/* This is for HP's CMOS26B 1.0 micron CMOS Bulk Process. All parameters are defined based on HP's general process specifications (GPP). Sidewall fringing was taken from Ersatco fictitious process (johnson,jouppi). Upwards fringe caps (eg poly-->m1, poly-->m2) are computed by the program scaleCap by using the Sakurai/Tamaru formula based on the known capacitances. */ #ifdef extForSpice style lambda=0.30 #else style lambda_irsim=0.30 #endif lambda 30 step 100 sidehalo 10 /* 4 more than min m3 spacing */ #ifdef INCLUDE_FET_CAP /* Normally off since neither spice or irsim need it */ areacap allFet 692 /* af/lambda^2 */ #endif /* ------------ diff capacitances ---------------- */ areacap nwell 19 /* 208aF/um2*/ perimc nwell ~(nwell) 60 /* scale the 26b value */ #ifdef extForSpice areacap (ndiff,nsd,ndc,nsc)/a 0 perimc (ndiff,nsd,ndc,nsc)/a space,pwell 0 areacap (pdiff,psd,pdc,psc)/a 0 perimc (pdiff,psd,pdc,psc)/a space,nwell 0 #else /* Real perim values increased a little to compensate for not counting CJGATE */ areacap (ndiff,nsd,ndc,nsc)/a 23 perimc (ndiff,nsd,ndc,nsc)/a space,pwell 160 /* field - 320aF/um */ /* gate - 614aF/um */ areacap (pdiff,psd,pdc,psc)/a 52 perimc (pdiff,psd,pdc,psc)/a space,nwell 90 /* field - 213aF/um */ /* gate - 332aF/um */ #endif /* ------------------------------------------------------ */ /* ------------ poly capacitances ---------------- */ areacap PolyCap 8.2 overlap PolyCap allWell 8.2 perimc PolyCap ~PolyCap 12.6 sideOverlap(PolyCap, ~PolyCap, allWell, 12.6, ) sideOverlap(PolyCap, ~PolyCap, M1Cap, 5.7, ) sideOverlap(PolyCap, ~PolyCap, M2Cap, 2.7, M1Cap) sideOverlap(PolyCap, ~PolyCap, M3Cap, 1.8, M1CapCommaM2Cap) sidewall PolyCap ~PolyCap ~PolyCap PolyCap 7.2 /* ------------------------------------------------- */ /* ------------ metal1 capacitances ---------------- */ areacap M1Cap 3.5 overlap M1Cap allWell 3.5 PolyCap,PNplusCap overlap M1Cap PNplusCap 5.7 overlap M1Cap PolyCap 5.7 perimc M1Cap ~M1Cap 15 sideOverlap(M1Cap, ~M1Cap, allWell, 15, PolyCapCommaPNplusCap) sideOverlap(M1Cap, ~M1Cap, PNplusCap, 17.4, ) sideOverlap(M1Cap, ~M1Cap, PolyCap, 17.4, ) sideOverlap(M1Cap, ~M1Cap, M2Cap, 8.7, ) sideOverlap(M1Cap, ~M1Cap, M3Cap, 4.8, M2Cap) sidewall M1Cap ~M1Cap ~M1Cap M1Cap 19.2 /* ------------------------------------------------- */ /* ------------ metal2 capacitances ---------------- */ areacap M2Cap 1.3 overlap M2Cap allWell 1.3 PolyCap,M1Cap,PNplusCap overlap M2Cap PNplusCap 1.5 M1Cap overlap M2Cap PolyCap 1.5 M1Cap overlap M2Cap M1Cap 3.5 perimc M2Cap ~M2Cap 12.3 sideOverlap(M2Cap, ~M2Cap, allWell, 12.3, M1CapCommaPolyCapCommaPNplusCap ) sideOverlap(M2Cap, ~M2Cap, PNplusCap, 12.9, M1Cap) sideOverlap(M2Cap, ~M2Cap, PolyCap, 12.9, M1Cap) sideOverlap(M2Cap, ~M2Cap, M1Cap, 15, ) sideOverlap(M2Cap, ~M2Cap, M3Cap, 10.8, ) sidewall M2Cap ~M2Cap ~M2Cap M2Cap 21.6 /* ------------------------------------------------- */ /* ------------ metal3 capacitances ---------------- */ areacap M3Cap .81 overlap M3Cap allWell .81 PolyCap,M1Cap,M2Cap,PNplusCap overlap M3Cap PNplusCap .88 M1Cap,M2Cap overlap M3Cap PolyCap .88 M1Cap,M2Cap overlap M3Cap M1Cap 1.3 M2Cap overlap M3Cap M2Cap 3.3 perimc M3Cap ~M3Cap 12.3 sideOverlap(M3Cap, ~M3Cap, allWell, 12.3, PNplusCapCommaPolyCapCommaM1CapCommaM2Cap) sideOverlap(M3Cap, ~M3Cap, PNplusCap, 12.9, M1CapCommaM2Cap) sideOverlap(M3Cap, ~M3Cap, PolyCap, 12.9, M1CapCommaM2Cap) sideOverlap(M3Cap, ~M3Cap, M1Cap, 15.3, M2Cap) sideOverlap(M3Cap, ~M3Cap, M2Cap, 19.2, ) sidewall M3Cap ~M3Cap ~M3Cap M3Cap 34.3 /* ------------------------------------------------- */ /* Unchanged yet for .35um*/ /* -------------- Fets -----------------------------*/ /* cscab, cscap defined since extresis needs them */ /* gate cap is actually 982aF/um^2 or .344fF/um*/ fet pfet pdiff,pdc 2 pfet Vdd! nwell 218 88 fet nfet ndiff,ndc 2 nfet Gnd! pwell 267 88 /* These values are the equivalent resistance that irsim params for 3.3 V 85C */ fetresis nfet linear 8500 /* resistance dyn L */ fetresis pfet linear 24500 /* resistance dyn H */ fetresis nfet saturation 8500 /* resistance dyn L */ fetresis pfet saturation 24500 /* resistance dyn H */ /* ------------------------------------------------- */ /* -------------- Resistivity (in milliohms per sq) -------*/ /* ---- assumed temp 85 C ----- */ resist NDRes 3100 resist PDRes 2500 resist PolyRes 7500 /*4400 for W>1.0um*/ resist M1Res 83 resist M2Res 84 resist M3Res 41 resist nwell 1980000 /*unchanged from 26b*/ /* Values are for per contact */ contact pc 4 10000 /*8k-nom 15k-max*/ contact ndc,pdc,nsc,psc 4 4500 contact m2c 4 1000 contact m3c 4 1000 /* ------------------------------------------------- */ /* Order the planes for correct shielding */ planeOrder(implant,0) planeOrder(well,1) planeOrder(active,2) planeOrder(metal1,3) planeOrder(metal2,4) planeOrder(metal3,5) planeOrder(oxide,6)