.global vdd gnd X1 C10 R$1 vdd nc 1k .subckt FILLER_CAP M1 gnd vdd gnd gnd NMOS W=10u L=10u .ends FILLER_CAP .subckt DUMMY M1 a a a b NMOS W=1u L=1u .ends DUMMY .subckt C10 X1 C1 X2 C2 X3 C3 X4 C4 .ends C10 .subckt C4 X3 C1 .ends C4 .subckt C1 * generates gnd and vdd X1 FILLER_CAP X2 DUMMY .ends C1 .subckt C2 * does not generate gnd or vdd X1 DUMMY .ends C2 .subckt C3 * generates gnd and vdd too X1 FILLER_CAP M1 gnd vdd gnd gnd NMOS W=10u L=10u .ends C3