSN and-not CWP and CAA layer pdop CSP and CAA and-not CWP and-not CPS layer pdiff CSP and CWN and CAA layer ndiff CSN and CWP and CAA layer nsd CWN and CSN and CAA layer psd CSP and CWP and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN labels CPG layer pfet CAA and CPG and CSP labels CPG layer ndc CCA grow 40 and CAA and CWP and CSN and CMF layer pdc CCA grow 40 and CAA and CWN and CSP and CMF layer nsc CCA grow 40 and CAA and CSN and CWN and CMF layer psc CCA grow 40 and CAA and CSP and CWP and CMF layer pbc CCA grow 40 and CBA and CMF labels CBA layer m3c CVS grow 40 and CMT and CMS and-not XP layer m2c CVA grow 40 and CMS and CMF layer pc CCP grow 40 and CPG and CMF layer gc CCC layer glass COG labels COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP and-not CWN layer pad COG grow 600 and XP calma COP 23 * calma CPS 24 * calma CWP 41 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CVS 61 * calma CMT 62 * calma CCC 63 * style lambda=0.40(nwell) scalefactor 40 layer nwell CWN labels CWN layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer psd CAA and CSP and-not CPS layer pdiff CWN and CAA and CSP labels CSP layer ndiff CAA and CSN and-not CCD labels CSN layer nsd CWN and CSN and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN and-not CCD layer pfet CAA and CPG and CSP and CWN layer enfet CEL and CAA and CSN and-not CCD layer epfet CAA and CEL and CSP and CWN layer nffet CAA and CEL and CPG and CSN layer pffet CAA and CEL and CPG and CSP and CWN layer m3c CVS grow 40 and CMT and CMS and-not XP layer m2c CVA grow 40 and CMS and CMF layer electrode CEL labels CEL layer ec CCE or CCC grow 40 and CMF and CEL layer cc CCE grow 40 and CMF and CEL and CPG labels CCE layer cap CPG and CEL and-not CAA layer psc CCA grow 40 and CAA and CSP and CMF layer ndc CCA or CCC grow 40 and CAA and CSN and CMF layer pdc CCA or CCC grow 40 and CAA and CWN and CSP and CMF layer nsc CCA or CCC grow 40 and CAA and CSN and CWN and CMF layer pbc CCA or CCC grow 40 and CBA and CMF layer emit CBA and CSN shrink 80 layer emc CCA grow 40 and CBA and CSN and CMF layer col CX and CAA and CSN and CWN layer clc CCA grow 40 and CX and CAA and CSN and CWN and CMF layer pc CCP or CCC grow 40 and CPG and CMF labels CCP layer nbd CSN shrink 80 and CCD and CAA and-not CPG layer nbdc CCA grow 40 and CCD and CSN and CAA layer bd CPG or CEL and CCD and CAA labels CCD layer cwell CWC labels CWC layer glass COG labels COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWN layer pad CMF shrink 40 and CMS shrink 200 and CVA shrink 40 and XP and COG grow 240 calma COP 23 * calma CPS 24 * calma XP 26 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CCE 55 * calma CEL 56 * calma CCD 57 * calma CBA 58 * calma CWC 59 * calma CVS 61 * calma CMT 62 * calma CX 63 * style lambda=0.30(sub) scalefactor 30 layer nwell CWN labels CWN layer pwell CWP labels CWP layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer ndop CSN and-not CWP and CAA layer pdop CSP and CAA and-not CWP and-not CPS layer pdiff CSP and CWN and CAA layer ndiff CSN and CWP and CAA layer nsd CWN and CSN and CAA layer psd CSP and CWP and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN labels CPG layer pfet CAA and CPG and CSP labels CPG layer ndc CCA grow 30 and CAA and CWP and CSN and CMF layer pdc CCA grow 30 and CAA and CWN and CSP and CMF layer nsc CCA grow 30 and CAA and CSN and CWN and CMF layer psc CCA grow 30 and CAA and CSP and CWP and CMF layer pbc CCA grow 30 and CBA and CMF labels CBA layer m3c CVS grow 30 and CMT and CMS and-not XP layer m2c CVA grow 30 and CMS and CMF layer pc CCP grow 30 and CPG and CMF layer gc CCC layer glass COG labels COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP and-not CWN layer pad COG grow 600 and XP calma COP 23 * calma CPS 24 * calma CCC 25 * calma XP 26 * calma CWP 41 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CVS 61 * calma CMT 62 * style lambda=0.30(nowell) scalefactor 30 layer m3 CMT and-not XP labels CMT layer m2 CMS labels CMS layer m1 CMF labels CMF layer poly CPG labels CPG layer ndop CSN and-not CWP and CAA layer pdop CSP and CAA and-not CWP and-not CPS layer pdiff CSP and CWN and CAA layer ndiff CSN and CWP and CAA layer nsd CWN and CSN and CAA layer psd CSP and CWP and CAA layer pbase CBA labels CBA layer nfet CPG and CAA and CSN labels CPG layer pfet CAA and CPG and CSP labels CPG layer ndc CCA grow 30 and CAA and CWP and CSN and CMF layer pdc CCA grow 30 and CAA and CWN and CSP and CMF layer nsc CCA grow 30 and CAA and CSN and CWN and CMF layer psc CCA grow 30 and CAA and CSP and CWP and CMF layer pbc CCA grow 30 and CBA and CMF labels CBA layer m3c CVS grow 30 and CMT and CMS and-not XP layer m2c CVA grow 30 and CMS and CMF layer pc CCP grow 30 and CPG and CMF layer gc CCC layer glass COG labels COG layer open CAA and CCA and CVA and COG and COP layer pstop CAA and CPS and CSP and-not CWP and-not CWN layer pad COG grow 600 and XP calma COP 23 * calma CPS 24 * calma CCC 25 * calma XP 26 * calma CWP 41 * calma CWN 42 * calma CAA 43 * calma CSP 44 * calma CSN 45 * calma CPG 46 * calma CCP 47 * calma CCA 48 * calma CMF 49 * calma CVA 50 * calma CMS 51 * calma COG 52 * calma CVS 61 * calma CMT 62 * # 922 "scmos.tech.out" 2 end mzrouter style irouter layer m2 32 64 256 1 layer m1 64 32 256 1 layer poly 128 128 512 1 contact m2contact metal1 metal2 1024 contact pcontact metal1 poly 2056 notactive poly pcontact style garouter layer m2 32 64 256 1 layer m1 64 32 256 1 contact m2contact metal1 metal2 1024 end drc # 955 "scmos.tech.out" edge4way (~nwell)/w nwell 12 nwell nwell 12\ "N-Well width must be at least 12 (MOSIS rule #1.1)" edge4way (~pwell)/w pwell 12 pwell pwell 12\ "P-Well width must be at least 12 (MOSIS rule #1.1)" # 975 "scmos.tech.out" edge4way nwell ~(nwell)/w 18 (~nwell)/w (~nwell)/w 18\ "N-Well spacing must be at least 18 (MOSIS rule #1.2)" edge4way pwell (~pwell)/w 18 (~pwell)/w (~pwell)/w 18\ "P-Well spacing must be at least 18 (MOSIS rule #1.2)" # 1018 "scmos.tech.out" width ndiff,ndc/a,nfet,enfet,nffet,wcap 3 \ "N-type Diffusion width must be at least 3 (MOSIS rule #2.1a)" width pdiff,pdc/a,pfet,epfet,pffet 3 \ "P-type Diffusion width must be at least 3 (MOSIS rule #2.1b)" width nsd,nsc/a,psd,psc/a 3 \ "Ohmic diffusion width must be at least 3 (MOSIS rule #2.1c)" spacing ndiff,ndc/a,nfet,enfet,nffet,wcap ndiff,ndc/a,nfet,enfet,nffet,wcap 3 touching_ok \ "Diffusion spacing must be at least 3 (MOSIS rule #2.2)" spacing pdiff,pdc/a,pfet,epfet,pffet pdiff,pdc/a,pfet,epfet,pffet 3 touching_ok \ "Diffusion spacing must be at least 3 (MOSIS rule #2.2)" spacing nsd,nsc/a nsd,nsc/a 3 touching_ok \ "Diffusion spacing must be at least 3 (MOSIS rule #2.2)" spacing psd,psc/a psd,psc/a 3 touching_ok \ "Diffusion spacing must be at least 3 (MOSIS rule #2.2)" spacing ndiff,ndc/a pdiff,pdc/a 12 touching_illegal \ "P-type diffusion must be 12 away from N-type diffusion (MOSIS rule #2.3b)" spacing ndiff,ndc/a nsd,nsc/a 9 touching_illegal \ "N-type diffusion must be 9 away from N-substrate contact (MOSIS rule #2.3b,4b)" spacing pdiff,pdc/a psd,psc/a 9 touching_illegal \ "P-type diffusion must be 9 away from P-substrate contact (MOSIS rule #2.3b,4b)" # 1058 "scmos.tech.out" spacing nsd,nsc/a psd,psc/a 6 touching_illegal \ "Opposite well contacts must be separated by 6 (MOSIS rule #2.4)" spacing ndiff,ndc/a,nfet,enfet,nffet,wcap nwell 6 touching_illegal \ "N-diffusion and N-well must be separated by 6 (MOSIS rule #2.3b)" spacing pdiff,pdc/a,pfet,epfet,pffet pwell 6 touching_illegal \ "P-diffusion and P-well must be separated by 6 (MOSIS rule #2.3b)" # 1075 "scmos.tech.out" spacing nsd,nsc/a pwell 3 touching_illegal \ "N-substrate diffusion and P-well must be separated by 3 (MOSIS rule #2.4)" spacing psd,psc/a nwell 3 touching_illegal \ "P-substrate diffusion and N-well must be separated by 3 (MOSIS rule #2.4)" spacing ndiff,ndc/a,nfet,enfet,nffet,wcap psd,psc/a 4 touching_ok \ "Opposite diffusion spacing must be at least 4 (MOSIS extension rule)" spacing pdiff,pdc/a,pfet,epfet,pffet nsd,nsc/a 4 touching_ok \ "Opposite diffusion spacing must be at least 4 (MOSIS extension rule)" width poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 2 \ "Polysilicon width must be at least 2 (MOSIS rule #3.1)" spacing poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 3 touching_ok \ "Polysilicon spacing must be at least 3 (MOSIS rule #3.2b)" edge4way nfet,pfet poly,pc/act 2 poly,pc/act 0 0 \ "Poly must overhang transistor by at least 2 (MOSIS rule #3.3)" edge4way nfet,enfet ndiff,ndc/a 3 ndiff,ndc/a,nfet,enfet,nffet,wcap ndiff,ndc/a 3 \ "Diffusion must overhang transistor by at least 3 (MOSIS rule #3.4)" edge4way pfet,epfet pdiff,pdc/a 3 pdiff,pdc/a,pfet,epfet,pffet ndiff,ndc/a 3 \ "Diffusion must overhang transistor by at least 3 (MOSIS rule #3.4)" edge4way nfet,pfet space 1 poly 0 0 \ "Transistor overhang is missing (MOSIS rule #3.3,4)" edge4way enfet,epfet space 1 poly2 0 0 \ "Transistor overhang is missing (MOSIS rule #3.3,4)" edge4way nffet,pffet space 1 poly 0 0 \ "Transistor overhang is missing (MOSIS rule #3.3,4)" edge4way nffet,pffet space 1 poly2 0 0 \ "Transistor overhang is missing (MOSIS rule #3.3,4)" edge4way ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a poly,pc 1 space/a 0 1 \ "Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)" edge4way poly,pc ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a 1 space/a 0 1 \ "Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)" edge poly,pc space/a 1 space/a space/a 1 \ "Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)" edge nsd,nsc/a,psd,psc/a,ndiff,ndc/a,pdiff,pdc/a space/a 1 space/a space/a 1 \ "Poly and diffusion must be separated by at least 1 (MOSIS rule #3.5)" # 1157 "scmos.tech.out" spacing pfet,epfet,pffet nsd,nsc/a 3 touching_illegal \ "Transistors must be separated from substrate contacts by 3 (MOSIS rule #4.1.a)" spacing nfet,enfet,nffet psd,psc/a 3 touching_illegal \ "Transistors must be separated from substrate contacts by 3 (MOSIS rule #4.1.b)" edge4way psd,psc/a space/act 3 ~(nfet,enfet,nffet)/act psd,psc/a,ndiff,ndc/a 3 \ "Transistors must be separated from selects(generated by well cont) by 3 (MOSIS rule #4.1.c)" edge4way nsd,nsc/a space/act 3 ~(pfet,epfet,pffet)/act nsd,nsc/a,pdiff,pdc/a 3 \ "Transistors must be separated from selects(generated by well cont) by 3 (MOSIS rule #4.1.d)" edge4way psd,psc/a ~(ndiff,ndc,psc,psd)/act 4 ~(nfet,enfet)/act ~(ndiff,ndc,psc,psd)/act 4 \ "Transistors must be separated from selects(generated by well cont) by 4 (MOSIS rule #4.1.e)" edge4way nsd,nsc/a ~(pdiff,pdc,nsc,nsd)/act 4 ~(pfet,epfet)/act ~(pdiff,pdc,nsc,nsd)/act 4 \ "Transistors must be separated from selects(generated by well cont) by 4 (MOSIS rule #4.1.f)" edge4way ~(pdiff,pdc/a,pfet,epfet,pffet)/act pdiff,pdc,pfet 4 ~(nsd,nsc/a)/act pdiff,pdc/a,pfet,epfet,pffet 2 \ "Backedge of diffusion must be 4 from substrate diff (MOSIS rule #4.2.a)" edge4way ~(ndiff,ndc/a,nfet,enfet,nffet,wcap)/act ndiff,ndc,nfet 4 ~(psd,psc/a)/act ndiff,ndc/a,nfet,enfet,nffet,wcap 2 \ "Backedge of diffusion must be 4 from substrate diff (MOSIS rule #4.2.b)" # 1191 "scmos.tech.out" width pc 4 \ "Poly contact width must be at least 4 (MOSIS rule #5B.1,2,3)" edge4way poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/act 3 ~pc/act ~(poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet)/act 3 \ "Poly contact must be at least 3 from other poly (MOSIS rule #5B.4,5)" spacing pc ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a 1 touching_illegal \ "Poly contact must be 1 unit from diffusion (MOSIS rule #5B.6)" # 1217 "scmos.tech.out" width ndc,pdc 4 \ "Diffusion contact width must be at least 4 (MOSIS rule #6B.1,2,3)" width nsc,psc 4 \ "Substrate contact width must be at least 4 (MOSIS rule #6B.1,2,3)" spacing nsc pdc 1 touching_illegal \ "Substrate contact must be 1 unit from diffusion contact (MOSIS rule #6B.2b)" spacing psc ndc 1 touching_illegal \ "Substrate contact must be 1 unit from diffusion contact (MOSIS rule #6B.2b)" # 1241 "scmos.tech.out" edge4way ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/act 4 ~(ndc,pdc,nsc,psc)/act \ ~(ndiff,ndc/a,nfet,enfet,nffet,wcap,pdiff,pdc/a,pfet,epfet,pffet,nsd,nsc/a,psd,psc/a)/act 4 \ "Diffusion contacts must be 4 from other diffusions (MOSIS rule #6B.4,5)" spacing pdc,ndc,psc,nsc nfet,enfet,nffet,pfet,epfet,pffet 1 touching_illegal \ "Diffusion contacts cannot touch transistors (MOSIS rule #6B.6)" spacing pdc,ndc,psc,nsc poly 1 touching_illegal \ "Diffusion contact to field poly must be at least 1 (MOSIS rule #6B.7)" spacing pdc,ndc,psc,nsc pc/act 2 touching_illegal \ "Poly contacts must be 2 away from diffusion contacts (MOSIS rule #6B.9)" # 1266 "scmos.tech.out" edge4way m3c/m3 ~m3c/m3 1 ~m3c/m3 (~m3c,m3c)/m3 1 \ "Metal3 contacts must be rectangular (Magic rules)" edge4way m2c/m2 ~m2c/m2 1 ~m2c/m2 (~m2c,m2c)/m2 1 \ "Metal2 contacts must be rectangular (Magic rules)" edge4way ndc/m1 ~ndc/m1 1 ~ndc/m1 (~ndc,ndc)/m1 1 \ "N-diffusion contacts must be rectangular (Magic rules)" edge4way pdc/m1 ~pdc/m1 1 ~pdc/m1 (~pdc,pdc)/m1 1 \ "P-diffusion contacts must be rectangular (Magic rules)" edge4way psc/m1 ~psc/m1 1 ~psc/m1 (~psc,psc)/m1 1 \ "P-substrate contacts must be rectangular (Magic rules)" edge4way nsc/m1 ~nsc/m1 1 ~nsc/m1 (~nsc,nsc)/m1 1 \ "N-substrate contacts must be rectangular (Magic rules)" edge4way pc/m1 ~pc/m1 1 ~pc/m1 (~pc,pc)/m1 1 \ "Polysilicon contacts must be rectangular (Magic rules)" edge4way ec/m1 ~ec/m1 1 ~ec/m1 (~ec,ec)/m1 1 \ "Electrode contacts must be rectangular (Magic rules)" edge4way cc/m1 ~cc/m1 1 ~cc/m1 (~cc,cc)/m1 1 \ "Capacitor contacts must be rectangular (Magic rules)" edge4way emc/m1 ~emc/m1 1 ~emc/m1 (~emc,emc)/m1 1 \ "Emitter contacts must be rectangular (Magic rules)" edge4way clc/m1 ~clc/m1 1 ~clc/m1 (~clc,clc)/m1 1 \ "Collector contacts must be rectangular (Magic rules)" edge4way pbc/m1 ~pbc/m1 1 ~pbc/m1 (~pbc,pbc)/m1 1 \ "P-base Contacts must be rectangular (Magic rules)" edge4way nbdc/m1 ~nbdc/m1 1 ~nbdc/m1 (~nbdc,nbdc)/m1 1 \ "CCD-diffusion Contacts must be rectangular (Magic rules)" width pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc,pad/m1 3 \ "First-level metal width must be at least 3 (MOSIS rule #7.1)" spacing pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc,pad/m1 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc,pad/m1 3 touching_ok \ "First-level metal spacing must be at least 3 (MOSIS rule #7.2)" # 1319 "scmos.tech.out" width m2c 4 \ "Contact width must be at least 4 (MOSIS rule #8.1,2,3)" # 1348 "scmos.tech.out" width m2,m2c/m2,m3c/m2,pad 3 \ "Second-level metal width must be at least 3 (MOSIS rule #9.1)" spacing m2,m2c/m2,m3c/m2,pad m2,m2c/m2,m3c/m2,pad 3 touching_ok \ "Second-level metal spacing must be at least 3 (MOSIS rule #9.2b)" # 1418 "scmos.tech.out" width cap,capc/a 2 \ "Electrode capacitor width must be at least 3 (MOSIS rule #11.1)" spacing poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 3 touching_ok \ "Second-level poly spacing must be at least 3 (MOSIS rule #11.2,12.2)" edge4way cap,cc space 1 0 0 0 \ "Cap must be overlapped by poly or poly2 (MOSIS rule #11.3)" edge4way cap,cc poly 2 poly poly 2 \ "Cap must be overlapped by poly or poly2 (MOSIS rule #11.3)" edge4way cap,cc poly2 2 poly2 poly2 2 \ "Cap must be overlapped by poly or poly2 (MOSIS rule #11.3)" edge4way nw,pw,cw ~(nw,pw,cw)/w 2 ~(cap,cc)/a ~(nw,pw,cw)/w 2 \ "Cap must be on a flat surface (MOSIS rule #11.4)" active edge4way ~(nw,pw,cw)/w nw,pw,cw 2 ~(cap,cc)/a nw,pw,cw 2 \ "Cap must be on a flat surface (MOSIS rule #11.4)" active edge4way cap ~(cap)/a 2 nfet,enfet,nffet,pfet,epfet,pffet,poly,poly2,space/a,cc/a \ ndiff,ndc/a,pdiff,pdc/a,poly 2 "Cap must be on a flat surface (MOSIS rule #11.4)" active # 1449 "scmos.tech.out" width poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet 2 \ "Electrode width must be at least 2 (MOSIS rule #12.1)" edge4way enfet,epfet poly2,ec/a 2 poly2,ec/a 0 0 \ "Poly2 must overhang transistor by at least 2 (MOSIS rule #12.3)" edge4way nffet,pffet cap 2 cap 0 0 \ "Cap must overhang transistor by at least 2 (MOSIS rule #12.3)" edge4way nffet ~(cap,nffet,enfet,nfet)/a 2 cap 0 0 \ "Cap must overhang doubletransistor by at least 2 (MOSIS rule #12.3)" edge4way pffet ~(cap,pffet,epfet,pfet)/a 2 cap 0 0 \ "Cap must overhang doubletransistor by at least 2 (MOSIS rule #12.3)" edge4way ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a el 1 space/a 0 1 \ "Poly2 and diffusion must be separated by at least 1 (MOSIS rule #12.4)" spacing poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet pc,ndc,pdc 2 touching_illegal \ "Poly2 spacing to poly or diffusion contact must be at least 3 (MOSIS rule #12.6)" # 1490 "scmos.tech.out" width ec,capc 4 \ "Electrode contact width must be at least 4 (MOSIS rule #13.1)" edge4way ec/a space 1 poly2 poly2 1 \ "Electrode contact must be overlaped by poly2 (MOSIS rule #13.4)" edge4way ec/a poly2 1 poly2 poly2 1 \ "Electrode contact must be overlaped by poly2 by 1 (MOSIS rule #13.4)" edge4way ndiff,ndc/a,pdiff,pdc/a,nsd,nsc/a,psd,psc/a ec 2 space/a 0 2 \ "Poly2 and diffusion contact must be separated by at least 2 (MOSIS rule #13.5)" width m3c 4 \ "Third-level metal contact width must be at least 4 (MOSIS rule #14.1,2,3)" # 1525 "scmos.tech.out" width m3,m3c/m3 5 \ "Third-level metal width must be at least 5 (MOSIS rule #15.1b)" spacing m3,m3c/m3 m3,m3c/m3 3 touching_ok \ "Third-level metal spacing must be at least 3 from other third-level metal (MOSIS rule #15.2b)" edge4way m3c/m3 ~m3c/m3 1 m3 m3 1 \ "Mimimum metal3 overlap of via must be at least 1 (MOSIS rule #15.3)" # 1552 "scmos.tech.out" width clc,pbc,emc 4 \ "Transistor contact width must be at least 4 (MOSIS rule #16.1)" # 1562 "scmos.tech.out" edge4way emc/a,emit pbase 4 pbase pbase 4 \ "Pbase overlap of emitter must be at least 4 (MOSIS rule #16.3)" spacing pbc emc/a,emit 7 touching_illegal \ "Base must be 7 (4+2+1) away from emitter (MOSIS rule #16.3,4,11)" edge4way pbc (~pbc)/a 3 pb,pbc/a pb,pbc/a 3 \ "Pbase overlap of base contact must be at least 3 (MOSIS rule #16.5)" # 1584 "scmos.tech.out" width col,clc/a 6 \ "Collector width must be at least 6 (MOSIS rule #16.6)" edge4way pbase space/a 6 nwell space/a 6 \ "Nwell overlap of Pbase must be at least 6 (MOSIS rule #16.7)" well edge4way pbase (~pbase)/a 4 ~(col,clc)/a ~(col,clc)/a 4 \ "Pbase must be at least 4 away from collector (MOSIS rule #16.8)" edge4way clc (~clc)/a 1 col col 1 \ "Collector overlap of contact must be at least 1 (MOSIS rule #16.9)" edge4way nw ~(nw)/w 3 ~(col,clc)/a ~(nw)/w 3 \ "N-well overlap of collector must be at least 3 (MOSIS rule #16.11)" active edge4way ~(nw)/w nw 3 ~(col,clc)/a nw 3 \ "N-well overlap of collector must be at least 3 (MOSIS rule #16.11)" active width em,emc/a 4 \ "Emitter width must be at least 4 (Magic Bipolar Transistor rule)" spacing em,emc/a em,emc/a 7 touching_ok \ "Unrelated emitter must be at least 7 apart (Magic Bipolar transistor rule)" width pbase,pbc/a 4 \ "Pbase width must be at least 4 (MOSIS extension rule)" spacing pbase,pbc/a pbase,pbc/a 4 touching_ok \ "Pbase spacing must be at least 4 (MOSIS extension rule)" # 1637 "scmos.tech.out" width cwell 10 \ "Cap-well width must be at least 10 (MOSIS rule #17.1)" spacing cwell cwell 9 touching_ok \ "Cap-well spacing must be at least 9 (MOSIS rule #17.2)" spacing cwell nwell 9 touching_illegal \ "Cap-well spacing must be at least 9 (MOSIS rule #17.2)" edge4way cwell space 5 ~(ndiff,ndc/a,nfet,enfet,nffet,wcap)/a ~(ndiff,ndc/a,nfet,enfet,nffet,wcap)/w 5 \ "Cap-well spacing to external active must be at least 5 (MOSIS rule #17.3)" active edge4way cwell space 3 ~(psd,psc/a)/a ~(psd,psc/a)/w 3 \ "P-substrate diffusion and Cap-well must be separated by 3 (MOSIS rule #17.3)" active edge4way space cwell 3 (space,poly,pc)/a 0 0 \ "Cap-well overlap of diffusion must be at least 3 (MOSIS rule #17.4)" active # 1667 "scmos.tech.out" width wcap 3 \ "Well-capacitor must be at least 3 (MOSIS rule #18.1)" edge4way wcap space 1 poly poly 1 \ "Well-capacitor overhang is missing (MOSIS rule #18.3)" edge4way wcap ndiff 3 ndiff ndiff 3 \ "N-diffusion overlap of well-capacitor must be at least 3 (MOSIS rule #18.4)" spacing wcap pc 2 touching_illegal \ "Well-capacitor spacing to poly contact must be at least 2 (MOSIS rule #18.5)" spacing wcap ndc 4 touching_illegal \ "Well-capacitor spacing to diffusion contact must be at least 4 (MOSIS rule #18.6)" width nbd,nbdc,bd/a 4 \ "CCD channel width must be at least 4 (MOSIS rule #19.1)" width nbdc 4 \ "CCD contact width must be at least 4 (MOSIS rule #19.1)" # 1712 "scmos.tech.out" edge4way nbd,nbdc ~(bd,nbd,nbdc)/a 4 (bd,space)/i 0 0 \ "CCD channel spacing must be at least 4 (MOSIS rule #19.2)" implant edge4way nbd,nbdc ~(poly,nbd,nbdc)/a 4 ~(poly,nbd,nbdc)/a ~(poly,nbd,nbdc)/a 4 \ "CCD channel spacing must be at least 4 (MOSIS rule #19.2)" active edge4way bd space 2 nbd,poly,cap,el 0 0 \ "CCD channel overhang is missing (MOSIS rule #19.6)" active spacing nbdc poly,el 1 touching_illegal \ "CCD-diffusion contact spacing to poly must be at least 1 (MOSIS CCD rule)" edge4way nbd poly,el 1 bd 0 0 \ "Missing Buried CCD Difussion layer (MOSIS CCD rule)" implant # 1744 "scmos.tech.out" edge (~hnwell)/w hnwell 10 hnwell hnwell 10\ "High-Voltage N-Well width must be at least 10 (MOSIS rule #1.1)" edge (~hpwell)/w hpwell 10 hpwell hpwell 10\ "High-Voltage P-Well width must be at least 10 (MOSIS rule #1.1)" edge hnwell space,pw,hpw 9 space,pw,hpw space,pw,hpw 9\ "High-Voltage N-Well spacing to N-Well must be at least 9 (MOSIS rule #1.2)" edge hpwell space,nw,hnw 9 space,nw,hnw space,nw,hnw 9\ "High-Voltage P-Well spacing to P-Well must be at least 9 (MOSIS rule #1.2)" edge hnwell space,pw,hpw,nw 12 space,pw,hpw,nw space,pw,hpw,nw 12\ "High-Voltage N-Well spacing must be at least 12 (MOSIS rule #20.1)" edge hpwell space,nw,hnw,pw 12 space,nw,hnw,pw space,nw,hnw,pw 12\ "High-Voltage P-Well spacing must be at least 12 (MOSIS rule #20.1)" edge4way ~(hndiff,hndc/a,hpdiff,hpdc/a)/a hndiff,hndc/a,hpdiff,hpdc/a 3 hndiff,hndc/a,hpdiff,hpdc/a hndiff,hndc/a,hpdiff,hpdc/a 3\ "High-Voltage Diffusion width must be at least 3 (MOSIS rule #2.1)" spacing hndiff,hndc/a,hnfet hndiff,hndc/a,hnfet 5 touching_ok \ "High-Voltage Diffusion spacing must be at least 5 (MOSIS rule #20.2)" spacing hpdiff,hpdc/a,hpfet hpdiff,hpdc/a,hpfet 5 touching_ok \ "High-Voltage Diffusion spacing must be at least 5 (MOSIS rule #20.2)" spacing hndiff,hndc/a hpdiff,hpdc/a 14 touching_illegal \ "P-type diffusion must be 14 away from N-type diffusion (MOSIS rule #20.3)" spacing hndiff,hndc/a pdiff,pdc/a 12 touching_illegal \ "P-type diffusion must be 12 away from N-type diffusion (MOSIS rule #20.3+2.3)" spacing hpdiff,hpdc/a ndiff,ndc/a 12 touching_illegal \ "P-type diffusion must be 12 away from N-type diffusion (MOSIS rule #20.3+2.3)" spacing hndiff,hnfet,hndc/a hnwell 7 touching_illegal \ "HVN-diffusion and HVN-well must be separated by 7 (MOSIS rule #20.3)" spacing hpdiff,hpfet,hpdc/a hpwell 7 touching_illegal \ "HVP-diffusion and HVP-well must be separated by 7 (MOSIS rule #20.3)" spacing nsd,nsc/a hpwell 3 touching_illegal \ "N-substrate diffusion and HVP-well must be separated by 3 (MOSIS rule #2.4+20.3)" spacing psd,psc/a hnwell 3 touching_illegal \ "P-substrate diffusion and HVN-well must be separated by 3 (MOSIS rule #2.4+20.3)" # 1798 "scmos.tech.out" edge (~hndc)/a hndc/a 6 hndc/a hndc/a 6\ "High-Voltage Diffusion contact width must be at least 6 (MOSIS rule #20.5)" edge (~hpdc)/a hpdc/a 6 hpdc/a hpdc/a 6\ "High-Voltage Diffusion contact width must be at least 6 (MOSIS rule #20.5)" edge hpdiff,hpdc/a hpfet 4 hpfet 0 0 \ "High-Voltage transistor must be at least 4 units long (MOSIS rule #20.6)" edge hndiff,hndc/a hnfet 4 hnfet 0 0 \ "High-Voltage transistor must be at least 4 units long (MOSIS rule #20.6)" exact_overlap m3c,m2c,ndc,pdc,pc,psc,nsc,ec,capc,clc,emc,pbc,hndc,hpdc,hnsc,hpsc no_overlap pfet,nfet pfet,nfet no_overlap epfet,enfet epfet,enfet no_overlap pffet,nffet pffet,nffet no_overlap hpfet,hnfet hpfet,hnfet end extract # 1 "./extract_template/scmosExt.tech.in" 1 # 93 "./extract_template/scmosExt.tech.in" # 1 "./extract_template/scmosExt26b-sub.tech.in" 1 style lambda=0.4 lambda 40 step 100 sidehalo 8 areacap nwell 26 perimc nwell ~(nwell) 80 areacap (ndiff,nsd,ndc,nsc)/a 0 perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0 areacap (pdiff,psd,pdc,psc)/a 0 perimc (pdiff,psd,pdc,psc)/a space,nwell 0 # 46 "./extract_template/scmosExt26b-sub.tech.in" areacap (poly,pc)/a 10 overlap (poly,pc)/a nwell,pwell 10 perimc (poly,pc)/a ~(poly,pc)/a 18 sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 18 sideoverlap (poly,pc)/a ~(poly,pc)/a (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 8 sideoverlap (poly,pc)/a ~(poly,pc)/a (m2,m2c,m3c,pad)/m2 5 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sideoverlap (poly,pc)/a ~(poly,pc)/a (m3,m3c,pad)/m3 3 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sidewall (poly,pc)/a ~(poly,pc)/a ~(poly,pc)/a (poly,pc)/a 9 areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 6 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 6 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 9 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 9 perimc (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 18 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 18 ((poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a) sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 20 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 20 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m2,m2c,m3c,pad)/m2 10 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m3,m3c,pad)/m3 6 (m2,m2c,m3c,pad)/m2 sidewall (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 22 areacap (m2,m2c,m3c,pad)/m2 2.5 overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 2.5 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 4 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 6 perimc (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 15 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 nwell,pwell 15 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a) sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 16 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (poly,pc)/a 16 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 18 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m3,m3c,pad)/m3 8 sidewall (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m2,m2c,m3c,pad)/m2 26 areacap (m3,m3c,pad)/m3 2 overlap (m3,m3c,pad)/m3 nwell,pwell 2 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m3,m3c,pad)/m3 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2 overlap (m3,m3c,pad)/m3 (poly,pc)/a 2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2 overlap (m3,m3c,pad)/m3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 3 (m2,m2c,m3c,pad)/m2 overlap (m3,m3c,pad)/m3 (m2,m2c,m3c,pad)/m2 6 perimc (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 14 sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 nwell,pwell 14 ((ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a,(poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 14 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (poly,pc)/a 14 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 16 ((m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m2,m2c,m3c,pad)/m2 20 sidewall (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m3,m3c,pad)/m3 40 fet pfet pdiff,pdc 2 pfet Vdd! nwell 204 450 fet nfet ndiff,ndc 2 nfet Gnd! pwell 150 450 fetresis nfet linear 14100 fetresis pfet linear 48100 fetresis nfet saturation 14100 fetresis pfet saturation 48100 resist (ndiff,nsd,ndc/act,nsc/act) 3800 resist (pdiff,psd,pdc/act,psc/act) 3800 resist (poly,pc/act,pfet,nfet) 5000 resist (metal1,m2c/metal1) 81 resist (metal2,via/m2,pad) 81 resist (metal3,pad/m3,via2/m3) 34 resist nwell 1980000 contact pc 4 15000 contact ndc,pdc,nsc,psc 4 1500 contact m2c 4 500 contact m3c 4 500 planeorder implant 0 planeorder well 1 planeorder active 2 planeorder metal1 3 planeorder metal2 4 planeorder metal3 5 planeorder oxide 6 # 94 "./extract_template/scmosExt.tech.in" 2 # 1 "./extract_template/scmosExt14b-sub.tech.in" 1 # 13 "./extract_template/scmosExt14b-sub.tech.in" style lambda=0.30 lambda 30 step 100 sidehalo 10 areacap nwell 19 perimc nwell ~(nwell) 60 areacap (ndiff,nsd,ndc,nsc)/a 0 perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0 areacap (pdiff,psd,pdc,psc)/a 0 perimc (pdiff,psd,pdc,psc)/a space,nwell 0 # 55 "./extract_template/scmosExt14b-sub.tech.in" areacap (poly,pc)/a 8.2 overlap (poly,pc)/a nwell,pwell 8.2 perimc (poly,pc)/a ~(poly,pc)/a 12.6 sideoverlap (poly,pc)/a ~(poly,pc)/a nwell,pwell 12.6 sideoverlap (poly,pc)/a ~(poly,pc)/a (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 5.7 sideoverlap (poly,pc)/a ~(poly,pc)/a (m2,m2c,m3c,pad)/m2 2.7 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sideoverlap (poly,pc)/a ~(poly,pc)/a (m3,m3c,pad)/m3 1.8 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sidewall (poly,pc)/a ~(poly,pc)/a ~(poly,pc)/a (poly,pc)/a 7.2 areacap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 3.5 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 3.5 (poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 5.7 overlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 5.7 perimc (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 15 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 nwell,pwell 15 ((poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a) sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 17.4 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (poly,pc)/a 17.4 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m2,m2c,m3c,pad)/m2 8.7 sideoverlap (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m3,m3c,pad)/m3 4.8 (m2,m2c,m3c,pad)/m2 sidewall (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 ~(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 19.2 areacap (m2,m2c,m3c,pad)/m2 1.3 overlap (m2,m2c,m3c,pad)/m2 nwell,pwell 1.3 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 1.5 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (poly,pc)/a 1.5 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 overlap (m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 3.5 perimc (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 12.3 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 nwell,pwell 12.3 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(poly,pc)/a,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a) sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 12.9 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (poly,pc)/a 12.9 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 15 sideoverlap (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m3,m3c,pad)/m3 10.8 sidewall (m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 ~(m2,m2c,m3c,pad)/m2 (m2,m2c,m3c,pad)/m2 21.6 areacap (m3,m3c,pad)/m3 .81 overlap (m3,m3c,pad)/m3 nwell,pwell .81 (poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2,(ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a overlap (m3,m3c,pad)/m3 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a .88 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2 overlap (m3,m3c,pad)/m3 (poly,pc)/a .88 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2 overlap (m3,m3c,pad)/m3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 1.3 (m2,m2c,m3c,pad)/m2 overlap (m3,m3c,pad)/m3 (m2,m2c,m3c,pad)/m2 3.3 perimc (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 12.3 sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 nwell,pwell 12.3 ((ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a,(poly,pc)/a,(m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (ndiff,pdiff,em,col,ppd,nnd,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc)/a 12.9 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (poly,pc)/a 12.9 ((m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1,(m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m1,ndc,pdc,nwc,pwc,nbdc,capc,ec,clc,emc,pbc,pc,via)/m1 15.3 ((m2,m2c,m3c,pad)/m2) sideoverlap (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m2,m2c,m3c,pad)/m2 19.2 sidewall (m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 ~(m3,m3c,pad)/m3 (m3,m3c,pad)/m3 34.3 fet pfet pdiff,pdc 2 pfet Vdd! nwell 218 88 fet nfet ndiff,ndc 2 nfet Gnd! pwell 267 88 fetresis nfet linear 8500 fetresis pfet linear 24500 fetresis nfet saturation 8500 fetresis pfet saturation 24500 resist (ndiff,nsd,ndc/act,nsc/act) 3100 resist (pdiff,psd,pdc/act,psc/act) 2500 resist (poly,pc/act,pfet,nfet) 7500 resist (metal1,m2c/metal1) 83 resist (metal2,via/m2,pad) 84 resist (metal3,pad/m3,via2/m3) 41 resist nwell 1980000 contact pc 4 10000 contact ndc,pdc,nsc,psc 4 4500 contact m2c 4 1000 contact m3c 4 1000 planeorder implant 0 planeorder well 1 planeorder active 2 planeorder metal1 3 planeorder metal2 4 planeorder metal3 5 planeorder oxide 6 # 95 "./extract_template/scmosExt.tech.in" 2 # 1 "./extract_template/scmosExtDiag.tech.in" 1 style check_nwell lambda 100 step 100 resist nwell 2000000 areacap nw,nwc,nsd 100 noplaneordering style check_pwell lambda 100 step 100 resist pwell 2000000 areacap pw,pwc,psd 100 noplaneordering style check_psubstr lambda 50 step 200 areacap psd,psc 1000 noplaneordering style check_nsubstr lambda 50 step 200 areacap nsd,nsc 1000 noplaneordering # 97 "./extract_template/scmosExt.tech.in" 2 # 1830 "scmos.tech.out" 2 # 2635 "scmos.tech.out" end wiring contact pdcontact 4 pdiff 0 metal1 0 contact ndcontact 4 ndiff 0 metal1 0 contact pcontact 4 poly 0 metal1 0 contact ec 6 poly2 0 metal1 0 contact m2contact 4 metal1 0 metal2 0 contact m3contact 5 metal2 0 metal3 0 end router layer1 metal1 3 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc 3 layer2 metal2 3 m2,m2c/m2,m3c/m2,pad 4 poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet,ndiff,ndc/a,pdiff,pdc/a 1 contacts m2contact 4 gridspacing 8 end plowing fixed nfet,enfet,nffet,pfet,epfet,pffet,glass,pad covered nfet,enfet,nffet,pfet,epfet,pffet drag nfet,enfet,nffet,pfet,epfet,pffet end plot style colorversatec ndiff,ndc yellow \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA ndiff,ndc cyan \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 nsd,nsc,col,clc yellow \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 nsd,nsc,col,clc cyan \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 pdiff,pdc yellow \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA pdiff,pdc cyan \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 pdiff,pdc magenta \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 psd,psc yellow \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 \ 1515 2A2A 5151 A2A2 psd,psc cyan \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 \ 0000 1515 0000 5151 psd,psc magenta \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 \ 2A2A 0000 A2A2 0000 poly,pc/a magenta \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA poly2,ec/a yellow \ FFFF FFFF FFFF FFFF \ FFFF FFFF FFFF FFFF \ FFFF FFFF FFFF FFFF \ FFFF FFFF FFFF FFFF nfet yellow \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 nfet cyan \ 0000 0505 0000 1414 \ 0000 5050 0000 4141 \ 0000 0505 0000 1414 \ 0000 5050 0000 4141 nfet magenta \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A \ 5050 2828 4141 A0A0 \ 0505 8282 1414 0A0A enfet yellow \ BABA 7575 EAEA D5D5 \ ABAB 5757 AEAE 5D5D \ BABA 7575 EAEA D5D5 \ ABAB 5757 AEAE 5D5D enfet cyan \ 4141 0A0A 0505 2828 \ 1414 A0A0 5050 8282 \ 4141 0A0A 0505 2828 \ 1414 A0A0 5050 8282 nffet yellow \ 8E8E 0707 8B8B D5D5 \ E8E8 7070 B8B8 5D5D \ 8E8E 0707 8B8B D5D5 \ E8E8 7070 B8B8 5D5D nffet cyan \ 0101 0808 1414 2828 \ 1010 8080 4141 8282 \ 0101 0808 1414 2828 \ 1010 8080 4141 8282 nffet magenta \ 5050 A0A0 4040 0202 \ 0505 0A0A 0404 2020 \ 5050 A0A0 4040 0202 \ 0505 0A0A 0404 2020 pfet yellow \ 6363 A0A0 5050 2828 \ 3636 0A0A 0505 8282 \ 6363 A0A0 5050 2828 \ 3636 0A0A 0505 8282 pfet cyan \ 0000 5151 0000 5454 \ 0000 1515 0000 1515 \ 0000 5151 0000 5454 \ 0000 1515 0000 1515 pfet magenta \ 9494 0A0A 2525 8282 \ 4949 A0A0 5252 2828 \ 9494 0A0A 2525 8282 \ 4949 A0A0 5252 2828 epfet yellow \ BCBC 4F4F 2F2F D3D3 \ CBCB F4F4 F2F2 3D3D \ BCBC 4F4F 2F2F D3D3 \ CBCB F4F4 F2F2 3D3D epfet cyan \ 0000 A0A0 0000 2828 \ 0000 0A0A 0000 8282 \ 0000 A0A0 0000 2828 \ 0000 0A0A 0000 8282 epfet magenta \ 4141 0000 5050 0000 \ 1414 0000 0505 0000 \ 4141 0000 5050 0000 \ 1414 0000 0505 0000 pffet yellow \ 7B7B F0F0 F0F0 E9E9 \ B7B7 0F0F 0F0F 9E9E \ 7B7B F0F0 F0F0 E9E9 \ B7B7 0F0F 0F0F 9E9E pffet cyan \ 0000 0101 0000 1414 \ 0000 1010 0000 4141 \ 0000 0101 0000 1414 \ 0000 1010 0000 4141 pffet magenta \ 8484 0A0A 2525 8282 \ 4848 A0A0 5252 2828 \ 8484 0A0A 2525 8282 \ 4848 A0A0 5252 2828 cap,cc/a yellow \ 3E3E 7777 E3E3 C1C1 \ E3E3 7777 3E3E 1C1C \ 3E3E 7777 E3E3 C1C1 \ E3E3 7777 3E3E 1C1C cap,cc/a magenta \ 4141 8888 1414 2A2A \ 1414 8888 4141 A2A2 \ 4141 8888 1414 2A2A \ 1414 8888 4141 A2A2 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc cyan \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 \ AAAA 0000 AAAA 0000 m2,m2c/m2,m3c/m2,pad cyan \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 \ 0000 1111 0000 4444 m2,m2c/m2,m3c/m2,pad magenta \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 \ 0000 4444 0000 1111 m2c/m1 black \ 0000 6666 6666 0000 \ 0000 9999 9999 0000 \ 0000 6666 6666 0000 \ 0000 9999 9999 0000 pad,glass black \ 0300 0700 0E00 1C00 \ 3800 7000 E000 C000 \ 00C0 00E0 0070 0038 \ 001C 000E 0007 0003 nwell yellow \ 0800 1000 2000 4000 \ 8000 0001 0002 0004 \ 0008 0010 0020 0040 \ 0080 0010 0200 0400 nwell cyan \ 1000 2000 4000 8000 \ 0001 0002 0004 0008 \ 0010 0020 0040 0080 \ 0100 0200 0400 0800 pwell yellow \ 1000 0400 0400 0100 \ 0100 0040 0040 0010 \ 0010 0004 0004 0001 \ 0001 4000 4000 1000 pwell cyan \ 0000 0800 0000 0200 \ 0000 0080 0000 0020 \ 0000 0008 0000 0002 \ 0000 8000 0000 2000 pwell magenta \ 0800 0000 0200 0000 \ 0080 0000 0020 0000 \ 0008 0000 0002 0000 \ 8000 0000 2000 0000 bd yellow \ 4444 8888 4444 8888 \ 4444 8888 4444 8888 \ 4444 8888 4444 8888 \ 4444 8888 4444 8888 bd cyan \ 0000 4444 0000 4444 \ 0000 4444 0000 4444 \ 0000 4444 0000 4444 \ 0000 4444 0000 4444 bd magenta \ 8888 0000 8888 0000 \ 8888 0000 8888 0000 \ 8888 0000 8888 0000 \ 8888 0000 8888 0000 nbd,nbdc yellow \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA \ 5555 AAAA 5555 AAAA nbd,nbdc cyan \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 \ 0000 5555 0000 5555 nbd,nbdc magenta \ 8888 0000 8888 0000 \ 8888 0000 8888 0000 \ 8888 0000 8888 0000 \ 8888 0000 8888 0000 em,emc yellow \ 4444 8888 4444 8888 \ 4444 8888 4444 8888 \ 4444 8888 4444 8888 \ 4444 8888 4444 8888 em,emc cyan \ 0000 4444 0000 4444 \ 0000 4444 0000 4444 \ 0000 4444 0000 4444 \ 0000 4444 0000 4444 pbase,pbc yellow \ 5555 AAAA 0000 0000 \ 5555 AAAA 0000 0000 \ 5555 AAAA 0000 0000 \ 5555 AAAA 0000 0000 pbase,pbc cyan \ 0000 5555 0000 0000 \ 0000 5555 0000 0000 \ 0000 5555 0000 0000 \ 0000 5555 0000 0000 pbase,pbc magenta \ AAAA 0000 0000 0000 \ AAAA 0000 0000 0000 \ AAAA 0000 0000 0000 \ AAAA 0000 0000 0000 m3,m3c/m3 black \ 0100 0000 0000 0000 \ 1010 0000 0000 0000 \ 0001 0000 0000 0000 \ 1010 0000 0000 0000 m3,m3c/m3 cyan \ 0280 0000 0820 0000 \ 2008 0000 8002 0000 \ 8002 0000 2008 0000 \ 0820 0000 0280 0000 m3,m3c/m3 magenta \ 0100 06C0 0440 1830 \ 1010 600C 4004 8003 \ 0001 C006 4004 3018 \ 1010 0C60 0440 0380 m3c/m2 black \ 0820 0820 0820 0FE0 \ E00F 2008 2008 2008 \ 2008 2008 2008 E00F \ 0000 0FE0 0820 0820 error_p,error_s,error_ps black \ 0000 3C3C 4646 4A4A \ 5252 6262 3C3C 0000 \ 0000 3C3C 4646 4A4A \ 5252 6262 3C3C 0000 magnet yellow \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 \ AAAA 0000 5555 0000 fence magenta \ FFFF 0000 0000 0000 \ 0000 0000 0000 0000 \ FFFF 0000 0000 0000 \ 0000 0000 0000 0000 rotate cyan \ 0000 E0E0 E0E0 E0E0 \ 0000 0000 0000 0000 \ 0000 E0E0 E0E0 E0E0 \ 0000 0000 0000 0000 pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,clc,emc,pbc X style versatec pfet \ 07c0 0f80 1f00 3e00 \ 7c00 f800 f001 e003 \ c007 800f 001f 003e \ 00c7 00f8 01f0 03e0 nfet \ 1f00 0f80 07c0 03e0 \ 01f0 00f8 007c 003e \ 001f 800f c007 e003 \ f001 f800 7c00 3e00 m2c \ c3c3 c3c3 0000 0000 \ 0000 0000 c3c3 c3c3 \ c3c3 c3c3 0000 0000 \ 0000 0000 c3c3 c3c3 pwell \ 2020 2020 2020 2020 \ 2020 2020 2020 2020 \ 0000 0000 0000 0000 \ 0000 0000 0000 0000 nwell \ 0808 0404 0202 0101 \ 0000 0000 0000 0000 \ 0808 0404 0202 0101 \ 0000 0000 0000 0000 poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet \ 0808 0400 0202 0101 \ 8080 4000 2020 1010 \ 0808 0004 0202 0101 \ 8080 0040 2020 1010 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc \ 8080 0000 0000 0000 \ 0808 0000 0000 0000 \ 8080 0000 0000 0000 \ 0808 0000 0000 0000 pad,glass \ 0000 0000 1c1c 3e3e \ 3636 3e3e 1c1c 0000 \ 0000 0000 1c1c 3e3e \ 3636 3e3e 1c1c 0000 nsd,nsc,col,clc \ 0808 1414 2222 4141 \ 8080 4040 2020 1010 \ 0808 1414 2222 4141 \ 8080 4040 2020 1010 m2,m2c/m2,m3c/m2,pad \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 \ 0000 1111 0000 0000 pdiff,pdc,pfet \ 0000 0808 5555 8080 \ 0000 8080 5555 0808 \ 0000 0808 5555 8080 \ 0000 8080 5555 0808 psd,psc \ 1414 2222 0000 2222 \ 4141 2222 0000 2222 \ 1414 2222 0000 2222 \ 4141 2222 0000 2222 ndiff,nfet,ndc \ 0808 1010 2020 4040 \ 8080 4141 2222 1414 \ 0808 1010 2020 4040 \ 8080 4141 2222 1414 poly2,ec/a,enfet,epfet,cap,capc/a,nffet,pffet,hnfet,hpfet \ 0000 2020 5050 2020 \ 0000 0202 0505 0202 \ 0000 2020 5050 2020 \ 0000 0202 0505 0202 pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,nbdc,clc,emc,pbc X style gremlin pfet 9 nfet 10 m2c 11 pwell 15 nwell 16 poly,pc/a,nfet,pfet,wcap,cap,capc/a,nffet,pffet 19 pdc/m1,ndc/m1,psc/m1,nsc/m1,hpdc/m1,hndc/m1,hpsc/m1,hnsc/m1,pc/m1,ec/m1,capc/m1,clc/m1,emc/m1,pbc/m1,nbdc/m1,m1,m2c/m1,gc 22 pad,glass 23 nsd,nsc 24 m2,m2c/m2,m3c/m2,pad 28 pdiff,pdc,pfet 29 psd,psc 30 ndiff,nfet,ndc 31 m2c/m1,pc/m1,ndc/m1,pdc/m1,psc/m1,nsc/m1,pad/m1 X style postscript 1 C0C0C0C0 C0C0C0C0 00000000 00000000 0C0C0C0C 0C0C0C0C 00000000 00000000 2 A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A A0A0A0A0 0A0A0A0A 3 00030003 000C000C 00300030 00C000C0 03000300 0C000C00 30003000 C000C000 4 00000000 00000000 C0C0C0C0 00000000 00000000 00000000 0C0C0C0C 00000000 5 FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF FFFFFFFF 6 07070707 0E0E0E0E 1C1C1C1C 38383838 70707070 E0E0E0E0 C1C1C1C1 83838383 7 18181818 30303030 60606060 C0C0C0C0 81818181 03030303 06060606 0C0C0C0C 8 18181818 0C0C0C0C 06060606 03030303 81818181 C0C0C0C0 60606060 30303030 9 18181818 3C3C3C3C 3C3C3C3C 18181818 81818181 C3C3C3C3 C3C3C3C3 81818181 10 F0F0F0F0 60606060 06060606 0F0F0F0F 0F0F0F0F 06060606 60606060 F0F0F0F0 11 01000080 02000040 0C000030 F000000F 000FF000 00300C00 00400200 00800100 12 00000000 00000000 00000000 00000000 00000000 00000000 00000000 00000000 13 00000000 00000000 33333333 33333333 00000000 00000000 CCCCCCCC CCCCCCCC 1 47 95 111 0 2 223 31 223 0 3 0 0 0 192 4 31 111 31 0 5 31 111 255 0 6 63 95 191 0 7 255 63 255 0 8 0 0 0 127 9 223 47 223 0 10 0 255 255 0 11 0 0 255 0 12 191 127 0 0 13 95 223 63 0 14 0 0 0 255 15 191 127 63 0 16 111 151 244 0 17 23 175 183 0 cc,pc,ndc,pdc,psc,nsc 14 X m2c,pad,glass 14 B pad,glass 14 11 m2c 14 13 m2,m2c,pad 13 10 pdc,ndc,psc,nsc,hpdc,hndc,hpsc,hnsc,pc,ec,capc,clc,emc,pbc,nbdc,m1,m2c,gc 12 9 cap,cc,poly2 11 7 nsd,nsc 7 1 psd,psc 6 1 nfet,nffet 9 8 pfet,wcap,pffet 1 7 poly,pc,cap,cc 10 5 nfet 16 5 pfet,wcap 17 5 pdiff,pdc,pffet 1 5 ndiff,ndc,nffet 9 5 pwell 1 4 nwell 2 4 style pnm draw metal1 draw metal2 draw polysilicon draw ndiffusion draw pdiffusion draw ntransistor draw ptransistor map psubstratepdiff pdiffusion map nsubstratendiff ndiffusion map polycontact polysilicon metal1 map m2contact metal1 metal2 map m3contact metal2 metal3 map ndcontact ndiffusion metal1 map pdcontact pdiffusion metal1 map nsubstratencontact ndiffusion metal1 map psubstratepcontact pdiffusion metal1 end